← Back to Patent Explorer
US4748492A Expired / Lapsed US ⏱️ 0.0 years remaining

Read only memory

Assignee: Toshiba Corp
•
Filing: 1987-03-03
•
Granted: 1988-05-31
•
Expires: 2007-03-03
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

Abstract A MOSFET read only memory is disclosed. A silicon material directly contacts a drain of a memory cell transistor formed in a silicon substrate to obtain a low contact resistance. A drain electrode layer partially covers two oxide films which are above a gate electrode, to increase a contact area between a metal wiring layer constituting an output line and the drain electrode layer.

Inventors

  • 👤 Taira Iwase
  • 👤 Shoji Ariizumi
  • 👤 Fujio Masuoka

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-05 09:33
CPC Classifications
H; H10; H10B; H10B20/00; H10D; H10D64/00; H10D64/20; H10D64/23; H10D64/251; H10D64/258

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 211 words
A read-only memory comprising: a semiconductor substrate; a pair of MOS transistors each having a separate source region and a common drain region; a gate insulation film for each of said MOS transistors formed on said semiconductor substrate; a gate electrode for each of said MOS transistors formed on said gate insulation film; a first insulation film formed on said gate electrode for each of said MOS transistors; a second insulation film formed on said first insulation film of each of said MOS transistors gate electrodes, said first and second insulation films defining a first contact hole leading to said common drain region; a common drain electrode extending in said first contact hole and contacting said common drain region, said common drain electrode having an extended portion lying on said second insulation film above said gate electrode of each of said MOS transistors; a third insulation film formed on said extended portion of said common drain electrode above said gate electrode for each of said MOS transistors, said third insulation film defining a second contact hole above said first contact hole; and a conductive layer formed on said common drain electrode and said third insulation film, said conductive layer extending in said second contact hole and contacting said common drain electrode.
Claim 2
Dependent Claim 211 words
A read-only memory comprising: a semiconductor substrate; a pair of MOS transistors each having a separate source region and a common drain region; a gate insulation film for each of said MOS transistors formed on said semiconductor substrate; a gate electrode for each of said MOS transistors formed on said gate insulation film; a first insulation film formed on said gate electrode for each of said MOS transistors; a second insulation film formed on said first insulation film of each of said MOS transistors gate electrodes, said first and second insulation films defining a first contact hole leading to said common drain region; a common drain electrode extending in said first contact hole and contacting said common drain region, said common drain electrode having an extended portion lying on said second insulation film above said gate electrode of each of said MOS transistors; a third insulation film formed on said extended portion of said common drain electrode above said gate electrode for each of said MOS transistors, said third insulation film defining a second contact hole above said first contact hole; and a conductive layer formed on said common drain electrode and said third insulation film, said conductive layer extending in said second contact hole and contacting said common drain electrode.
Claim 3
Dependent Claim 22 words
A memory according to claim 1, wherein said semiconductor substrate comprises a silicon substrate, and said common drain electrode comprises polycrystalline silicon.
Claim 4
Dependent Claim 17 words
A memory according to claim 2, wherein polycrystalline silicon of said common drain electrode contains an impurity.
Claim 5
Dependent Claim 16 words
A memory according to claim 1, wherein said common drain electrode comprises a high-melting metal silicide.

References Cited (Backward Citations)

US4291322A Cited
US4322824A Cited
US4372031A Cited
US4516147A Cited
EP0054163A2 Cited
US4341009A Cited
US4403394A Cited
US4476482A Cited
EP0068897A2 Cited
JPS5827359A Cited
US4378628A Cited
US4446613A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1991-05-31 1991-11-30 1992-05-31 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1995-05-31 1995-11-30 1996-05-31 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1999-05-31 1999-11-30 2000-05-31 $7700.00 Window Closed / Lapsed

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag