Self-aligned process for fabricating small DMOS cells

Claim 1

A process for fabricating vertical DMOS devices or integrated VDMOS transistors, comprising the steps of: (a) thermally oxidizing the surface of an epitaxially grown silicon layer lightly doped with an impurity of a first type of conductivity, grown on the surface of a slice of monocrystalline semiconductor material; (b) depositing a layer of polycrystalline silicon; (c) doping said polycrystalline layer; (d) thermally oxidizing the surface of said polycrystalline layer; (e) depositing a layer of silicon nitride on the oxidized surface of the polycrystalline layer; (f) selectively removing said layers of nitride, oxide and polycrystalline silicon, by anisotropic etching of areas where elementary DMOS cells will be formed; (g) implanting atoms of an impurity of a second type of conductivity in said etched areas and diffusing to form body regions whose extremes extend beyond the geometrical projection of edges of said etched polycrystalline silicon layer constituting a gate electrode; (h) depositing a layer of silicon oxide from a vapor phase on the whole exposed surface with a thickness greater than or equal to the sum of the respective thicknesses of said thermally grown oxide, said polycrystalline silicon layer, said thermally oxidized surface thereof and said silicon nitride layer present, as superimposed layers, over portions of the surface of said epitaxially grown layer; (i) thermally re-flowing the deposited layer of silicon oxide; (j) anisotropically etching said layer of deposited silicon oxide forming spacers along the edges of said superimposed layers; (k) implanting an impurity of said second type of conductivity, said spacers defining the implant window, removing said spacers, and forming, by diffusion, a heavily doped short region entirely contained inside said body region and whose lateral rim substantially coincides with the geometrical projection of the edges of said polycrystalline silicon layer, and forming an oxide film on the silicon layer; (l) defining, by masking with a photoresist, a central area of contact of short circuit at a middle position of said body region between opposing edges of said etched polycrystalline silicon layer; (m) removing said oxide film not covered by said photoresist and implanting an impurity of said first type of conductivity utilizing said photoresist and said layer of polycrystalline silicon as mask, followed by removing the photoresist and diffusing to form heavily doped source regions; and (n) repeating steps (h), (i), and (j), for defining the electrical contact opening betwen a source electrode and said source and short regions.