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US4153855A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of making a plate having a pattern of microchannels

Assignee: United States Department of the Army
•
Filing: 1977-12-16
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Granted: 1979-05-08
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Expires: 1997-12-16
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Abstract

Abstract An unetched microchannel plate is coated on one side with an etchant-resint mask having a pattern of open areas. The core fibers in the open areas are then etched out to form a pattern of microchannels. The microchannels and the mask are metallized, after which the mask and its metal are stripped. When the other side of the plate is metallized in the usual manner, a microchannel intensifier plate with a pattern of microchannels results.

Inventors

  • 👤 Robert M. Feingold

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-04 10:12
CPC Classifications
H; H01; H01J; H01J43/00; H01J43/04; H01J43/06; H01J43/18; H01J43/24; H01J43/246; C; C23; C23F; C23F1/00; C23F1/02; H01J9/00; H01J9/02; H01J9/12; H01J9/125; H01J2201/00; H01J2201/32

Claims Analysis

Total Claims: 4
Claim 1
Independent Claim 61 words
A method of treating an unetched microchannel plate to produce a microchannel plate having a pattern of channels, the method including the steps of: applying a mask to one side of said unetched microchannel plate in accordance with said pattern: etching the cores not covered by said mask to produce channels; metallizing the channels and the mask; and stripping the mask.
Claim 2
Independent Claim 61 words
A method of treating an unetched microchannel plate to produce a microchannel plate having a pattern of channels, the method including the steps of: applying a mask to one side of said unetched microchannel plate in accordance with said pattern: etching the cores not covered by said mask to produce channels; metallizing the channels and the mask; and stripping the mask.
Claim 3
Dependent Claim 56 words
The method as recited in claim 1 wherein the step of applying includes the steps of: coating said one side of said unetched microchannel plate with a photoresist; exposing said photoresist to a light image of said pattern; and developing said photoresist to selectively remove said photoresist in accordance with said image to produce said mask.
Claim 4
Dependent Claim 9 words
The product produced by the method of claim 1.

References Cited (Backward Citations)

US2806958A Cited
US3492523A Cited
US3231380A Cited
US3294504A Cited
US3275428A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1982-05-07 1982-11-06 1983-05-08 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1986-05-07 1986-11-06 1987-05-08 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1990-05-07 1990-11-06 1991-05-08 $7700.00 Window Closed / Lapsed

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