US3569718A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device for the fine adjustment of photomasks with respect to semiconductor elements
Assignee: Telefunken Patentverwertungs GmbH
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Filing: 1967-06-28
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Granted: 1971-03-09
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Expires: 1987-06-28
Abstract
Abstract In the manufacture of semiconductor devices with the aid of photomasks, the correct position of the photomask with respect to the semiconductor body to be processed is adjusted by the use of rod-shaped electromechanical transducers which are connected to the photomask and which, when energized vary their length and so displace the photomask in relation to the semiconductor body.
Inventors
- 👤 Manfred Borner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 12:39
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/707; H; H10; H10P; H10P72/00; H10P72/50; H10P72/57
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
18 words
A device as claimed in claim 1 wherein the said element to be processed is a semiconductor element.
Claim 2
Dependent Claim
18 words
A device as claimed in claim 1, wherein at least one of the electromechanical transducers is magnetostrictive transducer.
Claim 3
Dependent Claim
19 words
A device as claimed in claim 1 wherein at least one of the electromechanical transducers is an electrostrictive transducer.
Claim 4
Dependent Claim
19 words
A device as claimed in claim 1 wherein at least one of the electromechanical transducers is a piezoelectric transducer.
Claim 5
Dependent Claim
63 words
A device as claimed in claim 1, wherein the photomask has a light-permeable region and a mark is provided on the subjacent semiconductor element, the reflection characteristics of which mark differ from those of the rest of the surface so that the relative position of photomask and semiconductor element can be determined by means of an incident-light optical device containing a photoelectric receiver.
Claim 6
Dependent Claim
52 words
A circuit arrangement for a device as claimed in claim 6, wherein the photoelectric receiver is connected, through phase-sensitive rectifiers, to cOntrol amplifiers for such an adjustment of the energizing voltages for the electromechanical transducers that the photomask and semiconductor element are brought into the desired position in relation to one another.
References Cited (Backward Citations)
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Cited
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Cited
US3245794A
Cited
US3356848A
Cited
US3233749A
Cited
US3377489A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-03-08 | 1974-09-07 | 1975-03-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-03-08 | 1978-09-07 | 1979-03-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-03-08 | 1982-09-07 | 1983-03-09 | $7700.00 | Window Closed / Lapsed |