US4370054A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Projection exposure apparatus
Assignee: Canon Inc
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Filing: 1981-05-04
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Granted: 1983-01-25
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Expires: 2001-05-04
Abstract
Abstract A projection exposure apparatus in which a mask and a wafer are displaced in a plane perpendicular to the optical axis of the projection optical system to form circuit patterns on the entire surface of the wafer. The mask and wafer are displaced along guides having two guide rails between which are provided means for compensating for non-linearity of one of the guide rails.
Inventors
- 👤 Junji Isohata
- 👤 Hironori Yamamoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 23:46
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70216; G03F7/70358
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
115 words
A projection exposure apparatus, comprising: a mask support member for supporting a mask; a wafer support member for supporting a wafer; a projection optical system for projecting the image of said mask onto a part of said wafer; guide means for displacing at least one of said mask and said wafer relative to said projection optical system in a plane perpendicular to the optical axis thereof, said guide means comprising first and second generally linear guide members and first and second guided members respectively engaging with said first and said second guide members; and compensating means provided between said first and said second guide members for compensating for non-linearity of one of said guide members.
Claim 2
Dependent Claim
115 words
A projection exposure apparatus, comprising: a mask support member for supporting a mask; a wafer support member for supporting a wafer; a projection optical system for projecting the image of said mask onto a part of said wafer; guide means for displacing at least one of said mask and said wafer relative to said projection optical system in a plane perpendicular to the optical axis thereof, said guide means comprising first and second generally linear guide members and first and second guided members respectively engaging with said first and said second guide members; and compensating means provided between said first and said second guide members for compensating for non-linearity of one of said guide members.
Claim 3
Dependent Claim
32 words
A projection exposure apparatus according to claim 1, comprising floating means between at least one of said first and said second linear guide members and said corresponding first and second guided member.
Claim 4
Dependent Claim
47 words
A projection exposure apparatus according to claim 1, comprising floating means respectively between said first and said second linear guide members and said corresponding first and second guided members, one of said floating means being provided with a higher rigidity than the other of said floating means.
Claim 5
Dependent Claim
58 words
A projection exposure apparatus according to claim 3, wherein one of said floating means comprises a fluid bearing defined in all directions in one plane perpendicular to movement of said guided members and the other of said floating means comprises a fluid bearing defined in the vertical direction in one plane perpendicular to movement of said guided members.
Claim 6
Dependent Claim
15 words
A projection exposure apparatus according to claim 1, wherein said compensating means comprises buffer means.
Claim 7
Dependent Claim
15 words
A projection exposure apparatus according to claim 5, wherein said buffer means comprises a bearing.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-01-24 | 1986-07-26 | 1987-01-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-01-24 | 1990-07-26 | 1991-01-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-01-24 | 1994-07-26 | 1995-01-25 | $7700.00 | Window Closed / Lapsed |