A process for depositing a composite ceramic coating on a hard ceramic substrate

Claim 2

In a process for depositing a wear resistant ceramic coating on a hard ceramic substrate comprising the step of: passing over the hard ceramic substrate a first gaseous mixture of a first halide vapor selected from the group consisting of halides of aluminum, yttrium and zirconium, one or more volatile oxidizing gases, and optionally a carrier gas, at a temperature of about 900°-1500° C., at a pressure between about 1 torr and about ambient pressure, and at partial pressure ratios, at a flow rate, and for a time sufficient to deposit a continuous, fully dense, adherent, wear resistant layer of a material selected from the group consisting of oxides of aluminum, zirconium, and yttrium about 0.1-20 microns thick on the hard ceramic substrate; the improvement which comprises the step of: mixing with the first gaseous mixture at least one additional vapor selected from the halides of aluminum, zirconium, and yttrium; wherein the additional vapor is different from the first halide vapor, and is mixed at a partial pressure selected to form at least one discontinuous additional phase, dispersed as discrete particles within the continuous oxide layer, of at least one material selected from the group consisting of oxides of aluminum, zirconium, and yttrium, to form a wear resistant composite ceramic layer on the hard ceramic substrate.

Claim 3

A process according to claim 1 further comprising the step of depositing between the hard ceramic substrate and the composite ceramic layer at least one intermediate layer about 0.5-10 microns thick selected from the group consisting of carbides, nitrides, and carbonitrides of Ti, Zr, Hf, Va, Nb, Ta, Cr, Mo, W, Si and B.

Claim 4

A process for depositing a wear resistant composite ceramic coating on a hard ceramic substrate comprising the steps of: passing over the hard ceramic substrate a first gaseous mixture of a first halide vapor selected from the group consisting of halides of aluminum, yttrium, and zirconium, one or more volatile oxidizing gases, and optionally a carrier gas, at a temperature of about 900°-1500° C. at a pressure between about 1 torr and about ambient pressure, wherein the one or more volatile oxidizing gases, the partial pressure ratios, the flow rates, and the deposition time are selected so that a continuous, fully dense, adherent, wear resistant first-phase layer of a material selected from the group consisting of oxides of aluminum, zirconium, and yttrium about 0.1-20 microns thick is deposited on the hard ceramic substrate; and intermittently, during the deposition of the continuous oxide of layer, pulsing into the first gaseous mixture to mix therewith at least one additional vapor selected from the halides of aluminum, zirconium, and yttrium, optionally mixed with a carrier gas; wherein the at least one additional vapor is different from the first halide vapor and is mixed at a partial pressure, at time intervals, and for lengths of time selected to form at least one discontinuous additional phase, dispersed as discrete particles within the continuous oxide layer, of at least one material selected from the group consisting of oxides of aluminum, zirconium, and yttrium to form a wear resistant composite ceramic layer on the hard ceramic substrate.

Claim 5

A process for depositing a wear resistant composite ceramic coating on a hard ceramic substrate comprising the steps of: passing over the hard ceramic substrate a first gaseous mixture of a first halide vapor selected from the group consisting of halides of aluminum, yttrium, and zirconium, one or more volatile oxidizing gases, and optionally a carrier gas, at a temperature of about 900°-1500° C. at a pressure between about 1 torr and about ambient pressure, wherein the one or more volatile oxidizing gases, the partial pressure ratios, the flow rates, and the deposition time are selected so that a continuous, fully dense, adherent, wear resistant first-phase layer of a material selected from the group consisting of oxides of aluminum, zirconium, and yttrium about 0.1-20 microns thick is deposited on the hard ceramic substrate; and intermittently, during the deposition of the continuous oxide of layer, pulsing into the first gaseous mixture to mix therewith at least one additional vapor selected from the halides of aluminum, zirconium, and yttrium, optionally mixed with a carrier gas; wherein the at least one additional vapor is different from the first halide vapor and is mixed at a partial pressure, at time intervals, and for lengths of time selected to form at least one discontinuous additional phase, dispersed as discrete particles within the continuous oxide layer, of at least one material selected from the group consisting of oxides of aluminum, zirconium, and yttrium to form a wear resistant composite ceramic layer on the hard ceramic substrate.

