US4407008A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for light-induced scanning-microscope display of specimen parameters and of their distribution
Assignee: Carl Zeiss AG
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Filing: 1981-10-07
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Granted: 1983-09-27
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Expires: 2001-10-07
Abstract
Abstract The invention contemplates scanning-microscope display of plural observed parameters of an examined specimen, where the parameters derive from flying-spot light-exposure of the specimen, and where at least one of the observed parameters is outside the wavelength range of the flying-spot. In some illustrative embodiments, at least one of the observed parameters is sensed by a detector which uses the same scanning optics as the flying-spot, and in other embodiments other techniques of synchronization are involved. The disclosed embodiments also provide for selective arrest of scanning to enable such factors as fading fluorescence and spectrum analysis to be ascertained strictly for a surface occlusion, impurity or other anomaly of interest.
Inventors
- 👤 Werner Schmidt
- 👤 Gerhard Mueller
- 👤 Klaus Weber
- 👤 Volker Wilke
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 22:50
CPC Classifications
G; G02; G02B; G02B21/00; G02B21/0004; G02B21/002; G01; G01N; G01N21/00; G01N21/17; G01N21/1702; G01N21/62; G01N21/63; G01N21/64; G01N21/645; G01N21/6456; G01N21/6458
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
123 words
A method for the light-induced scanning-microscope display of specimen parameters and of their distribution, in which method the specimen is scanned in raster form on the illumination side by a beam of light, and radiation coming from the specimen is detected in phase with the raster, characterized by the fact that at least two different radiation components are detected, at least one of which radiation components lies in a spectral region not used on the illumination side and at least one of said components is focused, via the objective (17, 25, 113) used to focus the scanning beam and via the scanning unit (3, 23, 53, 120) used for its deflection, the focus being at a stationary receiver (13, 29, 47, 63, 116).
Claim 2
Independent Claim
123 words
A method for the light-induced scanning-microscope display of specimen parameters and of their distribution, in which method the specimen is scanned in raster form on the illumination side by a beam of light, and radiation coming from the specimen is detected in phase with the raster, characterized by the fact that at least two different radiation components are detected, at least one of which radiation components lies in a spectral region not used on the illumination side and at least one of said components is focused, via the objective (17, 25, 113) used to focus the scanning beam and via the scanning unit (3, 23, 53, 120) used for its deflection, the focus being at a stationary receiver (13, 29, 47, 63, 116).
Claim 3
Dependent Claim
45 words
A method according to claim 1, characterized by the fact that that component of the radiation (a) emitted from the specimen (4, 24, 44) and (b) not contained in the spectral region used on the illumination side is focused at the receiver (13, 29, 47).
Claim 4
Dependent Claim
50 words
A method according to claim 1, characterized by the fact that at least two trains of signals are substantially simultaneously produced by detection of the scattered radiation, the transmitted radiation, the fluorescence radiation and/or the Raman radiation, and said at least two trains are used for production of the image.
Claim 5
Dependent Claim
40 words
A method according to claim 1, characterized by the fact that detection of the radiation not contained in the spectral region used on the illumination side is effected by a second receiver (55) which is independent of the illuminating optics.
Claim 6
Dependent Claim
31 words
A method according to claim 3, characterized by the fact that the images of the specimen (24, 44) which are produced in different spectral regions can be observed individually as desired.
Claim 7
Dependent Claim
30 words
A method according to claim 3, characterized by the fact that said signals produced in different spectral regions are displayed in superposed relation in one image (4', 11; 61, 62).
Claim 8
Dependent Claim
37 words
A method according to claim 6, characterized by the fact that said signals in different spectral regions used for the production of a superposed image (4', 11; 61, 62) are electronically controlled in their amplitude and/or phase.
Claim 9
Dependent Claim
40 words
A method according to claim 1, characterized by the fact that the illumination is effected by coherent light and that the light scattered by the specimen is superposed, prior to the detection, by light mirrored out from the illumination ray.
Claim 10
Dependent Claim
21 words
A method according to claim 1, characterized by the fact that the specimen to be examined is furthermore irradiated with ultrasonics.
