US4789771A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for substrate heating in an axially symmetric epitaxial deposition apparatus
Assignee: ASM America Inc
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Filing: 1987-03-27
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Granted: 1988-12-06
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Expires: 2007-03-27
Abstract
Abstract An apparatus and method for heating a substrate and associated rotatable susceptor in an epitaxial deposition reactor with an axially symmetric gas flow carrying deposition material include at least one chamber having a plurality of heat lamps. The chamber is generally symmetric with respect to an axis of the substrate. The chamber walls are coated to reflect light from the heat lamps. The outermost heat lamps can be energized to produce a higher temperature than the centrally located lamps to compensate for regions of the reactor which provide access to the substrate and, therefore, promote thermal losses. The spacing of the heat lamps may be varied to compensate for thermal non-uniformity of the heating cavity. The substrate may be rotated, on the rotatable susceptor, to average the thermal environment to which the substrate is exposed.
Inventors
- 👤 McDonald Robinson
- 👤 Ronald D. Behee
- 👤 Wiebe B. deBoer
- 👤 Wayne L. Johnson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 23:14
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C30B25/105
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
78 words
An apparatus for heating a substantially circular substrate, comprising: a chamber positioned generally along an axis of a substrate and substantially on one side of said substrate; a plurality of heating lamps extending through said chamber; a coating for reflecting radiation from said heating lamps into said chamber; a single-substrate susceptor disposed within said chamber and supporting the substantially circular substrate; and rotation means for rotating said single-substrate susceptor and the substantially circular substrate about their central axis.
Claim 2
Independent Claim
78 words
An apparatus for heating a substantially circular substrate, comprising: a chamber positioned generally along an axis of a substrate and substantially on one side of said substrate; a plurality of heating lamps extending through said chamber; a coating for reflecting radiation from said heating lamps into said chamber; a single-substrate susceptor disposed within said chamber and supporting the substantially circular substrate; and rotation means for rotating said single-substrate susceptor and the substantially circular substrate about their central axis.
Claim 3
Dependent Claim
39 words
The apparatus for heating a circular substrate of claim 1 further including a second chamber on a second side of said substrate, wherein lamps in said second chamber are located at approximately 90° angles from the first chamber lamps.
Claim 4
Dependent Claim
24 words
The apparatus for heating a circular substrate of claim 2 further including a parabolic reflector associated with each of a plurality of said lamps.
Claim 5
Dependent Claim
20 words
The apparatus for heating a circular substrate of claim 2 in which selected heating lamps have parabolic reflectors associated therewith.
Claim 6
Dependent Claim
16 words
The apparatus for heating a circular substrate of claim 2 wherein said chambers are generally square.
Claim 7
Dependent Claim
56 words
The apparatus for heating a circular substrate of claim 1 further including a second chamber located on a second side of said substrate along an axis of said semiconductor substrate, said chamber having a high reflectivity coating, said chamber further including a coating region having a lower reflectivity symmetrically disposed about the axis of the substrate.
Claim 8
Dependent Claim
22 words
The apparatus for heating a circular substrate of claim 2 wherein power supplied to said lamps is a function of lamp position.
Claim 9
Independent Claim
58 words
The method of uniformly heating a substantially circular substrate, comprising the steps of: positioning a chamber on either side of said substrate; extending heat lamps through walls of said chamber in at least one chamber; rotating said substrate about its central axis; and adjusting energy applied to said heat lamps to provide a uniform heating of said substrate.
Claim 10
Independent Claim
58 words
The method of uniformly heating a substantially circular substrate, comprising the steps of: positioning a chamber on either side of said substrate; extending heat lamps through walls of said chamber in at least one chamber; rotating said substrate about its central axis; and adjusting energy applied to said heat lamps to provide a uniform heating of said substrate.
Claim 11
Dependent Claim
44 words
The method of heating a circular substrate of claim 8 further comprising the step of: adjusting reflectivity of walls of a second chamber wherein a symmetrical portion of said reflectivity has a different value of reflectivity than a remainder of said second chamber walls.
