US4443278A
Expired / Lapsed
US
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Inspection of multilayer ceramic circuit modules by electrical inspection of green specimens
Assignee: Hoffmann La Roche Inc
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Filing: 1981-05-26
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Granted: 1984-04-17
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Expires: 2001-05-26
Abstract
Abstract A method of manufacturing packages for LSI chips starts with the usual steps of punching holes in green sheets, screening patterning paste (adapted to form cermet conductors or the like after firing) onto the green sheet, and inspecting the green sheets optically. Here, subsets of green sheets are then stacked and compressed into sublaminates. The sublaminates are then functionally inspected electrically. Inspection is done by means of electromechanical contact, scanning electron microscope like techniques, or by other means of irradiating the conductors to energize them for electrical measurement. Measurement may be made between pairs of terminals on only one side of the device being tested, or on both sides of the device. Beams can be applied both top and bottom from a single source or plural sources. Measuring instruments employ various electromechanical techniques as well as electrons, light used photoelectrically, ions, or pneumatic ion jets. Secondary electrons can measure the specimen's potential locally or change its charge. This method can also be employed for the purpose of inspecting other multilayer structures (such as large multilayer printed circuits formed on a plastic base) prior to final assembly of the conductors and the various substrates into a laminated support for electrical circuits. This testing process can also be applied after firing of patterned green sheets prior to plating, as well as after plating.
Inventors
- 👤 Arthur R. Zingher
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 15:24
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/06; H10P72/0616; H10P72/0612; H05; H05K; H05K1/00; H05K1/02; H05K1/0266; H05K1/03; H05K1/0306; H05K3/00; H05K3/46; H05K3/4611; H05K3/4626; H05K3/4629; H10P74/00; H10P74/20; H10P74/207; Y; Y10; Y10S; Y10S428/00; Y10S428/901; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49126
Claims Analysis
Total Claims: 41
Claim 1
Independent Claim
63 words
A method of manufacture of laminated electronic substrates comprising, applying an electrical circuit pattern of patterning paste to a sheet of material and electrically inspecting said sheet prior to assembly into the laminated form, and then laminating said sheet with other sheets wherein said inspection step is performed by a mechanical contact method wherein contacts are applied to said sheet prior to assembly.
Claim 2
Independent Claim
63 words
A method of manufacture of laminated electronic substrates comprising, applying an electrical circuit pattern of patterning paste to a sheet of material and electrically inspecting said sheet prior to assembly into the laminated form, and then laminating said sheet with other sheets wherein said inspection step is performed by a mechanical contact method wherein contacts are applied to said sheet prior to assembly.
Claim 3
Dependent Claim
21 words
A method in accordance with claim 1 wherein said step of electrical inspecting is performed with at least one articulated microprobe.
Claim 4
Dependent Claim
25 words
A method in accordance with claim 1 wherein said inspecting is performed with mechanical contacts in the form of cats whisker probes with ball tips.
Claim 5
Dependent Claim
21 words
A method in accordance with claim 1 wherein said measurement is performed with mechanical contacts in the form of conductive sponges.
Claim 6
Dependent Claim
34 words
A method in accordance with claim 1 wherein said inspecting is performed with mechanical contacts in the form of ball contacts on a flexible sheet or membrane pressed pneumatically onto said sheet of material.
Claim 7
Independent Claim
64 words
A method of manufacture of laminated electronic substrates comprising, applying an electrical circuit pattern of patterning paste to a sheet of material and electrically inspecting said sheet prior to assembly into the laminated form, and then laminating said sheet with other sheets wherein said inspection step is performed by a non-mechanical probe method wherein electrical charge is applied to said sheet prior to assembly.
Claim 8
Independent Claim
64 words
A method of manufacture of laminated electronic substrates comprising, applying an electrical circuit pattern of patterning paste to a sheet of material and electrically inspecting said sheet prior to assembly into the laminated form, and then laminating said sheet with other sheets wherein said inspection step is performed by a non-mechanical probe method wherein electrical charge is applied to said sheet prior to assembly.
Claim 9
Dependent Claim
18 words
The method of claim 6 wherein an electron beam is employed to deposit negative charge on said sheet.
Claim 10
Dependent Claim
18 words
The method of claim 6 wherein an electron beam is employed to detach secondary electrons from said sheet.
Claim 11
Dependent Claim
28 words
The method of claim 6 wherein an electron beam is employed to measure relative sheet voltage by whether or not the beam is turned around by the sheet.
Claim 12
Dependent Claim
21 words
The method of claim 6 wherein an ion beam is employed in conjunction with an electron beam to probe said sheet.
Claim 13
Dependent Claim
16 words
The method of claim 6 wherein a pneumatic ion jet is employed to probe said sheet.
Claim 14
Dependent Claim
19 words
The method of claim 6 wherein an electrically active optical beam is employed to detach electrons from said sheet.
