US3760180A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electron-beam micro-analyzer with an auger electron detector
Assignee: Siemens AG
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Filing: 1972-10-12
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Granted: 1973-09-18
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Expires: 1992-10-12
Abstract
Abstract An electron-beam micro-analyzer for investigating solid test specimens and radiation penetrable test specimens is disclosed. The micro-analyzer has an electron-beam generator for directing a focussed electron beam unto the test specimen to release Auger electrons therefrom. An electron spectrometer then separates the released Auger electrons according to the respective kinetic energies thereof and an electron detector detects the Auger electrons of specified energy separated in the spectrometer. The electron-beam generator has a field-emission point cathode having a small radius of curvature and an anode having an opening for passing the electron beam therethrough. A voltage supply applys a voltage to develop an electric field between the anode and the point cathode of sufficient strength to excite the cathode to electron field emission. A deceleration lens disposed intermediate the anode and the test specimen reduces the velocity of the electrons of the electron beam passing from the opening of the anode.
Inventors
- 👤 U Weber
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 13:03
CPC Classifications
G; G01; G01N; G01N23/00; G01N23/22; G01N23/227; H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/06; H01J37/073; H01J37/252; H01J37/256; H01J49/00; H01J49/44; H01J49/46; H01J49/48; H01J49/488
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
173 words
An electron-beam micro-analyzer for investigating solid test specimens and radiation penetrable test specimens comprising an electron-beam generator for directing a focussed electron beam onto the test specimen to release Auger electrons therefrom; an electron spectrometer for separating the released Auger electrons according to the respective kinetic energies thereof; and an electron detector for detecting the Auger electrons of specified energy separated in said spectrometer, said electron-beam generator defining a space for containing an ultra-high vacuum and comprising a field-emission point cathode disposed in said space, said point cathode having a small radius of curvature, an anode having an opening for passing the electron beam therethrough, voltage supply means for applying a voltage to develop an electric field between said anode and said point cathode in the vacuum of sufficient strength to excite said cathode to electron field emission to produce the electron beam, and a deceleration lens disposed intermediate said anode and the test specimen for reducing the velocity of the electrons of the electron beam passing from said opening of said anode.
Claim 2
Dependent Claim
173 words
An electron-beam micro-analyzer for investigating solid test specimens and radiation penetrable test specimens comprising an electron-beam generator for directing a focussed electron beam onto the test specimen to release Auger electrons therefrom; an electron spectrometer for separating the released Auger electrons according to the respective kinetic energies thereof; and an electron detector for detecting the Auger electrons of specified energy separated in said spectrometer, said electron-beam generator defining a space for containing an ultra-high vacuum and comprising a field-emission point cathode disposed in said space, said point cathode having a small radius of curvature, an anode having an opening for passing the electron beam therethrough, voltage supply means for applying a voltage to develop an electric field between said anode and said point cathode in the vacuum of sufficient strength to excite said cathode to electron field emission to produce the electron beam, and a deceleration lens disposed intermediate said anode and the test specimen for reducing the velocity of the electrons of the electron beam passing from said opening of said anode.
Claim 3
Dependent Claim
20 words
The electron-beam micro-analyzer of claim 1, comprising means for providing a field-free space intermediate said anode and said decelerating lens.
Claim 4
Dependent Claim
37 words
The electron-beam micro-analyzer of claim 1 comprising a first electrode disposed between said anode and the test specimen and having an opening for passing the beam therethrough, said electrode and said anode conjointly constituting said deceleration lens.
Claim 5
Dependent Claim
47 words
The electron-beam micro-analyzer of claim 3 wherein the test specimen is at a given potential, and wherein the analyzer comprises decelerating voltage supply means connected to said electrode for adjusting the electric potential of said electrode to at least approximately the electrical potential of the test specimen.
Claim 6
Dependent Claim
24 words
The electron-beam micro-analyzer of claim 3 wherein said first electrode is configured as a single apertured diaphragm, said diaphRagm being connected to ground potential.