Claim 6

A process according to claim 3 further comprising the step of controlling the size and distribution within the oxide layer of the additional phase particles by controlling the partial pressure, the time intervals, and the lengths of time at which the at least one additional vapor is pulsed into the first gaseous mixture.

Claim 7

A process according to claim 4 wherein the step of deposition of the continuous oxide layer is carried out for a sufficient time before the pulsing step is begun to form a single-phase, continuous oxide portion separating the hard ceramic substrate and the two or more phase portion of the composite ceramic coating.

Claim 8

A process according to claim 4 wherein the intermittent pulsing step occurs at time intervals and for times selected to form a stratified composite ceramic layer in which two or more phase portions alternate with single-phase, continuous oxide portions.

Claim 9

A process according to claim 3 further comprising the step of depositing between the hard ceramic substrate and the composite ceramic layer at least one intermediate layer about 0.5-10 microns thick selected from the group consisting of carbides, nitrides, and carbonitrides of Ti, Zr, Hf, Va, Nb, Ta, Cr, Mo, W, Si and B.

Claim 10

A process according to claim 3 further comprising the step of depositing between the hard ceramic substrate and the composite ceramic layer an intermediate layer of TiC or TiN about 2-5 microns thick; and wherein the first gaseous mixture consists essentially of 2.5-21 volume % CO 2 , 47-64 volume % hydrogen, and 1.5-30 volume % AlCl 3 , the remainder being argon, passing over the hard ceramic substrate at a temperature of 1000°-1100° C., a pressure of 50-100 torr, and a flow rate of 1100-1500 cm 3 /min for 2.5 to 5 hr; and the at least one additional vapor is 0.5-2.5 volume % ZrCl 4 pulsed for about 1-10 min at intervals of about 2-6 times the pulse time, to deposit a composite ceramic layer consisting of a first, continuous phase of Al 2 O 3 and a discontinuous additional phase of discrete grains of ZrO 2 dispersed within the Al 2 O 3 first phase.

Claim 11

A process according to claim 8 further comprising the step of controlling the size and distribution within the oxide layer of the additional phase particles by controlling the partial pressure, the time intervals, and the lengths of time at which the at least one additional vapor is pulsed into the first mixture.

Claim 12

A process according to claim 8 wherein the intermediate layer is TiC about 3.0-3.5 microns thick; the first gaseous mixture consists essentially of about 7 volume % CO 2 , 88 volume % hydrogen, 2.5 volume % AlCl 3 , the remainder being argon, passing over the hard ceramic substrate at a temperature of about 1040° C., a pressure of about 50 torr, and a flow rate of about 1420 cm 3 /min for about 3.5 hrs; and about 2.5 volume % ZrCl 4 is pulsed for about 8 min of each 22 min during the last 2.5 hrs.

Claim 13

A process for depositing a wear resistant composite coating on a hard ceramic substrate comprising the steps of: passing a halide vapor, optionally mixed with a carrier gas, over a mixture or alloy of two or more metals selected from the group oonsisting of aluminum, zirconium, yttrium, and their metal salts, at about 250°-500° C., to form a first halide mixture comprising halides of two or more of aluminum, zirconium, and yttrium, and optionally the carrier gas; mixing the first halide mixture one or more volatile oxidizing gases to form a first gaseous mixture; and passing the first gaseous mixture over the hard ceramic substrate at a temperature of about 900°-500° C. and a pressure between about 1 torr and about ambient pressure, to deposit a composite layer on the hard ceramic substrate; wherein the one or more volatile oxidizing gases, the flow rates of the gases, the surface areas and the ratio of the surface areas of the two or more metals, and the deposition time are selected so that the composite layer comprises an adherent layer about 0.1-20 microns thick of a continuous first phase of an oxide of one of the two or more of aluminum, zirconium, and yttrium, and at least one discontinuous additional phase, dispersed as discrete particles within the first-phase layer, of oxides of the remaining of the two or more of aluminum, zirconium, and yttrium.