Claim 12
Dependent Claim
54 words
The method of heating a circular substrate of claim 8 wherein said first and said second chambers have heat lamps extending therethrough, said method further including the step of positioning said second chamber until said heat lamps of said second chamber are approximately at right angles to said heat lamps of said first chamber.
Claim 13
Dependent Claim
18 words
The method of heating a circular substrate of claim 8 further including the step of rotating said substrate.
Claim 14
Dependent Claim
76 words
Apparatus for heating a circular substrate in an epitaxial reactor comprising: a first chamber symmetrically disposed along an axis on one side of said substrate; a second chamber symmetrically disposed along an axis on a second side of said substrate; rotation means for rotating said circular substrate about its central axis; and a plurality of radiation means disposed through said first chamber, said radiation means positioned and energized to provide a uniform temperature across said substrate.
Claim 15
Dependent Claim
76 words
Apparatus for heating a circular substrate in an epitaxial reactor comprising: a first chamber symmetrically disposed along an axis on one side of said substrate; a second chamber symmetrically disposed along an axis on a second side of said substrate; rotation means for rotating said circular substrate about its central axis; and a plurality of radiation means disposed through said first chamber, said radiation means positioned and energized to provide a uniform temperature across said substrate.
Claim 16
Dependent Claim
48 words
The apparatus for heating a circular substrate in an epitaxial reactor of claim 12 further including a reflective coating on an interior of said second chamber, said coating having an axially symmetric region with a coating having a lower value of reflectivity than a remainder of said coating.
Claim 17
Dependent Claim
50 words
The apparatus for heating a circular substrate of claim 12 wherein said second chamber includes a plurality of second radiation means disposed throughout said first chamber, said second radiation means positioned and energized to provide a uniform temperature distributor through said region formed by said first and said second chamber.
Claim 18
Dependent Claim
29 words
The apparatus for heating a circular substrate of claim 14 wherein each of a plurality of said radiation means includes a source of radiation associated with a parabolic reflector.
Claim 19
Dependent Claim
99 words
Apparatus for heating a substantially circular substrate, comprising; a first chamber disposed on one side of a substantially circular substrate, said first chamber having walls coated with a material having a high coefficient of reflectivity; a second chamber disposed on a second side of said circular substrate, said second chamber having walls coated with a material having a high coefficient of reflectivity wherein said first and said second chambers form a cavity for said circular substrate; rotation means for rotating said substantially circular substrate about its central axis; and heating means for uniformly heating said substrate in said cavity.
Claim 20
Dependent Claim
99 words
Apparatus for heating a substantially circular substrate, comprising; a first chamber disposed on one side of a substantially circular substrate, said first chamber having walls coated with a material having a high coefficient of reflectivity; a second chamber disposed on a second side of said circular substrate, said second chamber having walls coated with a material having a high coefficient of reflectivity wherein said first and said second chambers form a cavity for said circular substrate; rotation means for rotating said substantially circular substrate about its central axis; and heating means for uniformly heating said substrate in said cavity.
Claim 21
Dependent Claim
50 words
The apparatus for heating a circular substrate of claim 16 wherein said heating means includes a first plurality of heating lamps disposed through said first chamber and a plurality of heating lamps disposed through said second chamber, said first chamber lamps positioned at roughly 90° to said second chamber lamps.
Claim 22
Dependent Claim
25 words
The apparatus for heating a circular substrate of claim 17 further including a parabolic reflector associated with each of a plurality of said heating lamps.
Claim 23
Dependent Claim
44 words
The apparatus of claim 17 wherein said heating means includes, for achieving a more uniform temperature, at least a one of: disposing said lamps in said chamber in a preselected spatial relationship relative to one another; or varying excitation energy applied to said lamps.
Claim 24
Dependent Claim
40 words
The apparatus of claim 16 wherein said heating means includes a plurality of lamps disposed in said first chamber, and a generally axially symmetric region having a reflectivity value lower than a remainder of said reflectivity in said second chamber.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-12-06 | 1992-06-06 | 1992-12-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-12-06 | 1996-06-06 | 1996-12-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-12-06 | 2000-06-06 | 2000-12-06 | $7700.00 | Window Closed / Lapsed |