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US4705698A
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Isolation of semiconductor contacts
Assignee: BP SOLAR Inc
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Filing: 1986-10-27
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Granted: 1987-11-10
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Expires: 2006-10-27
Abstract
Abstract In a method of isolating segments of contacts on a substrate by laser scribing, a laser is directed on portions to be removed through the substrate.
Inventors
- 👤 John Van Dine
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 21:27
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/01; H10D64/011; H10F; H10F19/00; H10F19/30; H10F19/31; H10F19/33; B; B41; B41M; B41M5/00; B41M5/24; Y; Y02; Y02E; Y02E10/00; Y02E10/50
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
37 words
The method of isolating segments from one another which comprises the steps of: (a) forming a layer on a substrate; and (b) directing a beam of energy through the substrate to expell disticintive portions of said layer.
Claim 2
Independent Claim
37 words
The method of isolating segments from one another which comprises the steps of: (a) forming a layer on a substrate; and (b) directing a beam of energy through the substrate to expell disticintive portions of said layer.
Claim 3
Dependent Claim
21 words
The method of claim 1 wherein the substrate includes a patterned set of active elements between said layer and said substrate.
Claim 4
Dependent Claim
22 words
The method of claim 2 wherein a patterned set of conductive elements is included between said substrate and said patterned active elements.
Claim 5
Dependent Claim
13 words
The method of claim 2 wherein said active elements are of amorphous silicon.
Claim 6
Dependent Claim
14 words
The method of claim 3 wherein the patterned conductive elements are of tin oxide.
Claim 7
Dependent Claim
14 words
The method of claim 1 wherein said beam of energy is of laser origin.
Claim 8
Dependent Claim
23 words
The method of claim 6 wherein said laser energy has a wave length approximately equal to the absorption wave length of said layer.
Claim 9
Dependent Claim
22 words
The method of claim 7 wherein said laser energy has a wave length corresponding substantially to the absorption wavelength of amorphous silicon.
Claim 10
Dependent Claim
24 words
The method of claim 8 wherein said amorphous silicon has an absorption wavelength in the range extending from about 400 to about 650 nanometers.
Claim 11
Dependent Claim
20 words
The method of claim 9 wherein said laser beam has a pulse width in the range below about 100 nanoseconds.
Claim 12
Dependent Claim
14 words
The method of claim 10 wherein said pulse width is below about 50 nanoseconds.
Claim 13
Dependent Claim
19 words
The method of claim 2 wherein said active elements contain hydrogen which is evolved by said beam of energy.
Claim 14
Dependent Claim
35 words
The method of claim 12 wherein said beam of energy is moved to a series of discrete positions with respect to said substrate in order to provide a discrete series of separations between active elements.
Claim 15
Dependent Claim
13 words
The method of claim 2 wherein said beam of energy produces melt vaporization.
Claim 16
Dependent Claim
25 words
The method of claim 1 further including the step of applying an insulator to fill voids left by expulsion of distinctive portions of said layer.
Claim 17
Dependent Claim
24 words
The method of claim 2 wherein said beam of energy expells distinctive portions of said layer and underlying distinctive portions of said active elements.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-11-09 | 1991-05-11 | 1991-11-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-11-09 | 1995-05-11 | 1995-11-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-11-09 | 1999-05-11 | 1999-11-10 | $7700.00 | Window Closed / Lapsed |