Claim 11
Dependent Claim
25 words
A method according to claim 4, characterized by the fact that photoacoustic or photothermal signals coming from the substance are used for the image production.
Claim 12
Dependent Claim
41 words
A method according to claim 4, characterized by the fact that the specimen (54) to be tested is arranged in a vacuum and that electrons liberated from the surface of the substance by the light beam are used for image production.
Claim 13
Dependent Claim
40 words
A method according to claim 1, characterized by the fact that scanning movement of the light beam is stopped at predetermined points, and the spectral region used for the measurement or the spectral region of the illuminating light is varied.
Claim 14
Dependent Claim
64 words
A method according to claim 12, characterized by the fact that the image-point spacing of the raster is selected smaller than the diameter of the refraction-limited focus of the illumination beam, and that the substantially Gaussian intensity distribution of the light known there is used in order to develop an image-point-dependent distribution of signal intensity by means of an electronic computer in real time.
Claim 15
Dependent Claim
153 words
Apparatus for the light-induced scanning-microscope display of specimen parameters and of their distribution, in which apparatus the specimen is scanned on the illumination side by a beam of light, and radiation emitted by the specimen and not contained in the illumination-side spectral region is detected in phase with the scanning raster, characterized by the fact that, between the source of light and the specimen (4, 24, 44, 119) there are, first a splitting mirror (5, 22, 104), and then means (3, 23, 120) for the raster-like deflection of the beam of light, and then an objective (17, 25, 113) for focusing the light beam on the specimen, and further characterized by the fact that radiation coming from the specimen is focused on at least one stationary detector (13, 29, 47, 116), the latter focus being via the objective (17, 25, 113), the deflection means (3, 23, 120), and the splitter mirror (5, 22,104).
Claim 16
Dependent Claim
153 words
Apparatus for the light-induced scanning-microscope display of specimen parameters and of their distribution, in which apparatus the specimen is scanned on the illumination side by a beam of light, and radiation emitted by the specimen and not contained in the illumination-side spectral region is detected in phase with the scanning raster, characterized by the fact that, between the source of light and the specimen (4, 24, 44, 119) there are, first a splitting mirror (5, 22, 104), and then means (3, 23, 120) for the raster-like deflection of the beam of light, and then an objective (17, 25, 113) for focusing the light beam on the specimen, and further characterized by the fact that radiation coming from the specimen is focused on at least one stationary detector (13, 29, 47, 116), the latter focus being via the objective (17, 25, 113), the deflection means (3, 23, 120), and the splitter mirror (5, 22,104).
Claim 17
Dependent Claim
32 words
Apparatus according to claim 14, characterized by the fact that between the splitter mirror (104) and the detector (116) a stationary diaphragm (115) as well as a continuously variable monochromator are arranged.
Claim 18
Dependent Claim
54 words
Apparatus according to claim 14, characterized by the fact that between the splitting mirror (22) and the detector there are arranged a stationary diaphragm (27) as well as a monochromator (28) for simultaneous imaging of the light coming from different spectral regions onto a plurality of receivers (29) associated with the corresponding spectral regions.
Claim 19
Dependent Claim
177 words
Apparatus for the light-induced scanning-microscope display of specimen parameters and of their distribution, in which apparatus the sample is scanned on the illumination side by a beam of light, and sample-emitted radiation which is not contained in the illumination-side spectral region is detected in phase with the scanning raster, characterized by the fact that, between the source of light and the specimen (4, 24, 44, 119), there are, first, a splitting mirror (5, 65, 104), and then means (3, 23, 120) for the raster-like deflection of the beam of light, and then an objective (113) of focusing the light beam on the specimen, further characterized by the fact that radiation coming from the specimen is focused via the objective, the deflection means and the splitting mirror on at least one first stationary detector (63), and further characterized by the fact that at least one second receiver (55) sensitized to radiation outside the spectral region used for illumination is positioned outside of the optical system containing the deflection unit (53) in front of or behind the specimen (54).
