US4101759A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor body heater
Assignee: General Electric Co
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Filing: 1976-10-26
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Granted: 1978-07-18
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Expires: 1996-10-26
Abstract
Abstract A semiconductor body heater is provided with a planar array of radiant heating elements spaced from a reflector. In the preferred embodiment, each radiant heating element comprises a tungsten filament quartz lamp. Each lamp is removable and replaceable without disengaging any other lamp. The reflector is cooled by flows of gas and liquid coolant therethrough. Flows of gas between the planar array of lamps and the reflector and between the reflector and a cover member also cool the apparatus. Various diffusers for substantially eliminating temperature nonuniformities over an area illumined by the planar array of lamps are also disclosed. The semiconductor body heater of the present invention is particularly well suited for use in a temperature gradient zone melting process.
Inventors
- 👤 Thomas R. Anthony
- 👤 Harvey E. Cline
- 👤 John O. Fielding
- 👤 Carl A. Erikson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 07:13
CPC Classifications
C; C30; C30B; C30B13/00; C30B13/16; C30B13/22; C30B13/24; H; H05; H05B; H05B3/00; H05B3/0033; H05B3/0038; H05B3/0047
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
243 words
A heater for processing one or more bodies of semiconductor material by temperature gradient zone melting, said heater comprising: a planar array of radiant heating elements, having two opposed sides and said array being oriented in a plane parallel to the one or more bodies of semiconductor material; means for mounting said radiant heating elements wherein each of said radiant heating elements is individually removable and replaceable without disengaging any other radiant heating element from said mounting means; said means for mounting said radiant heating elements comprises first and second terminal plates, each of said terminal plates being slotted in a plurality of locations along one edge thereof, said slots accommodating the ends of said radiant heating elements and having cooling gas passages therethrough located between said ends of said radiant heating elements to provide a longitudinal means for cooling each of the elements, said terminal plates including a plurality of electrical terminals, each of said terminals being electrically connected to one of said radiant heating elements; a reflector, disposed parallel to and spaced from one side of said planar array of radiant heating elements, said reflector being provided with internal cooling passages and a polished reflective surface and including first and second sides and first and second ends, and said internal coolant passages within said reflector comprise a first coolant passage adapted to accommodate a flow of cooling gas and a second coolant passage adapted to accommodate a flow of liquid coolant.
Claim 2
Dependent Claim
243 words
A heater for processing one or more bodies of semiconductor material by temperature gradient zone melting, said heater comprising: a planar array of radiant heating elements, having two opposed sides and said array being oriented in a plane parallel to the one or more bodies of semiconductor material; means for mounting said radiant heating elements wherein each of said radiant heating elements is individually removable and replaceable without disengaging any other radiant heating element from said mounting means; said means for mounting said radiant heating elements comprises first and second terminal plates, each of said terminal plates being slotted in a plurality of locations along one edge thereof, said slots accommodating the ends of said radiant heating elements and having cooling gas passages therethrough located between said ends of said radiant heating elements to provide a longitudinal means for cooling each of the elements, said terminal plates including a plurality of electrical terminals, each of said terminals being electrically connected to one of said radiant heating elements; a reflector, disposed parallel to and spaced from one side of said planar array of radiant heating elements, said reflector being provided with internal cooling passages and a polished reflective surface and including first and second sides and first and second ends, and said internal coolant passages within said reflector comprise a first coolant passage adapted to accommodate a flow of cooling gas and a second coolant passage adapted to accommodate a flow of liquid coolant.
Claim 3
Dependent Claim
15 words
The heater of claim 1 wherein said radiant heating elements comprise tungsten filament quartz lamps.
Claim 4
Dependent Claim
19 words
The heater of claim 1 wherein the input power to each of said radiant heating elements is individually adjustable.
Claim 5
Dependent Claim
46 words
The heater of claim 3 wherein those of said radiant heating elements disposed in a central portion of said planar array are adapted to draw a lower value of input power than those of said radiant heating elements disposed on the edges of said planar array.
Claim 6
Dependent Claim
87 words
The heater of claim 1 and further including at least one additional radiant heating element disposed in proximity to each side of said planar array in a plane spaced from the plane of said planar array, each of said additional radiant heating elements extending in a direction parallel to the radiant heating elements of said planar array and so arranged that said additional radiant heating elements and said planar array of radiant heating elements provide a uniform temperature distribution in said plane spaced from said planar array.
Claim 7
Dependent Claim
24 words
The heater of claim 1 wherein said first coolant passage comprises a generally straight channel extending through said reflector substantially in the center thereof.
Claim 8
Dependent Claim
31 words
The heater of claim 1 wherein said second coolant passage comprises a channel having portions thereof extending parallel to and in proximity to said sides and said ends of said reflector.
Claim 9
Dependent Claim
25 words
The heater of claim 1 wherein said reflector includes a reflective surface partially defining a passage for a flow of cooling gas through said heater.
Claim 10
Dependent Claim
35 words
The heater of claim 8 and further including a cover member disposed adjacent to and spaced from said reflector, said cover member and said reflector defining a passage for a flow of cooling air therebetween.
Claim 11
Dependent Claim
44 words
The heater of claim 1 and further including a diffuser spaced from said radiant heating elements said diffuser and said reflector defining a volume which contains said radiant heating elements, said diffuser enhancing the uniformity of the radiant energy flux delivered by the heater.
Claim 12
Dependent Claim
22 words
The heater of claim 10 wherein said diffuser comprises a flat plate of quartz frosted on at least one major surface thereof.
Claim 13
Dependent Claim
34 words
The heater of claim 10 wherein said diffuser comprises a planar array of parallel quartz rods fusion bonded together, each of said quartz rods extending in a direction parallel to said radiant heating elements.
Claim 14
Dependent Claim
35 words
The heater of claim 10 wherein said diffuser comprises a sheet of quartz frosted and annealed on at least one major surface thereof, to form on said major surface a multiplicity of generally spherical projections.
Claim 15
Dependent Claim
66 words
The heater of claim 1 and further including a convection suppressor plate spaced from said planar array of radiant heating elements and arranged so as to be disposed outwardly of said radiant heating elements, said convection suppressor plate being transmissive to radiation emitted by said radiant heater and substantially eliminating any free convection cooling of said bodies of semiconductor material during said temperature gradient zone melting.
Claim 16
Dependent Claim
13 words
The heater of claim 14 wherein said convection suppressor plate is of quartz.
Claim 17
Dependent Claim
59 words
The heater of claim 10 and further including a convection suppressor plate spaced from said diffuser and arranged so as to be disposed outwardly of said diffuser, said convection suppressor plate being transmissive to radiation emitted by said radiant heater and substantially eliminating any free convection cooling of said bodies of semiconductor material during said temperature gradient zone melting.
Claim 18
Dependent Claim
13 words
The heater of claim 16 wherein said convection suppressor plate is of quartz.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-07-17 | 1982-01-16 | 1982-07-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-07-17 | 1986-01-16 | 1986-07-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-07-17 | 1990-01-16 | 1990-07-18 | $7700.00 | Window Closed / Lapsed |