US4738761A — Shared current loop, multiple field apparatus and…

Claim 1

Independent Claim 150 words

A magnetron gas discharge processing apparatus comprising: an evacuable chamber for containing a reactant gas therein; means for generating a magnetic field within the evacuable chamber; multi-part cathode means for forming at least one closed electron current loop within said chamber, said multi-part cathode means being disposed within the chamber and comprising a first cathode portion means for forming a plasma gas discharge including ions and generating a first electric field that interacts with the magnetic field to produce an a closed electron current loop, the first cathode portion means being connected to a first power source, and a second cathode portion means associated with the same electron current loop for generating a second, independent electric field that interacts with the gas discharge and for extracting ions from the gas discharge to strike an item to be processed, the second cathode portion means being connected to a second power source.

Claim 2

Dependent Claim 150 words

A magnetron gas discharge processing apparatus comprising: an evacuable chamber for containing a reactant gas therein; means for generating a magnetic field within the evacuable chamber; multi-part cathode means for forming at least one closed electron current loop within said chamber, said multi-part cathode means being disposed within the chamber and comprising a first cathode portion means for forming a plasma gas discharge including ions and generating a first electric field that interacts with the magnetic field to produce an a closed electron current loop, the first cathode portion means being connected to a first power source, and a second cathode portion means associated with the same electron current loop for generating a second, independent electric field that interacts with the gas discharge and for extracting ions from the gas discharge to strike an item to be processed, the second cathode portion means being connected to a second power source.

Claim 3

Dependent Claim 27 words

The apparatus of claim 1 wherein the first and second cathode portions of the multi-part cathode means are at least partially disposed within the closed current loop.

Claim 4

Dependent Claim 25 words

The apparatus of claim 1 wherein the first and second cathode portions of the multi-part cathode means are disposed adjacent to the closed current loop.

Claim 5

Dependent Claim 28 words

The apparatus of claim 1 wherein the first cathode portion means comprises multiple segments, with at least one of the segments being connected to the first power source.

Claim 6

Dependent Claim 24 words

The apparatus of claim 1 wherein the first cathode portion means comprises multiple segments, with each segment being connected to the first power source.

Claim 7

Dependent Claim 20 words

The apparatus of claim 1 wherein the second cathode portion means comprises means for supporting an item to be processed.

Claim 8

Dependent Claim 28 words

The apparatus of claim 1 wherein the second cathode portion means comprises multiple segments, with at least one of the segments being connected to the second power source.

Claim 9

Dependent Claim 24 words

The apparatus of claim 1 wherein the second cathode portion means comprises multiple segments, with each segment being connected to the second power source.

Claim 10

Dependent Claim 27 words

The apparatus of claim 1 wherein the means for generating a magnetic field comprises means for generating a magnetic field forming a loop around the multi-part cathode.

Claim 11

Dependent Claim 31 words

The apparatus of claim 1 wherein the means for generating a magnetic field comprises magnetic poles forming a magnetic field generally parallel to the surface of an item to be processed.

Claim 12

Dependent Claim 46 words

The apparatus of claim 1 wherein the means for generating a magnetic field comprises at least one pair of opposite polarity magnetic poles spaced apart from each other on opposite sides of the second cathode for forming a magnetic field across an item to be processed.

Claim 13

Dependent Claim 29 words

The apparatus of claim 1 wherein the second cathode portion means also comprises means for controlling the energy with which the extracted ions strike an item to be processed.

Claim 14

Dependent Claim 16 words

The apparatus of claim 1 wherein the first and second cathode portion means are generally planar.

Claim 15

Dependent Claim 16 words

The apparatus of claim 1 wherein the first and second cathode portion means are generally parallel.

Claim 16

Dependent Claim 18 words

The apparatus of claim 1 wherein the first and second cathode portion means are separated by a dielectric.

Claim 17

Dependent Claim 23 words

The apparatus of claim 1 wherein the multi-part cathode further includes channels for circulation of a cooling medium to withdraw excess heat therefrom.

Claim 18

Dependent Claim 24 words

The apparatus of claim 1 wherein the first and second cathode portion means comprise generally planar, electrically conductive plates fixed in parallel, spaced relation.

Claim 19

Dependent Claim 36 words

The apparatus of claim 1 wherein the first and second cathode portion means are separated from each other by space, the width of the space being equal to or less than two dark spaces of plasma.

Claim 20

Dependent Claim 16 words

The apparatus of claim 1 wherein the first and second cathode portion means are electrically coupled.

Claim 21

Dependent Claim 31 words

The apparatus of claim 1 wherein the first power source comprises a power source selected from the: radio frequency power source, direct current power source, or pulsating direct current power source.

Claim 22

Dependent Claim 30 words

The apparatus of claim 1 wherein the second power source comprises a power source selected from radio frequency power source, direct current power source, or pulsating direct current power source.

Claim 23

Dependent Claim 28 words

The apparatus of claim 1 wherein the multi-part cathode means comprises means for generating at least one electric field that is generally perpendicular to the generated magnetic field.

