US4735885A
Expired / Lapsed
US
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Deep UV photoresist composition with 1,3-disubstituted-5-diazobarbituric acids
Assignee: Clariant Finance BVI Ltd
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Filing: 1985-12-06
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Granted: 1988-04-05
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Expires: 2005-12-06
Abstract
Abstract Disclosed are substituted derivatives of 5-diazobarbituric acid selected from those having the formulas: ##STR1## wherein R 1 and R 2 are substituents selected from the group consisting of C 3 to C 12 alkyl, cyclohexyl, benzyl and C 2 to C 6 aralkyl groups, wherein R 3 and R 4 are substituents selected from the group consisting of C 1 to C 12 alkyl, cyclohexyl, benzyl or other C 2 to C 6 aralkyl groups and R 5 is selected from the group consisting of α,ω-disubstituted C 2 to C 12 alkyl, methylene dicyclohexyl, or C 1 to C 6 dialkylphenylene. These compounds provide DUV response with an absorption maximum near 260 nm. The substituents are chosen to be nonabsorbing alkyl groups that allow efficient photobleaching of the sensitizer during exposure. The sensitizers of the present invention are designed to function in the DUV region and are useful in the manufacture of semi-conductor devices.
Inventors
- 👤 Frederick R. Hopf
- 👤 Michael J. McFarland
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 19:35
CPC Classifications
C; C07; C07D; C07D239/00; C07D239/02; C07D239/24; C07D239/28; C07D239/46; C07D239/52; C07D239/54; C07D239/545; G; G03; G03F; G03F7/00; G03F7/004; G03F7/016; G03F7/0163
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
155 words
A positive photosensitive film forming composition comprising: (a) from about 2 to about 35 dry weight percent of a substituted derivative of 5-diazobarbituric acid selected from those exhibiting only DUV absorption and having the structural formulas: ##STR9## wherein R 1 and R 2 are substituents selected from the group consisting of C 3 to C 12 alkyl, cyclohexyl, benzyl and C 2 to C 6 aralyl groups, R 3 and R 4 are substituents selected from the group consisting of C 1 to C 12 alkyl, cyclohexyl, benzyl and C 2 to C 6 aralkyl groups and R 5 is selected from the group consisting of α,ω-disubstituted C 2 to C 12 alkyl, methylene dichyclohexyl or C 1 to C 6 dialkylphenylene; (b) admixed with (a) from about 65 percent to about 98 dry weight percent of an aqueous alkaline soluble resin; and (c) a solvent in an amount capable of dissolving (a) and (b).
Claim 2
Dependent Claim
155 words
A positive photosensitive film forming composition comprising: (a) from about 2 to about 35 dry weight percent of a substituted derivative of 5-diazobarbituric acid selected from those exhibiting only DUV absorption and having the structural formulas: ##STR9## wherein R 1 and R 2 are substituents selected from the group consisting of C 3 to C 12 alkyl, cyclohexyl, benzyl and C 2 to C 6 aralyl groups, R 3 and R 4 are substituents selected from the group consisting of C 1 to C 12 alkyl, cyclohexyl, benzyl and C 2 to C 6 aralkyl groups and R 5 is selected from the group consisting of α,ω-disubstituted C 2 to C 12 alkyl, methylene dichyclohexyl or C 1 to C 6 dialkylphenylene; (b) admixed with (a) from about 65 percent to about 98 dry weight percent of an aqueous alkaline soluble resin; and (c) a solvent in an amount capable of dissolving (a) and (b).
Claim 3
Dependent Claim
12 words
The composition of claim 1 wherein the resin (b) is 4-tert-butylstyrene/maleimide copolymer.
Claim 4
Dependent Claim
11 words
The composition of claim 1 wherein the solvent (c) is diglyme.
Claim 5
Dependent Claim
14 words
The method of claim 1 wherein the photosensitive barbituric acid compound is 1,3-dicyclohexyl-5-diazobarbituric acid.
