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US4805178A Expired / Lapsed US ⏱️ 0.0 years remaining

Preservation of surface features on semiconductor surfaces

Assignee: Nokia Bell Labs
•
Filing: 1986-03-28
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Granted: 1989-02-14
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Expires: 2006-03-28
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Abstract

Abstract The integrity of surface structural features (e.g., distributed feedback gratings) in Group III-V compound semiconductors are preserved during heating (e.g., subsequent LPE regrowth) by a thin coating containing a transition metal (e.g., Os, Ru and Rh). DFB-DCPBH InP/InGaAsP single frequency lasers made in this way are also described.

Inventors

  • 👤 Daniel P. Wilt

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-04 21:40
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/02; H01S5/028; H01S5/10; H01S5/12; H01S5/20; H01S5/22; H01S5/227; H10; H10H; H10H20/00; H10H20/01; H10H20/011; H10H20/013; H10P; H10P14/00; H10P14/20; H10P14/26; H10P14/263; H10P14/32; H10P14/3202; H10P14/3214; H10P14/3218; H10P14/3221; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3418; H10P14/3438; H10P14/3441; H10P14/3446; H10P14/36; H10P14/38; H10P14/3802; H10P14/3806; H10P95/00; H10P95/90; H10P95/904; H01S5/1231; H01S5/2275; H01S5/2277; H01S5/30; H01S5/32; H01S5/323; H01S5/3235; H01S5/32391

Claims Analysis

Total Claims: 9
Claim 1
Independent Claim 97 words
A semiconductor laser comprising a Group III-V compound semiconductor body having a major surface, p1 an optical grating on said major surface, a protective coating on said grating, said coating including a transition metal, a Group III-V compound semiconductor heterostructure formed on said coating, said heterostructure having the shape of a mesa and including a Group III-V compound semiconductor active layer, a current-blocking Group III-V compound semiconductor structure laterally adjacent said mesa and effective to direct the primary flow of current through said mesa during operation of said laser, and means forming electrical contact to said laser.
Claim 2
Dependent Claim 97 words
A semiconductor laser comprising a Group III-V compound semiconductor body having a major surface, p1 an optical grating on said major surface, a protective coating on said grating, said coating including a transition metal, a Group III-V compound semiconductor heterostructure formed on said coating, said heterostructure having the shape of a mesa and including a Group III-V compound semiconductor active layer, a current-blocking Group III-V compound semiconductor structure laterally adjacent said mesa and effective to direct the primary flow of current through said mesa during operation of said laser, and means forming electrical contact to said laser.
Claim 3
Dependent Claim 10 words
The laser of claim 1 wherein said coating contains Ru.
Claim 4
Dependent Claim 10 words
The laser of claim 1 wherein said coating contains Rh.
Claim 5
Dependent Claim 19 words
The laser of claims 1, 2 or 3 wherein said body comprises InP and said active layer comprises InGaAsP.
Claim 6
Dependent Claim 21 words
The laser of claim 4 wherein the composition of said active layer emits light at a wavelength of about 1.5 μm.
Claim 7
Dependent Claim 35 words
The laser of claims 1, 2 or 3 wherein said heterostructure further includes a Group III-V compound semiconductor waveguide layer having a bandgap wider than that of said active layer and being optically coupled thereto.
Claim 8
Dependent Claim 21 words
The laser of claim 6 wherein said body comprises InP, said active layer comprises InGaAsP and said waveguide layer comprises InGaAsP.
Claim 9
Dependent Claim 21 words
The laser of claim 7 wherein the composition of said active layer emits light at a wavelength of about 1.5 μm.

References Cited (Backward Citations)

US4273594A Cited
US4575851A Cited
US4482423A Cited
US4597085A Cited
JPS5992592A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1992-02-14 1992-08-15 1993-02-14 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1996-02-14 1996-08-15 1997-02-14 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2000-02-14 2000-08-15 2001-02-14 $7700.00 Window Closed / Lapsed

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