Claim 7
Dependent Claim
67 words
The electron-beam micro-analyzer of claim 3 wherein said first electrode is configured as a single apertured diaphragm and said voltage supply means applies respective potentials to said anode and said point cathode to establish said electric field, the micro-analyzer comprising deceleration voltage supply means connected to said diaphragm for applying thereto an electric potential between the potential on said anode and the potential on said point cathode.
Claim 8
Dependent Claim
38 words
The electron-beam micro-analyzer of claim 6 wherein the test specimen is at a given potential, said deceleration voltage supply means comprising adjusting means for adjusting the potential applied to said diaphragm to the potential of the test specimen.
Claim 9
Dependent Claim
25 words
The electron-beam micro-analyzer of claim 6, said deceleration voltage supply means comprising adjusting means for adjusting the potential applied to said diaphragm to ground potential.
Claim 10
Dependent Claim
96 words
The electron-beam micro-analyzer of claim 3 comprising decelerating voltage supply means connected to said first electrode for applying a potential thereto, and a second electrode disposed between said first electrode and the test specimen and having an opening for passing the beam therethrough, and second electrode voltage supply means connected to said second electrode for applying a potential thereto selected to have a value compared to the value of the potential on said first electrode to cause the velocity of the electrons of the electron beam passing from said opening of said first electrode to increase.
Claim 11
Dependent Claim
56 words
The electron-beam micro-analyzer of claim 3 comprising a second electrode disposed adjacent said first electrode in beam direction, and a third electrode disposed adjacent said second electrode in beam direction, said second and third electrodes having respective openings for passing the electron beam therethrough, said first, second and third electrodes constituting a three electrode electrostatic lens.
Claim 12
Dependent Claim
59 words
The electron-beam micro-analyzer of claim 3 comprising a cylindrical tube attached to said anode so as to be electrically conductive therewith and to be concentric with said opening thereof, said first electrode being a cylindrical tube spaced an distance a from and axially aligned with said tube attached to said anode, said cylinder tubes conjointly constituting said deceleration lens.
Claim 13
Dependent Claim
33 words
The electron-beam micro-analyzer of claim 3, said anode and said electrode each being configured in the respective regions of said openings thereof respectively to obtain a minimal imaging error for said deceleration lens.
Claim 14
Dependent Claim
47 words
The electron-beam micro-analyzer of claim 1 comprising a plurality of electrodes disposed one adjacent the other intermediate said anode and the test specimen, each of said electrodes having an opening for passing the beam therethrough, said plurality of electrodes and said anode conjointly constituting said deceleration lens.
Claim 15
Dependent Claim
59 words
The electron-beam micro-analyzer of claim 13 wherein the test specimen is at a given potential, and wherein the analyzer comprises decelerating voltage supply means connected to the one electrode of said plurality of electrodes disposed adjacent the test specimen for adjusting the electric potential of said one electrode to at least approximately the electrical potential of the test specimen.
Claim 16
Dependent Claim
131 words
The electron-beam micro-analyzer of claim 1 comprising an electrostatic arrangement having a focal length and including at least two electrostatic lenses, one of said lenses being said deceleration lens and the other one of said lenses being an associated electrostatic lens disposed between said deceleration lens and the test specimen, associated electrostatic supply means connected to said associated electrostatic lens to focus the same independently of said deceleration lens, and deceleration voltage supply means connected to said deceleration lens for adjusting the potential thereon independently of said associated electrostatic lens for in turn focusSing the electron beam emanating from said point cathode in said associated electrostatic lens so that any change in said potential on said deceleration lens will cause no appreciable change in the focal length of said electrostatic arrangement.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-09-17 | 1977-03-19 | 1977-09-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-09-17 | 1981-03-19 | 1981-09-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-09-17 | 1985-03-19 | 1985-09-18 | $7700.00 | Window Closed / Lapsed |