Claim 6
Dependent Claim
14 words
The composition of claim 1 wherein the photosensitive barbituric acid compound is 1,12-bis(3-[1-cyclohexyl-5-diazo-2,4,6(1H,3H,5H)-pyrimidinetrionyl]) dodecane.
Claim 7
Dependent Claim
13 words
The method of claim 1 wherein the photosensitive barbituric acid compound is 1,12-bis(3-[1-n-butyl5-diazo-2,4,6(1H,3H,5H)-pyrimidinetrionyl])dodecane.
Claim 8
Dependent Claim
13 words
The method of claim 1 wherein the photosensitive barbituric acid is 1-(1-butyl)-3-cyclohexyl-5-diazobarbituric acid.
Claim 9
Dependent Claim
33 words
The method of claim 1 wherein the photosensitive barbituric acid is the bichromophoric compound of the general formula II where R 3 and R 4 are cyclohexyl and R 5 is methylene dicyclohexyl.
Claim 10
Dependent Claim
155 words
An intermediate element for a photosensitive device comprising a substrate containing thereon a layer of a phtoresist composition of: (a) from about 2 to about 35 dry weight percent of a substituted derivative of 5-diazobarbituric acid selected from those exhibiting only DUV absorption and having the structural formulas: ##STR10## wherein R 1 and R 2 are substituents selected from the group consisting of C 3 to C 12 alkyl, cyclohexyl, benzyl and C 2 to C 6 aralkyl groups, R 3 and R 4 are substituents seIected from the group consisting of C 1 to C 12 alkyl, cyclohexyl, benzyl and C 2 to C 6 aralkyl groups and R 5 is selected from the groups consisting of α,ω-disubstituted C 2 to C 12 alkyl, methylene dicyclohexyl or C 1 to C 6 dialkyl phenylene; (b) admixed with (a) from about 65 percent to about 98 dry weight percent of an aqueous alkali soluble resin.
Claim 11
Dependent Claim
155 words
An intermediate element for a photosensitive device comprising a substrate containing thereon a layer of a phtoresist composition of: (a) from about 2 to about 35 dry weight percent of a substituted derivative of 5-diazobarbituric acid selected from those exhibiting only DUV absorption and having the structural formulas: ##STR10## wherein R 1 and R 2 are substituents selected from the group consisting of C 3 to C 12 alkyl, cyclohexyl, benzyl and C 2 to C 6 aralkyl groups, R 3 and R 4 are substituents seIected from the group consisting of C 1 to C 12 alkyl, cyclohexyl, benzyl and C 2 to C 6 aralkyl groups and R 5 is selected from the groups consisting of α,ω-disubstituted C 2 to C 12 alkyl, methylene dicyclohexyl or C 1 to C 6 dialkyl phenylene; (b) admixed with (a) from about 65 percent to about 98 dry weight percent of an aqueous alkali soluble resin.
Claim 12
Dependent Claim
16 words
The element of claim 9 wherein the substituted derivative of the diazobarbituric acid is 1,3-dicyclohexyl-5-diazobarbituric acid.
Claim 13
Dependent Claim
15 words
The element of claim 9 wherein the substituted derivative of the diazobarbituric acid is 1,12-bis(3-[1-cyclohexyl-5-diazo-2,4,6(1H,3H,5H)-pyrimidinetrionyl])dodecane.
Claim 14
Dependent Claim
15 words
The element of claim 9 wherein the substituted derivative of the diazobarbituric acid is 1,12-bis(3-[1-n-butyl-5-diazo-2,4,6(1H,3H,5H)-pyrimidinetrionyl])dodecane.
Claim 15
Dependent Claim
13 words
The element of claim 9 wherein the photosensitive barbituric acid is 1-(1-butyl)-3-cyclohexyl-5-diazobarbituric acid.
Claim 16
Dependent Claim
33 words
The element of claim 9 wherein the photosensitive barbituric acid is the bichromophoric compound of the general formula II where R 3 and R 4 are cyclohexyl and R 5 is methylene dicyclohexyl.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1991-04-05 | 1991-10-05 | 1992-04-05 | $2000.00 | Window Closed / Lapsed |
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