Abstract Disclosed herein is a photoheating apparatus for heat-treating an object such as silicon semiconductor wafer in a flowing gas of a special composition. It comprises a container adapted to position the object therein, at least one part of the container being transparent, a heat-radiating lamp adapted to irradiate light onto the object through the transparent part of the container, a gas inlet and gas outlet formed through the wall of the container, and a gas flow dispersion barrier disposed within the container so as to confront the gas inlet, defining a plurality of gas through-holes and made of a transparent material. Owing to the provision of the gas flow dispersion barrier, the gas flow is kept uniform downstream the barrier. The photoheating apparatus is small in size and is capable of causing a reaction to proceed at a uniform rate on the whole surface of the object.
A radiant heating apparatus comprising: a container having a wall, said container being adapted to position an item to be heated therein, at least one part of said container being transparent; a heat-radiating lamp irradiating light onto said item through the transparent part of said container; a gas inlet and gas outlet formed through the wall of said container; and means for maintaining uniformly dispersed gas flow across said container where the item is positioned, said uniform gas flow maintaining means including a gas flow dispersion barrier made of material transparent to said irradiated light, whereby the barrier does not become heated, and disposed within said container so as to substantially confront said gas inlet, said gas flow dispersion barrier defining a plurality of gas through-holes.
Claim 2
Dependent Claim
126 words
A radiant heating apparatus comprising: a container having a wall, said container being adapted to position an item to be heated therein, at least one part of said container being transparent; a heat-radiating lamp irradiating light onto said item through the transparent part of said container; a gas inlet and gas outlet formed through the wall of said container; and means for maintaining uniformly dispersed gas flow across said container where the item is positioned, said uniform gas flow maintaining means including a gas flow dispersion barrier made of material transparent to said irradiated light, whereby the barrier does not become heated, and disposed within said container so as to substantially confront said gas inlet, said gas flow dispersion barrier defining a plurality of gas through-holes.