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Patent US4701391A successfully refreshed from Google Patents.
US4701391A
Expired / Lapsed
US
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Mask with magnesium diaphragm for X-ray lithography
Assignee: US Philips Corp
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Filing: 1986-01-24
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Granted: 1987-10-20
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Expires: 2006-01-24
Abstract
Abstract A mask for X-ray lithography is formed of a multilayer diaphragm with a patterned absorber layer on the diaphragm. The diaphragm includes a layer of magnesium and at least one intermediate layer.
Inventors
- 👤 Arno Lentfer
- 👤 Holger Luthje
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 18:22
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/22; Y; Y10; Y10S; Y10S430/00; Y10S430/167; Y10S430/168
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
102 words
A mask for forming patterns in lacquer layers by x-ray lithography comprising: a multilayer diaphragm being highly transparent to X-ray radiation, said multilayer diaphragm including a layer of magnesium and at least one additional layer, and a patterned layer on one major surface of said multilayer diaphragm for absorbing said X-ray radiation, said patterned layer contacting said layer of magnesium, wherein said at least one additional layer includes a layer of gold and a layer of titanium oxide (TiO 2 ), said layer of titanium oxide (TiO 2 ) contacting said layer of magnesium at a side opposite to said patterned layer.
Claim 2
Dependent Claim
102 words
A mask for forming patterns in lacquer layers by x-ray lithography comprising: a multilayer diaphragm being highly transparent to X-ray radiation, said multilayer diaphragm including a layer of magnesium and at least one additional layer, and a patterned layer on one major surface of said multilayer diaphragm for absorbing said X-ray radiation, said patterned layer contacting said layer of magnesium, wherein said at least one additional layer includes a layer of gold and a layer of titanium oxide (TiO 2 ), said layer of titanium oxide (TiO 2 ) contacting said layer of magnesium at a side opposite to said patterned layer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-10-19 | 1991-04-20 | 1991-10-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-10-19 | 1995-04-20 | 1995-10-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-10-19 | 1999-04-20 | 1999-10-20 | $7700.00 | Window Closed / Lapsed |