Claim 14

A process for depositing a wear resistant composite coating on a hard ceramic substrate comprising the steps of: passing a halide vapor, optionally mixed with a carrier gas, over a mixture or alloy of two or more metals selected from the group oonsisting of aluminum, zirconium, yttrium, and their metal salts, at about 250°-500° C., to form a first halide mixture comprising halides of two or more of aluminum, zirconium, and yttrium, and optionally the carrier gas; mixing the first halide mixture one or more volatile oxidizing gases to form a first gaseous mixture; and passing the first gaseous mixture over the hard ceramic substrate at a temperature of about 900°-500° C. and a pressure between about 1 torr and about ambient pressure, to deposit a composite layer on the hard ceramic substrate; wherein the one or more volatile oxidizing gases, the flow rates of the gases, the surface areas and the ratio of the surface areas of the two or more metals, and the deposition time are selected so that the composite layer comprises an adherent layer about 0.1-20 microns thick of a continuous first phase of an oxide of one of the two or more of aluminum, zirconium, and yttrium, and at least one discontinuous additional phase, dispersed as discrete particles within the first-phase layer, of oxides of the remaining of the two or more of aluminum, zirconium, and yttrium.

Claim 15

A method according to claim 11 wherein the mixture or alloy of two or more metals consists essentially of a mixture or alloy of aluminum and zirconium or a mixture or alloy of zirconium and yttrium; the one or more volatile oxidizing gases comprise CO 2 with hydrogen as a carrier; and the composite layer comprises a continuous Al 2 O 3 first phase having discrete particles of ZrO 2 dispersed therein, or a continuous ZrO 2 first phase having discrete particles of Y 2 O 3 dispersed therein, or a continuous Y 2 O 3 first phase having discrete particles of ZrO 2 dispersed therein.

Claim 16

A process according to claim 11 further comprising the step of depositing between the hard ceramic substrate and the composite layer at least one intermediate layer about 0.5-10 microns thick selected from the group consisting of the carbides, nitrides, and carbonitrides of Ti, Zr, Hf, Va, Nb, Ta, Cr, Mo, W, Si, and B.

Claim 17

A process for depositing a wear resistant composite coating on a hard ceramic substrate comprising the steps of: passing a first gaseous halide, optionally mixed with a first carrier gas, over a first metal selected from the group consisting of aluminum, zirconium, yttrium, and metal salts thereof, at 250°-500° C., to form a gaseous first metal halide of aluminum, zirconium, or yttrium; passing a second gaseous halide, which may be the same or different from the first gaseous halide, optionally mixed with a second carrier gas, which may be the same or different from the first carrier gas, over one or more additional metals selected from the group consisting of aluminum, zirconium, yttrium, and alloys and metal salts thereof, and different from the first metal, at about 250°-1500° C., to form one or more additional metal halides of one or more of aluminum, zirconium, and yttrium; passing a gaseous mixture comprising the first metal halide, the one or more additional metal halides, optionally the carrier gases, and one or more volatile oxidizing gases over the hard ceramic substrate, at a temperature of about 900°-1500° C. and at a pressure between about 1 torr and about ambient pressure to deposit a composite layer on the hard ceramic substrate; wherein the one or more volatile oxidizing gases, the flow rates of the vapors, the surface areas of the first metal and the one or more additional metals, and the deposition time are selected so that the composite layer comprises an adherent layer about 0.1-20 microns thick of a continuous first phase of an oxide of one of aluminum, zirconium, and yttrium, having at least one discontinuous additional phase of discrete particles of oxide(s) of one or more or aluminum, zirconium, and yttrium dispersed therein, the additional phase oxide(s) being different from the first-phase oxide.

