Patent US4699688A successfully refreshed from Google Patents.
US4699688A
Expired / Lapsed
US
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Method of epitaxially growing gallium arsenide on silicon
Assignee: Verizon Laboratories Inc
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Filing: 1986-07-14
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Granted: 1987-10-13
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Expires: 2006-07-14
Abstract
Abstract Two-step process of expitaxially growing gallium arsenide on a silicon substrate. A silicon substrate is heated to about 450° C. in a reaction chamber and arsine and triethylgallium are introduced into the chamber. After a thin seed layer of gallium arsenide is grown at a relatively slow rate, the silicon substrate is heated to about 600° C. and a thick buffer layer of gallium arsenide is grown at a relatively fast rate.
Inventors
- 👤 Shambhu K. Shastry
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 22:45
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/24; C; C30; C30B; C30B25/00; C30B25/02; C30B29/00; C30B29/10; C30B29/40; C30B29/42; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/32; H10P14/3202; H10P14/3214; H10P14/3221; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3421; H10P14/3438; H10P14/3441; H10P14/3442
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
264 words
The method of epitaxially growing gallium arsenide on a substrate of silicon comprising placing a substrate of single crystal silicon having exposed surface areas in a chamber; introducing a first vapor containing arsenic and a second vapor containing gallium into the chamber while heating said substrate at a first temperature to grow a first relatively thin layer of single crystal gallium arsenide on the exposed surface areas of the substrate during a first deposition step; increasing the temperature of the substrate to a second temperature; introducing said first vapor and said second vapor into the chamber while heating said substrate at said second temperature to grow a second relatively thick layer of single crystal gallium arsenide directly on said first layer of single crystal gallium arsenide during a second deposition step; and wherein said first vapor includes arsine; said second vapor includes triethylgallium; said first temperature is between 425° C. and 450° C.; said second temperature is between 575° C. and 650° C.; the pressure within the chamber during said first and second deposition steps is between 40 torr and 100 torr; during said first deposition step said first vapor and said second vapor are introduced at a rate causing said first layer to grow in thickness at a growth rate of about 3 nanometers per minute; during said second deposition step said first and second vapors are introduced at a rate causing said second layer to grow in thickness at a growth rate of about 40 nanometers per minute; and prior to said first deposition step introducing said first vapor into the chamber.
Claim 2
Independent Claim
264 words
The method of epitaxially growing gallium arsenide on a substrate of silicon comprising placing a substrate of single crystal silicon having exposed surface areas in a chamber; introducing a first vapor containing arsenic and a second vapor containing gallium into the chamber while heating said substrate at a first temperature to grow a first relatively thin layer of single crystal gallium arsenide on the exposed surface areas of the substrate during a first deposition step; increasing the temperature of the substrate to a second temperature; introducing said first vapor and said second vapor into the chamber while heating said substrate at said second temperature to grow a second relatively thick layer of single crystal gallium arsenide directly on said first layer of single crystal gallium arsenide during a second deposition step; and wherein said first vapor includes arsine; said second vapor includes triethylgallium; said first temperature is between 425° C. and 450° C.; said second temperature is between 575° C. and 650° C.; the pressure within the chamber during said first and second deposition steps is between 40 torr and 100 torr; during said first deposition step said first vapor and said second vapor are introduced at a rate causing said first layer to grow in thickness at a growth rate of about 3 nanometers per minute; during said second deposition step said first and second vapors are introduced at a rate causing said second layer to grow in thickness at a growth rate of about 40 nanometers per minute; and prior to said first deposition step introducing said first vapor into the chamber.
Claim 3
Dependent Claim
23 words
The method in accordance with claim 1 wherein said first temperature is about 450° C.; and said second temperature is about 600° C.
Claim 4
Dependent Claim
67 words
The method in accordance with claim 2 wherein said first deposition step is carried on for a period of from 2 to 3 minutes and a first layer of from 5 to 10 nanometers is grown; and said second deposition step is carried on for a period of from about 7 to about 90 minutes and a second layer of from 0.3 to 3 micrometers is grown.
Claim 5
Dependent Claim
25 words
The method in accordance with claim 3 including introducing silane together with arsine and triethylgallium whereby the single crystal gallium arsenide is doped with silicon
Claim 6
Independent Claim
167 words
The method of epitaxially growing gallium arsenide on a substrate of silicon comprising placing a substrate of single crystal silicon having exposed surface areas in a chamber; introducing a first vapor containing arsenic and a second vapor containing gallium into the chamber while heating said substrate at a first temperature to grow a first relatively thin layer of single crystal gallium arsenide on the exposed surface areas of the substrate during a first deposition step; increasing the temperature of the substrate to a second temperature; introducing said first vapor and said second vapor into the chamber while heating said substrate at said second temperature to grow a second relatively thick layer of single crystal gallium arsenide directly on said first layer of single crystal gallium arsenide during a second deposition step, and wherein said first vapor includes arsine; said second vapor includes triethylgallium; and during said first deposition step the ratio of arsenic atoms to gallium atoms introduced into the chamber is at least 200 to 1.
Claim 7
Independent Claim
167 words
The method of epitaxially growing gallium arsenide on a substrate of silicon comprising placing a substrate of single crystal silicon having exposed surface areas in a chamber; introducing a first vapor containing arsenic and a second vapor containing gallium into the chamber while heating said substrate at a first temperature to grow a first relatively thin layer of single crystal gallium arsenide on the exposed surface areas of the substrate during a first deposition step; increasing the temperature of the substrate to a second temperature; introducing said first vapor and said second vapor into the chamber while heating said substrate at said second temperature to grow a second relatively thick layer of single crystal gallium arsenide directly on said first layer of single crystal gallium arsenide during a second deposition step, and wherein said first vapor includes arsine; said second vapor includes triethylgallium; and during said first deposition step the ratio of arsenic atoms to gallium atoms introduced into the chamber is at least 200 to 1.
Claim 8
Dependent Claim
21 words
The method in accordance with claim 5 including prior to said first deposition step introducing said first vapor into the chamber.
Claim 9
Dependent Claim
29 words
The method in accordance with claim 6 wherein said first temperature is between 425° C. and 450° C.; and said second temperature is between 575° C. and 650° C.
Claim 10
Dependent Claim
27 words
The method in accordance with claim 7 wherein the pressure within the chamber during said first and second deposition steps is between 40 torr and 100 torr.
Claim 11
Dependent Claim
77 words
The method in accordance with claim 8 wherein during said first deposition step said first vapor and said second vapor are introduced at a rate causing said first layer to grow in thickness at a growth rate of about 3 nanometers per minute; and during said second deposition step said first and second vapors are introduced at a rate causing said second layer to grow in thickness at a growth rate of about 40 nanometers per minute.
Claim 12
Dependent Claim
67 words
The method in accordance with claim 9 wherein said first deposition step is carried on for a period of from 2 to 3 minutes and a first layer of from 5 to 10 nanometers is grown; and said second deposition step is carried on for a period of from about 7 to about 90 minutes and a second layer of from 0.3 to 3 micrometers is grown.
Claim 13
Dependent Claim
23 words
The method in accordance with claim 10 wherein said first temperature is about 450° C.; and said second temperature is about 600° C.
Claim 14
Dependent Claim
25 words
The method in accordance with claim 11 including introducing silane together with arsine and triethylgallium whereby the single crystal gallium arsenide is doped with silicon.
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