Claim 15
Dependent Claim
160 words
In a method of manufacture of ceramic laminated electron substrates comprising, applying a past to a number of unfired ceramic sheets, said paste including conductive particles and an insulating material, and then assembling sheets into complete assemblies, then laminating by compression, then sintering and then planting to form the finished substrate, the improvement comprising the steps performed prior to the step of assembling of said unfired ceramic sheets into complete assemblies, said steps including placing at least one of said unfired sheets in a device for electrically inspecting the parameters of the pattern formed by said paste upon said sheets, comparing thus measured parameters of said pattern with a predetermined set of parameters, rejecting sheets having improper electrical parameters, retaining sheets having a proper set of parameters, thereby avoiding the waste attendant with employing sheets with improper electrical parameters, wherein said inspecting step is performed by a mechanical contact method wherein contacts are applied to said sheet prior to assembly.
Claim 16
Dependent Claim
160 words
In a method of manufacture of ceramic laminated electron substrates comprising, applying a past to a number of unfired ceramic sheets, said paste including conductive particles and an insulating material, and then assembling sheets into complete assemblies, then laminating by compression, then sintering and then planting to form the finished substrate, the improvement comprising the steps performed prior to the step of assembling of said unfired ceramic sheets into complete assemblies, said steps including placing at least one of said unfired sheets in a device for electrically inspecting the parameters of the pattern formed by said paste upon said sheets, comparing thus measured parameters of said pattern with a predetermined set of parameters, rejecting sheets having improper electrical parameters, retaining sheets having a proper set of parameters, thereby avoiding the waste attendant with employing sheets with improper electrical parameters, wherein said inspecting step is performed by a mechanical contact method wherein contacts are applied to said sheet prior to assembly.
Claim 17
Dependent Claim
21 words
A method in accordance with claim 1 wherein said step of electrical inspecting is performed with at least one articulated microprobe.
Claim 18
Dependent Claim
25 words
A method in accordance with claim 1 wherein said inspecting is performed with mechanical contacts in the form of cats whisker probes with ball tips.
Claim 19
Dependent Claim
21 words
A method in accordance with claim 1 wherein said measurement is performed with mechanical contacts in the form of conductive sponges.
Claim 20
Dependent Claim
34 words
A method in accordance with claim 1 wherein said inspecting is performed with mechanical contacts in the form of ball contacts on a flexible sheet or membrane pressed pneumatically onto said sheet of material.
Claim 21
Dependent Claim
160 words
In a method of manufacture of ceramic laminated electronic substrates comprising, applying a paste to a number of unfired ceramic sheets, said paste including conductive particles and an insulating material, and then assembling sheets into complete assemblies, then laminating by compression, then sintering and then plating to form the finished substrate, the improvement comprising the steps performed prior to the step of assembling said unfired ceramic sheets into complete assemblies, said steps including placing at least one of said unfired sheets in a device for electrically inspecting the parameters of the pattern formed by said paste upon said sheets, comparing thus measured parameters of said pattern with a predetermined set of parameters, rejecting sheets having improper electrical parameters, retaining sheets having a proper set of parameters, thereby avoiding the waste attendant with employing sheets with improper electrical parameters, wherein said inspecting step is performed by a non-mechanical probe method wherein electrical charge is applied to said sheet prior to assembly.
Claim 22
Dependent Claim
160 words
In a method of manufacture of ceramic laminated electronic substrates comprising, applying a paste to a number of unfired ceramic sheets, said paste including conductive particles and an insulating material, and then assembling sheets into complete assemblies, then laminating by compression, then sintering and then plating to form the finished substrate, the improvement comprising the steps performed prior to the step of assembling said unfired ceramic sheets into complete assemblies, said steps including placing at least one of said unfired sheets in a device for electrically inspecting the parameters of the pattern formed by said paste upon said sheets, comparing thus measured parameters of said pattern with a predetermined set of parameters, rejecting sheets having improper electrical parameters, retaining sheets having a proper set of parameters, thereby avoiding the waste attendant with employing sheets with improper electrical parameters, wherein said inspecting step is performed by a non-mechanical probe method wherein electrical charge is applied to said sheet prior to assembly.
Claim 23
Dependent Claim
18 words
The method of claim 6 wherein an electron beam is employed to deposit negative charge on said sheet.
Claim 24
Dependent Claim
18 words
The method of claim 6 wherein an electron beam is employed to detach secondary electrons from said sheet.
Claim 25
Dependent Claim
28 words
The method of claim 6 wherein an electron beam is employed to measure relative sheet voltage by whether or not the beam is turned around by the sheet.
Claim 26
Dependent Claim
21 words
The method of claim 6 wherein an ion beam is employed in conjunction with an electron beam to probe said sheet.
Claim 27
Dependent Claim
16 words
The method of claim 6 wherein a pneumatic ion jet is employed to probe said sheet.
Claim 28
Dependent Claim
19 words
The method of claim 6 wherein an electrically active optical beam is employed to detach electrons from said sheet.