Claim 18

A process for depositing a wear resistant composite coating on a hard ceramic substrate comprising the steps of: passing a first gaseous halide, optionally mixed with a first carrier gas, over a first metal selected from the group consisting of aluminum, zirconium, yttrium, and metal salts thereof, at 250°-500° C., to form a gaseous first metal halide of aluminum, zirconium, or yttrium; passing a second gaseous halide, which may be the same or different from the first gaseous halide, optionally mixed with a second carrier gas, which may be the same or different from the first carrier gas, over one or more additional metals selected from the group consisting of aluminum, zirconium, yttrium, and alloys and metal salts thereof, and different from the first metal, at about 250°-1500° C., to form one or more additional metal halides of one or more of aluminum, zirconium, and yttrium; passing a gaseous mixture comprising the first metal halide, the one or more additional metal halides, optionally the carrier gases, and one or more volatile oxidizing gases over the hard ceramic substrate, at a temperature of about 900°-1500° C. and at a pressure between about 1 torr and about ambient pressure to deposit a composite layer on the hard ceramic substrate; wherein the one or more volatile oxidizing gases, the flow rates of the vapors, the surface areas of the first metal and the one or more additional metals, and the deposition time are selected so that the composite layer comprises an adherent layer about 0.1-20 microns thick of a continuous first phase of an oxide of one of aluminum, zirconium, and yttrium, having at least one discontinuous additional phase of discrete particles of oxide(s) of one or more or aluminum, zirconium, and yttrium dispersed therein, the additional phase oxide(s) being different from the first-phase oxide.

Claim 19

A process according to claim 14 further comprising the step of depositing between the hard ceramic substrate and the composite layer at least one intermediate layer about 0.5-10 microns thick selected from the group consisting of the carbides, nitrides, and carbonitrides of Ti, Zr, Hf, Va, Nb, Ta, Cr, Mo, W, Si, and B.

Claim 20

A process according to claim 15 wherein the first metal is aluminum, the additional metal is zirconium, the first and second halides are both Cl 2 or HCl, and the intermediate layer is TiC.

Claim 21

A process according to claim 14 wherein the step of passing the first halide over the first metal is a continuous step, producing a steady flow of the first metal halide to pass over the hard ceramic substrate; and the step of passing the second halide over the one or more additional metals is an intermittent, pulsing step, producing pulses of the one or more additional metal halides to pass over the hard ceramic substrate with the first metal halide, wherein the second halide is pulsed at intervals and for times selected to control the size and distribution of the additional phase particles within the continuous first phase.

Claim 22

A process according to claim 14 wherein the first metal halide and the one or more volatile oxidizing gases are passed over the substrate for a sufficient time before the flow of the second halide is begun to deposit a single-phase, continuous portion of the composite layer separating the hard ceramic substrate and the two or more phase portion of the composite layer.

Claim 23

A process according to claim 14 wherein the step of passing the gaseous mixture over the hard ceramic substrate takes place within a reactor; and at least one of the first metal and the one or more additional metals is disposed within a separate vessel within the reactor, the separate vessel operationally communicating with a source of the associated gaseous halide, and optionally the associated carrier gas, and with the reactor, so that the associated gaseous halide enters the separate vessel, and passes over the metal(s) therein to form the metal halide(s), which flows into the reactor to pass over the hard ceramic substrate as a component of the gaseous mixture.

Claim 24

A process according to claim 19 wherein the first metal is aluminum or a metal salt thereof; and the one or more additional metals is zirconium or yttrium, or a metal salt thereof, or a mixture or alloy thereof, and is disposed within a separate vessel within the reactor.

Claim 25

A process according to claim 14 wherein the additional metal is aluminum, zirconium, yttrium or a metal salt thereof, and is different from the first metal; and further comprising the step of passing a third gaseous halide, which may be the same or different from the first and second gaseous halides, optionally mixed with a third carrier gas, which may be the same or different from the first and second carrier gases, over a third metal selected from the group consisting of aluminum, zirconium, yttrium, and metal salts thereof, and different from the first and additional metals, at about 250°-1500° C., to form a third metal halide of aluminum, zirconium, or yttrium; and wherein the gaseous mixture passing over the hard ceramic substrate further comprises the third metal halide, and the discontinuous additional phase further comprises discrete particles of oxides of two of aluminum, zirconium, and yttrium dispersed therein.

Claim 26

A process according to claim 21 wherein the step of passing the gaseous mixture over the hard ceramic substrate takes place within a reactor; and at least one of the first metal, the additional metal, and the third metal is disposed within a separate vessel within the reactor, the separate vessel operationally communicating with a source of the associated gaseous halide and optionally the associated carrier gas, and with the reactor, so that the associated gaseous halide enters the separate vessel, and passes over the metal therein to form the metal halide, which flows into the reactor to pass over the hard ceramic substrate as a component of the gaseous mixture.