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Cyclic acetals or ketals of 8-keto esters or amides

Assignee: Olin Microelectronic Chemicals Inc
•
Filing: 1987-11-27
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Granted: 1989-02-21
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Expires: 2007-11-27
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Abstract

Abstract Compounds of formula I ##STR1## in conjunction with compounds that donate acid when exposed to actinic radiation, are suitable for use as positive photoresists. In formula I, R 1 and R 2 are hydrogen, alkyl, aryl, cycloalkyl, aralkyl or alkaryl, R 3 to R 8 are hydrogen or lower alkyl, X is --O-- or --NR 9 --, where R 9 is hydrogen or C 1 -C 4 alkyl n is 0 or 1, m is 2, 3 or 4 and Q is an organic radical of valency m. The photoresists are suitable for making printing formes, printed circuits, integrated circuits or silver-free photographic films.

Inventors

  • 👤 Martin Roth

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-31 12:30
CPC Classifications
C; C07; C07D; C07D319/00; C07D319/04; C07D319/06; C07D317/00; C07D317/08; C07D317/10; C07D317/14; C07D317/30; G; G03; G03F; G03F7/00; G03F7/004; G03F7/0045; G03F7/022

Claims Analysis

Total Claims: 13
Claim 1
Independent Claim 192 words
A compound of formula I ##STR16## wherein R 1 and R 2 are each independently of the other hydrogen, C 1 -C 8 alkyl, phenyl, naphthyl, C 5 -C 7 cycloalkyl, C 7 -C 14 aralkyl or C 7 -C 14 alkaryl, which organic radicals are substituted by zero to three members selected from the group consisting of halogen, hydroxy, alkoxy, nitro, cyano and amino, R 3 , R 4 , R 5 , R 6 , R 7 and R 8 are each independently hydrogen or C 1 -C 4 alkyl, X is --O--or --NR 9 --, where R 9 is hydrogen or C 1 -C 4 alkyl, n is 0 or 1, m is 2, 3 or 4, and Q is an aliphatic, cycloaliphatic, aromatic, araliphatic or 5- or 6-membered heterocyclic radical of valency m, with the proviso that where several ester or amide radicals are present in the molecule, the groups R 1 to R 9 within the scope of the above definitions are the same or different different and, where n is 0, both carbon atoms are linked direct to each other to form a 5-membered heterocyclic radical.
Claim 2
Dependent Claim 192 words
A compound of formula I ##STR16## wherein R 1 and R 2 are each independently of the other hydrogen, C 1 -C 8 alkyl, phenyl, naphthyl, C 5 -C 7 cycloalkyl, C 7 -C 14 aralkyl or C 7 -C 14 alkaryl, which organic radicals are substituted by zero to three members selected from the group consisting of halogen, hydroxy, alkoxy, nitro, cyano and amino, R 3 , R 4 , R 5 , R 6 , R 7 and R 8 are each independently hydrogen or C 1 -C 4 alkyl, X is --O--or --NR 9 --, where R 9 is hydrogen or C 1 -C 4 alkyl, n is 0 or 1, m is 2, 3 or 4, and Q is an aliphatic, cycloaliphatic, aromatic, araliphatic or 5- or 6-membered heterocyclic radical of valency m, with the proviso that where several ester or amide radicals are present in the molecule, the groups R 1 to R 9 within the scope of the above definitions are the same or different different and, where n is 0, both carbon atoms are linked direct to each other to form a 5-membered heterocyclic radical.
Claim 3
Dependent Claim 71 words
A compound of formula I according to claim 1, wherein R 1 and R 2 are each independently of the other hydrogen, C 1 -C 4 alkyl or phenyl, R 3 , R 4 , R 5 and R 6 are each independently hydrogen or methyl, X is --O-- or --NH--, n is 0, m is 2 or 3, and Q is an aliphatic, cycloaliphatic or araliphatic radical of valency m.
Claim 4
Dependent Claim 70 words
A compound of formula I according to claim 1, wherein R 1 and R 2 are each independently of the other hydrogen, methyl or phenyl, R 3 , R 4 , R 5 and R 6 are hydrogen, X is --O-- or --NH--, n is 0, m is 2, and Q is divalent radical which is selected from the group consisting of C 2 -C 18 alkylene, xylylene and hexahydroxylylene.
Claim 5
Dependent Claim 63 words
A compound of formula I according to claim 1, wherein R 1 and R 2 are each independently of the other hydrogen, methyl or phenyl, R 3 , R 4 R 5 and R 6 are hydrogen, X is --O-- or --NH--, n is 0 and m is 3, nd Q is derived from trimethylolpropane or glycerol after removal of the alcohol groups.
Claim 6
Dependent Claim 60 words
A compound of formula I according 1, wherein R 1 and R 2 are each independently of the other hydrogen, methyl or phenyl, R 3 , R 4 , R 5 and R 6 are hydrogen, X is --O-- or --NH--, n is 0 and m is 4, and Q is derived from pentaerythritol after removal of the alcohol groups.
Claim 7
Dependent Claim 60 words
A compound of formula I according 1, wherein R 1 and R 2 are each independently of the other hydrogen, methyl or phenyl, R 3 , R 4 , R 5 and R 6 are hydrogen, X is --O-- or --NH--, n is 0 and m is 4, and Q is derived from pentaerythritol after removal of the alcohol groups.
Claim 8
Dependent Claim 13 words
A compound of formula I according to claim 1, wherein n is 0.
Claim 9
Dependent Claim 15 words
A compound of formula I according to claim 1, wherein m is 2 or 3.
Claim 10
Dependent Claim 21 words
A compound of formula I according to claim 1, R 1 is methyl and R 2 to R 8 are hydrogen.
Claim 11
Dependent Claim 13 words
A compound of formula I according to claim 1, wherein X is --O--.
Claim 12
Dependent Claim 25 words
A composition comprising (a) a compound of formula I according to claim 1, and (b) a compound that releases acid when exposed to actinic radiation.
Claim 13
Dependent Claim 13 words
A composition according to claim 10, containing a binder as additional component (c).

References Cited (Backward Citations)

GB1017979A Cited
US4101323A Cited
US4189323A Cited
US4247611A Cited
US4248957A Cited
US4250247A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1992-02-21 1992-08-22 1993-02-21 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1996-02-21 1996-08-22 1997-02-21 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2000-02-21 2000-08-22 2001-02-21 $7700.00 Window Closed / Lapsed

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