Claim 24

Dependent Claim 122 words

A multi-part cathode for use in a plasma gas discharge processing apparatus, the multi-part cathode comprising: means for generating a magnetic field associated with the multi-part cathode a first cathode portion means for forming a gas discharge including ions and generating a first electric field that interacts with the magnetic field to produce a closed electron current loop, the first cathode portion means being connected to a first power source, and a second cathode portion means associated with the same current loop for generating a second, independent electric field that interacts with the gas discharge and for extracting ions from the gas discharge to strike an item to be processed, the second cathode portion means being connected to a second power source.

Claim 25

Dependent Claim 122 words

A multi-part cathode for use in a plasma gas discharge processing apparatus, the multi-part cathode comprising: means for generating a magnetic field associated with the multi-part cathode a first cathode portion means for forming a gas discharge including ions and generating a first electric field that interacts with the magnetic field to produce a closed electron current loop, the first cathode portion means being connected to a first power source, and a second cathode portion means associated with the same current loop for generating a second, independent electric field that interacts with the gas discharge and for extracting ions from the gas discharge to strike an item to be processed, the second cathode portion means being connected to a second power source.

Claim 26

Dependent Claim 19 words

The apparatus of claim 23 wherein the multi-part cathode means is at least partially disposed within the current loop.

Claim 27

Dependent Claim 16 words

The apparatus of claim 23 wherein the multipart cathode means is disposed below the current loop.

Claim 28

Dependent Claim 28 words

The apparatus of claim 23 wherein the first cathode portion means comprises multiple segments, with at least one of the segments being connected to the first power source.

Claim 29

Dependent Claim 24 words

The apparatus of claim 23 wherein the first cathode portion means comprises multiple segments, with each segment being connected to the first power source.

Claim 30

Dependent Claim 20 words

The apparatus of claim 23 wherein the second cathode portion means comprises means for supporting an item to be processed.

Claim 31

Dependent Claim 28 words

The apparatus of claim 23 wherein the second cathode portion means comprises multiple segments, with at least one of the segments being connected to the second power source.

Claim 32

Dependent Claim 24 words

The apparatus of claim 23 wherein the second cathode portion means comprises multiple segments, with each segment being connected to the second power source.

Claim 33

Dependent Claim 26 words

The apparatus of claim 23 wherein the second cathode portion means also controls the energy with which the extracted ions strike an item to be processed.

Claim 34

Independent Claim 113 words

A method of magnetron gas discharge processing an item within an evacuable chamber containing a reactant gas and a multi-part cathode, the method comprising generating a magnetic field within the evacuable chamber; forming a plasma gas discharge including ions within the chamber and generating a first electric field that interacts with the magnetic field by energizing a first portion of a multi-part cathode to produce a closed electron current loop; and extracting ions from the formed plasma gas discharge toward the item being processed by energizing a second portion of the multi-part cathode associated with the closed current loop to generate a second, independent electric field that interacts with the plasma gas discharge.

Claim 35

Independent Claim 113 words

A method of magnetron gas discharge processing an item within an evacuable chamber containing a reactant gas and a multi-part cathode, the method comprising generating a magnetic field within the evacuable chamber; forming a plasma gas discharge including ions within the chamber and generating a first electric field that interacts with the magnetic field by energizing a first portion of a multi-part cathode to produce a closed electron current loop; and extracting ions from the formed plasma gas discharge toward the item being processed by energizing a second portion of the multi-part cathode associated with the closed current loop to generate a second, independent electric field that interacts with the plasma gas discharge.

Claim 36

Dependent Claim 36 words

The method of claim 32 the step of extracting ions further comprises controlling the energy of the second electric field so as to control the energy with which the extracted ions strike the item being processed.

Claim 37

Dependent Claim 33 words

The method of claim 32 wherein the step of forming an electron current loop and plasma gas discharge comprises forming an electron current loop and associated plasma gas discharge around the multi-part cathode.

Claim 38

Dependent Claim 52 words

The method of claim 32 wherein the step of forming an electron current loop and plasma gas discharge comprises energizing a first portion of the multi-part cathode with a first power source and the step of extracting ions comprises energizing a second portion of the multi-part cathode with a second power source.

Claim 39

Dependent Claim 31 words

The method of claim 32 wherein the step of extracting ions comprises energizing a second portion of the multi-part cathode that is separated from the first cathode portion by a dielectric.

Claim 40

Dependent Claim 27 words

The method of claim 32 further including the preliminary steps of evacuating a chamber containing a multi-part cathode and introducing a reactant gas mixture into the chamber.

Claim 41

Dependent Claim 25 words

The method of claim 32 wherein the step of generating a magnetic field comprises generating a magnetic field forming a loop around the multi-part cathode.

Claim 42

Dependent Claim 22 words

The method of claim 32 further including the step of circulating a cooling medium through the multi-part cathode to withdraw excess heat.

Claim 43

Dependent Claim 29 words

The method of claim 32 wherein the step of generating a first electric field comprises generating a first electric field that is generally perpendicular to the generated magnetic field.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1991-04-19	1991-10-19	1992-04-19	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1995-04-19	1995-10-19	1996-04-19	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	1999-04-19	1999-10-19	2000-04-19	$7700.00	Window Closed / Lapsed

Shared current loop, multiple field apparatus and process for plasma processing

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