Patent US4713543A successfully refreshed from Google Patents.
US4713543A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Scanning particle microscope
Assignee: Advantest Corp
•
Filing: 1985-07-02
•
Granted: 1987-12-15
•
Expires: 2005-07-02
Abstract
Abstract There is disclosed a scanning particle microscope in which the adverse influence of the Boersch effect is reduced. This is achieved by providing an elastrostatic retardation element in the particle optics unit to decelerate the particle from a first energy, at which the particles are generated, to a second energy which is less than half of the first energy.
Inventors
- 👤 Hans-Peter Feuerbaum
- 👤 Juergen Frosien
- 👤 Rainer Spehr
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 05:26
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/26; H01J37/28
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
88 words
A scanning particle microscope comprising: a particle optics unit including means for generating a particle beam at a first energy, a lens system for generating at least one beam crossover, a particle deflection system and an objective lens for focussing the particles in said beam onto a specimen to be examined; and means disposed within said particle optics unit for decelerating the particles in said beam from said first energy to a second energy which is lower than said first energy by at least a factor of two.
Claim 2
Dependent Claim
88 words
A scanning particle microscope comprising: a particle optics unit including means for generating a particle beam at a first energy, a lens system for generating at least one beam crossover, a particle deflection system and an objective lens for focussing the particles in said beam onto a specimen to be examined; and means disposed within said particle optics unit for decelerating the particles in said beam from said first energy to a second energy which is lower than said first energy by at least a factor of two.
Claim 3
Dependent Claim
20 words
A scanning particle microscope as claimed in claim 1, wherein said lens system consista of at least one magnetic lens.
Claim 4
Dependent Claim
35 words
A scanning particle microscope as claimed in claim 1, wherein said lens system consists of at last two magnetic lenses, and wherein said means for decelerating the particles is disposed between said two magnetic lenses.
Claim 5
Dependent Claim
37 words
A scanning particle microscope as claimed in claim 1, wherein said lens system includes at least one magnetic lens, and wherein said means for decelerating the particles is disposed between said magnetic lens and said objective lens.
Claim 6
Dependent Claim
22 words
A scanning particle microscope as claimed in claim 1, wherein said means for decelerating said particles is disposed at said beam crossover.
Claim 7
Dependent Claim
33 words
A scanning particle microscope as claimed in claim 1, wherein said lens system includes at least one magnetic lens, and wherein said means for decelerating said particles is disposed within said magnetic lens.
Claim 8
Dependent Claim
22 words
A scanning particle microscope as claimed in claim 1, wherein said means for decelerating said particles is disposed within said objective lens.
Claim 9
Dependent Claim
25 words
A scanning particle microscope as claimed in claim 1, wherein said particle optics unit further includes a beam blanking system disposed at said beam crossover.
Claim 10
Dependent Claim
44 words
A scanning particle microscope as claimed in claim 1, wherein said means for decelerating the particles is disposed at said beam crossover, and wherein said particle optics unit further includes a beam blanking system disposed in the particle beam path behind said beam crossover.
Claim 11
Dependent Claim
54 words
A scanning particle microscope as claimed in claim 1, wherein said means for generating said particle beam includes an anode at an anode potential, and wherein said particle optics unit further includes a cylinder at said anode potential disposed between said means for generating said particle beam and said means for decelerating the particles.
Claim 12
Dependent Claim
16 words
A scanning article microscope as claimed in claim 10, wherein said cylinder consists of non-ferromagnetic material.
Claim 13
Dependent Claim
43 words
A scanning particle microscope as claimed in claim 1, wherein said means for generating said particle beam includes a field emission cathode, and wherein said means for decelerating the particles is disposed in the particle beam path in front of said objective lens.
Claim 14
Dependent Claim
21 words
A scanning particle microscope as claimed in claim 1, wherein said means for decelerating the particles is an electrostatic delay element.
Claim 15
Dependent Claim
36 words
A scanning particle microscope as claimed in claim 1, wherein said means for decelerating the particles is two spaced electrodes disposed for decelerating the particles of the beam at a distal portion of the beam path.
Claim 16
Dependent Claim
36 words
A scanning particle microscope as claimed in claim 1, wherein said means for decelerating the particles is a multi-electrode arrangement disposed for decelerating the particles of the beam at a distal portion of the beam path.
Claim 17
Dependent Claim
36 words
A scanning particle microscope as claimed in c1aim 1, wherein said means for decelerating the particles is a net-like electrode disposed for decelerating the particles of the beam at a distal portion of the beam path.
Claim 18
Dependent Claim
48 words
A scanning particle microscope as claimed in claim 1, wherein said means for decelerating the particles is a disphragm with a beam-receiving aperture disposed in the beam path at a distal portion thereof for decelerating the particles of the beam in said distal portion of the beam path.
Claim 19
Dependent Claim
44 words
A scanning particle microscope as claimed in claim 1, wherein the means for decelerating the particles is a tube lens surrounding the beam path at a distal portion thereof for decelerating the particles of the beam at said distal portion of the beam path.
Claim 20
Dependent Claim
36 words
A scanning particle microscope as claimed in claim 1, wherein the means for decelerating the particles is an Einsel lens disposed for decelerating the particles of the beam at a distal portion of the beam path.
Claim 21
Dependent Claim
33 words
A scanning particle microscope as claimed in claim 1, further comprising measurement means coupled with said beam for measuring a region of said specimen based on interaction of said specimen with said beam.
Claim 22
Dependent Claim
49 words
A scanning particle microscope as claimed in claim 1, wherein said lens system includes a beam-converging lens disposed following said means for generating said particle beam for converging said beam toward a crossover, and wherein said means for retarding the particles is disposed in the region of said crossover.
Claim 23
Dependent Claim
36 words
A scanning particle microscope as claimed in claim 1, further comprising printing means coupled with said particle beam for forming patterns on a region of said specimen by interaction of said particle beam with said specimen.
Claim 24
Dependent Claim
106 words
A scanning particle microscope comprising: a particle optics unit including means for generating a particle beam at a first energy, a lens system for generating at least one beam crossover, a particle deflection system and an objective lens for focussing the particles in said beam onto a specimen to be examined; a beam-guiding tube disposed such that said particles in said beam traverse said tube with said first energy; and means disposed within said particle optics unit for decelerating the particles in said beam from said first energy to a second energy which is lower than said first energy by at least a factor of two.
Claim 25
Dependent Claim
106 words
A scanning particle microscope comprising: a particle optics unit including means for generating a particle beam at a first energy, a lens system for generating at least one beam crossover, a particle deflection system and an objective lens for focussing the particles in said beam onto a specimen to be examined; a beam-guiding tube disposed such that said particles in said beam traverse said tube with said first energy; and means disposed within said particle optics unit for decelerating the particles in said beam from said first energy to a second energy which is lower than said first energy by at least a factor of two.
References Cited (Backward Citations)
US3760180A
Cited
US3792263A
Cited
US4075488A
Cited
US4277679A
Cited
US4330707A
Cited
US4439685A
Cited
DE3138926A1
Cited
DE3204897A1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-12-14 | 1991-06-15 | 1991-12-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-12-14 | 1995-06-15 | 1995-12-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-12-14 | 1999-06-15 | 1999-12-15 | $7700.00 | Window Closed / Lapsed |