US4768064A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Conveyor device for alignment
Assignee: Canon Inc
•
Filing: 1987-12-28
•
Granted: 1988-08-30
•
Expires: 2007-12-28
Abstract
Abstract A conveyor device for alignment in which minutely displaceable members and hydraulic fluid supply pads are disposed between a slide and a guide. The relative position of the slide and the guide is adjusted by controlling the dimension of the minutely displaceable members.
Inventors
- 👤 Junji Isohata
- 👤 Mikio Nakasugi
- 👤 Takao Yokomatsu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 22:24
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70716
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
93 words
A positioning apparatus for positioning a stage, used in a semiconductor manufacturing process, relative to a reference portion, comprising: a guide surface provided on said reference portion for guiding said stage in a predetermined direction; a fluid ejecting member provided on said stage for ejecting fluid toward said guide surface so as to support said stage relative to said reference portion; and displacement means for changing the distance between said fluid ejecting member and said stage so as to displace said stage in a direction perpendicular thereto with respect to said reference portion.
Claim 2
Dependent Claim
93 words
A positioning apparatus for positioning a stage, used in a semiconductor manufacturing process, relative to a reference portion, comprising: a guide surface provided on said reference portion for guiding said stage in a predetermined direction; a fluid ejecting member provided on said stage for ejecting fluid toward said guide surface so as to support said stage relative to said reference portion; and displacement means for changing the distance between said fluid ejecting member and said stage so as to displace said stage in a direction perpendicular thereto with respect to said reference portion.
Claim 3
Dependent Claim
119 words
A positioning apparatus for positioning a stage, used in a semiconductor manufacturing process, relative to a reference portion, comprising: a guide surface provided on said reference portion for guiding said stage in a predetermined direction; a fluid ejecting member provided on said stage for ejecting fluid toward said guide surface so as to support said stage relative to said reference portion; and displacement means for changing the distance between said fluid ejecting member and said stage so as to displace said stage in said predetermined direction and in a direction perpendicular thereto with respect to said reference portion wherein said displacement means has piezoelectric effect and said displacement means moves said stage to a desired position by voltage control.
Claim 4
Dependent Claim
119 words
A positioning apparatus for positioning a stage, used in a semiconductor manufacturing process, relative to a reference portion, comprising: a guide surface provided on said reference portion for guiding said stage in a predetermined direction; a fluid ejecting member provided on said stage for ejecting fluid toward said guide surface so as to support said stage relative to said reference portion; and displacement means for changing the distance between said fluid ejecting member and said stage so as to displace said stage in said predetermined direction and in a direction perpendicular thereto with respect to said reference portion wherein said displacement means has piezoelectric effect and said displacement means moves said stage to a desired position by voltage control.
Claim 5
Dependent Claim
117 words
A positioning apparatus for positioning a stage, used in a semiconductor manufacturing process, relative to a reference portion, comprising: a guide surface provided on said reference portion for guiding said stage in a predetermined direction; a fluid ejecting member provided on said stage for ejecting fluid toward said guide surface so as to support said stage relative to said reference portion; and displacement means for changing the distance between said fluid ejecting member and said stage so as to displace said stage in said predetermined direction and in a direction perpendicular thereto with respect to said reference portion wherein said displacement means is a diaphragm and moves said stage to a desired position by fluid pressure control.
Claim 6
Dependent Claim
117 words
A positioning apparatus for positioning a stage, used in a semiconductor manufacturing process, relative to a reference portion, comprising: a guide surface provided on said reference portion for guiding said stage in a predetermined direction; a fluid ejecting member provided on said stage for ejecting fluid toward said guide surface so as to support said stage relative to said reference portion; and displacement means for changing the distance between said fluid ejecting member and said stage so as to displace said stage in said predetermined direction and in a direction perpendicular thereto with respect to said reference portion wherein said displacement means is a diaphragm and moves said stage to a desired position by fluid pressure control.
References Cited (Backward Citations)
US3569718A
Cited
US3516361A
Cited
US3899979A
Cited
US4055123A
Cited
US4084903A
Cited
US4140392A
Cited
US4172656A
Cited
US4370054A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-08-30 | 1992-02-29 | 1992-08-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-08-30 | 1996-02-29 | 1996-08-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-08-30 | 2000-02-29 | 2000-08-30 | $7700.00 | Window Closed / Lapsed |