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US3191028A Expired / Lapsed US ⏱️ 0.0 years remaining

Scanning electron microscope

Assignee: Individual
•
Filing: 1963-04-22
•
Granted: 1965-06-22
•
Expires: 1983-04-22
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Abstract

No abstract record available.

Inventors

  • 👤 Albert V Crewe

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-03 15:04
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/252; H01J37/256; H01J37/02; H01J37/04; H01J37/10; H01J37/14; H01J37/141; H01J37/147; H01J37/15

Claims Analysis

Total Claims: 2
Claim 1
Independent Claim 132 words
A SCANNING ELECTRON MICROSCOPE COMPRISING FIELD EMISSION ELECTRON SOURCE MEANS FOR GENERATING A NARROW BEAM OF MONOENERGETIC ELECTRONS, MEANS FOR MOUNTING A SPECIMEN, MEANS FOR FOCUSING SAID ELECTRON BEAM INTO A SPOT APPROXIMATELY 10-100 A. IN DIAMETER ON SAID SPECIMEN, MEANS FOR SCANNING SAID FOCUSED ELECTRON SPOT OVER THE SURFACE OF SAID SPECIMEN, MEANS FOR SEPARATING ELECTRONS TRANSMITTED THROUGH SAID SPECIMEN INTO DISCRETE ENERGY LEVELS THEREOF, MEANS FOR DETECTING SAID SEPARATED ELECTRONS AT A DISCRETE ENERGY LEVEL THEREOF, A CATHODE RAY TUBE, MEANS FOR SYNCHRONIZING THE X AND Y AXIS SWEEPS OF SAID CATHODE RAY TUBE WITH THE SCAN OF SAID ELECTRON SPOT, AND MEANS FOR CONNECTING THE OUTPUT OF SAID DETECTING MEANS TO SAID CATHODE RAY TUBE WHEREBY THE DISPLAY INTENSITY THEREOF IS RESPONSIVE TO THE OUTPUT OF SAID DETECTING MEANS.
Claim 2
Dependent Claim 132 words
A SCANNING ELECTRON MICROSCOPE COMPRISING FIELD EMISSION ELECTRON SOURCE MEANS FOR GENERATING A NARROW BEAM OF MONOENERGETIC ELECTRONS, MEANS FOR MOUNTING A SPECIMEN, MEANS FOR FOCUSING SAID ELECTRON BEAM INTO A SPOT APPROXIMATELY 10-100 A. IN DIAMETER ON SAID SPECIMEN, MEANS FOR SCANNING SAID FOCUSED ELECTRON SPOT OVER THE SURFACE OF SAID SPECIMEN, MEANS FOR SEPARATING ELECTRONS TRANSMITTED THROUGH SAID SPECIMEN INTO DISCRETE ENERGY LEVELS THEREOF, MEANS FOR DETECTING SAID SEPARATED ELECTRONS AT A DISCRETE ENERGY LEVEL THEREOF, A CATHODE RAY TUBE, MEANS FOR SYNCHRONIZING THE X AND Y AXIS SWEEPS OF SAID CATHODE RAY TUBE WITH THE SCAN OF SAID ELECTRON SPOT, AND MEANS FOR CONNECTING THE OUTPUT OF SAID DETECTING MEANS TO SAID CATHODE RAY TUBE WHEREBY THE DISPLAY INTENSITY THEREOF IS RESPONSIVE TO THE OUTPUT OF SAID DETECTING MEANS.

References Cited (Backward Citations)

US3103584A Cited
US2257774A Cited
US2372422A Cited
US2418317A Cited
US2447260A Cited
US2444700A Cited
US3028491A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1968-06-21 1968-12-21 1969-06-22 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1972-06-21 1972-12-21 1973-06-22 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1976-06-21 1976-12-21 1977-06-22 $7700.00 Window Closed / Lapsed

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