Patent US4780395A successfully refreshed from Google Patents.
US4780395A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Microchannel plate and a method for manufacturing the same
Assignee: Toshiba Corp
•
Filing: 1987-01-27
•
Granted: 1988-10-25
•
Expires: 2007-01-27
Abstract
Abstract A microchannel plate has a platelike photosensitive glass substrate and a plurality of microchannels formed separately from each other and extending across the thickness of the substrate. A secondary electron-emission surface is formed on an inner surface of each of the microchannels. Accelerating electrodes formed on two opposite sides of the photosensitive glass substrate, so as to be partially in electrical contact with the secondary-emission surface. The microchannels are formed by applying ultraviolet rays to the substrate through a mask and removing irradiated portions of the substrate by etching.
Inventors
- 👤 Tamio Saito
- 👤 Tadashi Sekiguchi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 04:48
CPC Classifications
H; H01; H01J; H01J43/00; H01J43/04; H01J43/06; H01J43/18; H01J43/24; H01J43/246; C; C03; C03C; C03C17/00; C03C17/06; C03C17/10; C03C17/34; C03C17/36; C03C17/40; H01J9/00; H01J9/02; H01J9/12; H01J2201/00; H01J2201/32; H01J2201/34
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
111 words
A method for manufacturing a microchannel plate, comprising the steps of: applying ultraviolet rays to a platelike photosensitive glass substrate through a mask having a plurality of light-transmitting portions, said substrate being formed of a material capable of being crystallized when exposed to ultraviolet rays; removing irradiated portions of the substrate by etching, thereby forming a plurality of microchannels extending across the thickness of the substrate; forming a secondary electron-emission surface on an inner surface of each of the microchannels; and forming an accelerating electrode on each side of the photosensitive glass substrate so as to be in electrical contact with the secondary electron-emission surface, by the negative photoresist lift-off method.
Claim 2
Independent Claim
111 words
A method for manufacturing a microchannel plate, comprising the steps of: applying ultraviolet rays to a platelike photosensitive glass substrate through a mask having a plurality of light-transmitting portions, said substrate being formed of a material capable of being crystallized when exposed to ultraviolet rays; removing irradiated portions of the substrate by etching, thereby forming a plurality of microchannels extending across the thickness of the substrate; forming a secondary electron-emission surface on an inner surface of each of the microchannels; and forming an accelerating electrode on each side of the photosensitive glass substrate so as to be in electrical contact with the secondary electron-emission surface, by the negative photoresist lift-off method.
Claim 3
Dependent Claim
58 words
The method according to claim 1, wherein said step for forming the secondary-emission surface includes forming a copper film on both the opposite sides of the photosensitive glass substrate and inside the microchannels, by electroless-plating; forming a lead film on the copper film by electroplating; and oxidizing the copper and lead films, thereby providing the secondary electron-emission surface.
Claim 4
Dependent Claim
21 words
The method according to claim 2, wherein said copper and lead films are oxidized by being heated in an oxygen atmosphere.
Claim 5
Dependent Claim
92 words
The method according to claim 1, wherein the accelerating electrodes on each side of said photosensitive glass substrate are formed separately, one side at a time by first forming a negative resist on one side of the photosensitive glass substrate; exposing the resist from the other side of the substrate, through the microchannels; developing the resist thereby leaving resist portions individually over the microchannels; depositing a metal film, which forms an accelarating electrode on one side of the substrate; and removing the resist portions and those portions of the metal film thereon.
References Cited (Backward Citations)
US3979621A
Cited
US3976905A
Cited
US4153855A
Cited
US4326929A
Cited
US4342821A
Cited
US4268537A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-10-25 | 1992-04-25 | 1992-10-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-10-25 | 1996-04-25 | 1996-10-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-10-25 | 2000-04-25 | 2000-10-25 | $7700.00 | Window Closed / Lapsed |