Method for the indirect identification of the intensity distribution of particle beam pulses generated in a particle beam measuring instrument

Claim 1

A method for identifying a time dependent intensity distribution g(t) of particle beam pulses generated in a particle measuring instrument employing a beam blanking system, comprising steps of: periodically applying a known signal s(t) known in terms of its time-dependency to a measuring point of a specimen; positioning a particle beam to the measuring point and creating the particle beam pulses by gating of the particle beam in synchronization with the known signal s(t); documenting secondary particles triggered at the measuring point by said particle beam pulses in a detector system which outputs secondary particle signals; stroboscopically sampling the known signal s(t) by shifting gating time points of the gated particle beam; deriving a measured signal h(t) from the secondary particle signal produced by the detector system; and identifying the time-dependent intensity distribution g(t) of the particle beam pulses by de-convolution of said measured signal h(t).

Claim 2

A method for identifying a time dependent intensity distribution g(t) of particle beam pulses generated in a particle measuring instrument employing a beam blanking system, comprising steps of: periodically applying a known signal s(t) known in terms of its time-dependency to a measuring point of a specimen; positioning a particle beam to the measuring point and creating the particle beam pulses by gating of the particle beam in synchronization with the known signal s(t); documenting secondary particles triggered at the measuring point by said particle beam pulses in a detector system which outputs secondary particle signals; stroboscopically sampling the known signal s(t) by shifting gating time points of the gated particle beam; deriving a measured signal h(t) from the secondary particle signal produced by the detector system; and identifying the time-dependent intensity distribution g(t) of the particle beam pulses by de-convolution of said measured signal h(t).

Claim 4

A method for identifying a time-dependent signal curve f(t) applied to a measuring point of the specimen, comprising steps of: positioning a pulsed particle beam to a measuring point having a known time-dependent intensity distribution g(t); documenting secondary particles triggered at the measuring point by said particle beam pulses in a detector system which outputs a secondary particle signal; stroboscopically sampling the signal f(t) by shifting gating time points of the gated particle beam; deriving a measured signal h(t) from the secondary particle signal produced by the detector system; and identifying the signal curve f(t) by de-convolution of the measured signal h(t) through use of the known intensity distribution g(t).

Claim 5

A method for identifying a time-dependent signal curve f(t) applied to a measuring point of the specimen, comprising steps of: positioning a pulsed particle beam to a measuring point having a known time-dependent intensity distribution g(t); documenting secondary particles triggered at the measuring point by said particle beam pulses in a detector system which outputs a secondary particle signal; stroboscopically sampling the signal f(t) by shifting gating time points of the gated particle beam; deriving a measured signal h(t) from the secondary particle signal produced by the detector system; and identifying the signal curve f(t) by de-convolution of the measured signal h(t) through use of the known intensity distribution g(t).