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US4679938A
Expired / Lapsed
US
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Defect detection in films on ceramic substrates
Assignee: International Business Machines Corp
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Filing: 1985-06-03
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Granted: 1987-07-14
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Expires: 2005-06-03
Abstract
Abstract Disclosed is a nondestructive optical method for detecting defects (e.g., open regions) in thin opaque or non-opaque films formed on a ceramic substrate by utilizing the inherent fluoresceability of the ceramic material. The film-clad ceramic is illuminated with an intense optical radiation consisting of at least one wavelength which corresponds to the excitation band(s) of the ceramic component responsible for fluorescence. In case of an opaque film, the incident light will reach the ceramic in regions corresponding to the defects causing these ceramic regions to fluoresce at a different wavelength than that of the incident light. The fluorescent radiation emanating from the ceramic will provide a high contrast optical image of the defects particularly when viewed through a filter which transmits only the fluorescent radiation. In case the film is non-opaque, the incident light will generate fluorescent radiation over the entire substrate--both the defective and non-defective regions. However, the intensity of the fluorescent light emanating from the defective regions will be higher than that from the non-defective regions due to absence of any absorption of the incident and fluorescent light by the defective regions of the film. By analyzing the intensity of the fluorescent light emanating from the entire film-clad substrate, defects in the non-opaque film can be ascertained.
Inventors
- 👤 Alexander L. Flamholz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 16:38
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/95; G01N21/956; G01N21/8422; G01N2021/8427; G01N21/62; G01N21/63; G01N21/64; G01N21/645; G01N21/6456; G01N21/6458
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
74 words
A method of detecting defects in a thin film formed on a fluoresceable substrate comprising; illuminating said film with a first radiation; generating a second radiation characteristic of the fluorescent spectrum of said substrate; and analyzing the intensity of said second radiation to identify localized regions of the substrate where the intensity of said second radiation is higher than that of the remainder of the substrate, whereby said localized regions correspond to said defects.
Claim 2
Independent Claim
74 words
A method of detecting defects in a thin film formed on a fluoresceable substrate comprising; illuminating said film with a first radiation; generating a second radiation characteristic of the fluorescent spectrum of said substrate; and analyzing the intensity of said second radiation to identify localized regions of the substrate where the intensity of said second radiation is higher than that of the remainder of the substrate, whereby said localized regions correspond to said defects.
Claim 3
Dependent Claim
13 words
The method as recited in claim 1 wherein said substrate is a ceramic.
Claim 4
Dependent Claim
16 words
The method as recited in claim 2, wherein said film is opaque to said first radiation.
Claim 5
Dependent Claim
15 words
The method as recited in claim 3, wherein said opaque file is a conductive metal.
Claim 6
Dependent Claim
16 words
The method as recited in claim 2, wherein said film is non-opaque to said first radiation.
Claim 7
Dependent Claim
23 words
The method as recited in claim 5, wherein said non-opaque film is selected from a group consisting of photosensitive material, polyimide and glass.
Claim 8
Dependent Claim
32 words
The method as recited in claim 2, wherein said first radiation comprises at least one wavelength which matches an excitation band of the constituents of the ceramic which generate said fluorescent radiation.
Claim 9
Dependent Claim
27 words
The method as recited in claim 7, wherein said first radiation comprises a range of wavelength which are smaller that the wavelengths corresponding to said second radiation.
Claim 10
Independent Claim
96 words
A method for detecting defects in a thin film formed on a ceramic substrate, said method comprising: illuminating said film with optical radiation causing said substrate to fluoresce at a wavelength which can pass through said thin film, the wavelength of said fluorescent radiation being different from that of said optical radiation; and analyzing the itensity of said fluorescent radiation emanating from said substrate to identify localized regions of the substrate where the intensity of said fluorescent radiation is higher than that from the remainder of the substrate, whereby said localized regions correspond to said defects.
Claim 11
Independent Claim
96 words
A method for detecting defects in a thin film formed on a ceramic substrate, said method comprising: illuminating said film with optical radiation causing said substrate to fluoresce at a wavelength which can pass through said thin film, the wavelength of said fluorescent radiation being different from that of said optical radiation; and analyzing the itensity of said fluorescent radiation emanating from said substrate to identify localized regions of the substrate where the intensity of said fluorescent radiation is higher than that from the remainder of the substrate, whereby said localized regions correspond to said defects.
Claim 12
Dependent Claim
16 words
The method as recited in claim 9, wherein said optical radiation comprises a range of wavelengths.
Claim 13
Dependent Claim
16 words
The method as recited in claim 9, wherein said fluorescent radiation comprises a range of wavelengths.
Claim 14
Dependent Claim
22 words
The method as recited in claim 11, wherein said wavelengths of said optical radiation are smaller than those of said fluorescent radiation.
Claim 15
Dependent Claim
27 words
The method as recited in claim 12, further comprising transmitting said fluorescent radiation through a filter which transmits only said fluorescent radiation prior to said analyzing step.
Claim 16
Independent Claim
92 words
A method for detecting open areas in a thin film formed on a ceramic substrate, said method comprising: illuminating said film with optical radiation of a first wavelength range; generating a fluorescent radiation of a second wavelength range characteristic of the inherent fluorescent spectrum of said ceramic; and analyzing the intensity of said fluorescent radiation emanating from said substrate to identify localized regions of the substrate where the intensity of said fluorescent radiation is higher than that from the remainder of the substrate, whereby said localized regions correspond to said open areas.
Claim 17
Independent Claim
92 words
A method for detecting open areas in a thin film formed on a ceramic substrate, said method comprising: illuminating said film with optical radiation of a first wavelength range; generating a fluorescent radiation of a second wavelength range characteristic of the inherent fluorescent spectrum of said ceramic; and analyzing the intensity of said fluorescent radiation emanating from said substrate to identify localized regions of the substrate where the intensity of said fluorescent radiation is higher than that from the remainder of the substrate, whereby said localized regions correspond to said open areas.
Claim 18
Dependent Claim
27 words
The method as recited in claim 14 further comprising transmitting said fluorescent radiation through a filter which transmits only said fluorescent radiation prior to said analyzing step.
Claim 19
Dependent Claim
16 words
The method as recited in claim 15, wherein said film is opaque to said optical radiation.
Claim 20
Dependent Claim
16 words
The method as recited in claim 15, wherein said film is non-opaque to said optical radiation.
Claim 21
Dependent Claim
12 words
The method as recited in claim 17, wherein said ceramic is alumina.
Claim 22
Dependent Claim
16 words
The method as recited in claim 18, wherein the first wavelength range is about 410-560 nm.
Claim 23
Dependent Claim
16 words
The method as recited in claim 19, wherein said second wavelength range is about 690-700 nm.
References Cited (Backward Citations)
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