Claim 20
Dependent Claim
177 words
Apparatus for the light-induced scanning-microscope display of specimen parameters and of their distribution, in which apparatus the sample is scanned on the illumination side by a beam of light, and sample-emitted radiation which is not contained in the illumination-side spectral region is detected in phase with the scanning raster, characterized by the fact that, between the source of light and the specimen (4, 24, 44, 119), there are, first, a splitting mirror (5, 65, 104), and then means (3, 23, 120) for the raster-like deflection of the beam of light, and then an objective (113) of focusing the light beam on the specimen, further characterized by the fact that radiation coming from the specimen is focused via the objective, the deflection means and the splitting mirror on at least one first stationary detector (63), and further characterized by the fact that at least one second receiver (55) sensitized to radiation outside the spectral region used for illumination is positioned outside of the optical system containing the deflection unit (53) in front of or behind the specimen (54).
Claim 21
Dependent Claim
22 words
Apparatus according to claim 14, characterized by a diaphragm disposed in front of the detector and displaceable perpendicular to the optical axis.
Claim 22
Dependent Claim
18 words
Apparatus according to claim 14, characterized by a diaphragm of variable dimension arranged in front of the detector.
Claim 23
Dependent Claim
25 words
Apparatus according to claim 14, characterized by the fact that a linear diode array (47) extending in the scanning direction is used as a receiver.
Claim 24
Dependent Claim
23 words
Apparatus according to claim 14, characterized by the fact that a laser (1, 21, 35, 51, 101) is used as the light source.
Claim 25
Dependent Claim
25 words
Apparatus according to claim 21, characterized by a continuously variable laser (1, 51) for the production of light of a plurality of several preselectable wavelengths.
Claim 26
Dependent Claim
19 words
Apparatus according to claim 21, characterized by the fact that a pulsed laser is used as the light source.
Claim 27
Dependent Claim
21 words
Apparatus according to any of claim 14, characterized by the fact that light-emitting diodes are used as the source of light.
Claim 28
Dependent Claim
33 words
Apparatus for the carrying out of the method of claim 1, characterized by the fact that the substance to be examined is arranged in the specimen chamber of a known scanning electron microscope.
Claim 29
Dependent Claim
52 words
Apparatus according to claim 14, characterized by the fact that the scanning unit (120) has ray-deflecting surfaces (105, 108) arranged in the immediate vicinity of planes conjugate to the image-side principal plane (112) of the objective (113) used for the imaging, and that beam deflection in the scanning unit (120) is afocal.
Claim 30
Dependent Claim
149 words
Apparatus for the light-induced scanning-microscope display of parameters and of their distribution, in which apparatus the specimen is scanned on the illumination side by a beam of light, and radiation emitted from the specimen and not contained in the illumination-side spectral region is detected in phase with the scanning raster, characterized by the fact that behind a light-emitting diode array (121) as the source of light, there are arranged a splitting mirror (122) and, following it, an objective (123) for focusing the source of light (121) into the object plane, further characterized by the fact that radiation coming from the specimen (124) is focused by the objective (123) and the splitting mirror (122) onto a detector diode array (125), and that an electronic arrangement (126) is provided for synchronous scanning of diodes (127, 128) on the two arrays (121, 125) conjugated in each case by the optics (122, 123).
Claim 31
Dependent Claim
149 words
Apparatus for the light-induced scanning-microscope display of parameters and of their distribution, in which apparatus the specimen is scanned on the illumination side by a beam of light, and radiation emitted from the specimen and not contained in the illumination-side spectral region is detected in phase with the scanning raster, characterized by the fact that behind a light-emitting diode array (121) as the source of light, there are arranged a splitting mirror (122) and, following it, an objective (123) for focusing the source of light (121) into the object plane, further characterized by the fact that radiation coming from the specimen (124) is focused by the objective (123) and the splitting mirror (122) onto a detector diode array (125), and that an electronic arrangement (126) is provided for synchronous scanning of diodes (127, 128) on the two arrays (121, 125) conjugated in each case by the optics (122, 123).
References Cited (Backward Citations)
US4030827A
Cited
US4195930A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-09-26 | 1987-03-28 | 1987-09-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-09-26 | 1991-03-28 | 1991-09-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-09-26 | 1995-03-28 | 1995-09-27 | $7700.00 | Window Closed / Lapsed |