Claim 29
Independent Claim
92 words
A method of manufacture of laminated electronic substrates comprising, applying an electrical circuit pattern of patterning paste to a sheet of material and electrically inspecting said sheet prior to assembly into the laminated form, and then laminating said sheet with other sheets, within said sheet includes at least two terminals and said inspecting step is performed by irradiating one of said terminals with a first beam to stimulate said electrical circuit pattern, and irradiating another terminal of said electrrical circuit pattern with another beam to sense emission to sense an electrical response.
Claim 30
Independent Claim
92 words
A method of manufacture of laminated electronic substrates comprising, applying an electrical circuit pattern of patterning paste to a sheet of material and electrically inspecting said sheet prior to assembly into the laminated form, and then laminating said sheet with other sheets, within said sheet includes at least two terminals and said inspecting step is performed by irradiating one of said terminals with a first beam to stimulate said electrical circuit pattern, and irradiating another terminal of said electrrical circuit pattern with another beam to sense emission to sense an electrical response.
Claim 31
Dependent Claim
189 words
In a method of manufacture of ceramic laminated electronic substrates comprising, applying a paste to a number of unfired ceramic sheets, said paste including conductive particles and an insulating material, and then assembling sheets into complete assemblies, then laminating by compression, then sintering and then plating to form the finished substrate, the improvement comprising the steps performed prior to the step of assembling of said unfired ceramic sheets into complete assemblies, said steps including placing at least one of said unfired sheets in a device for electrically inspecting the parameters of the pattern formed by said paste upon said sheets, comparing thus measured parameters of said pattern with a predetermined set of parameters, rejecting sheets having improper electrical parameters, retaining sheets having a proper set of parameters, thereby avoiding the waste attendant with employing sheets with improper electrical parameters, wherein said sheet includes at least two terminals and said inspecting step is performed by irradiating one of said terminals with a first beam to stimulate said electrical circuit pattern, and irradiating another terminal of said electrical circuit pattern with another beam to sense emission to sense an electrical response.
Claim 32
Dependent Claim
189 words
In a method of manufacture of ceramic laminated electronic substrates comprising, applying a paste to a number of unfired ceramic sheets, said paste including conductive particles and an insulating material, and then assembling sheets into complete assemblies, then laminating by compression, then sintering and then plating to form the finished substrate, the improvement comprising the steps performed prior to the step of assembling of said unfired ceramic sheets into complete assemblies, said steps including placing at least one of said unfired sheets in a device for electrically inspecting the parameters of the pattern formed by said paste upon said sheets, comparing thus measured parameters of said pattern with a predetermined set of parameters, rejecting sheets having improper electrical parameters, retaining sheets having a proper set of parameters, thereby avoiding the waste attendant with employing sheets with improper electrical parameters, wherein said sheet includes at least two terminals and said inspecting step is performed by irradiating one of said terminals with a first beam to stimulate said electrical circuit pattern, and irradiating another terminal of said electrical circuit pattern with another beam to sense emission to sense an electrical response.
Claim 33
Dependent Claim
62 words
The method of claim 25 wherein said first beam is an electron beam applied to one end of said sheet and said other beam is a steerable electron beam scanned on the opposite end of said sheet, and detecting the emission of secondary electrons from said opposite end to determine the electrical conduction through said electrical connections or interruption of said connections.
Claim 34
Dependent Claim
62 words
The method of claim 26 wherein said first beam is an electron beam applied to one end of said sheet and said other beam is a steerable electron beam scanned on the opposite end of said sheet, and detecting the emission of secondary electrons from said opposite end to determine the electrical conduction through said electrical connections or interruption of said connections.
Claim 35
Independent Claim
55 words
A method of manufacture of laminated electronic substrates comprising, applying an electrical circuit pattern of patterning paste to a sheet of material and electrically inspecting said sheet prior to assembly into the laminated form, and then laminating said sheet with said other sheets, wherein said patterning paste is composed of a binder and conductive particles.
Claim 36
Independent Claim
55 words
A method of manufacture of laminated electronic substrates comprising, applying an electrical circuit pattern of patterning paste to a sheet of material and electrically inspecting said sheet prior to assembly into the laminated form, and then laminating said sheet with said other sheets, wherein said patterning paste is composed of a binder and conductive particles.
Claim 37
Independent Claim
59 words
A method of manufacture of laminated electronic substrates comprising, applying an electrical circuit pattern of patterning paste to a sheet of material and electrically inspecting said sheet prior to assembly into the laminated form, and then laminating said sheet with other sheets, wherein said patterning paste is composed of a binder of an organic dielectric material and metallic particles.
Claim 38
Independent Claim
59 words
A method of manufacture of laminated electronic substrates comprising, applying an electrical circuit pattern of patterning paste to a sheet of material and electrically inspecting said sheet prior to assembly into the laminated form, and then laminating said sheet with other sheets, wherein said patterning paste is composed of a binder of an organic dielectric material and metallic particles.
Claim 39
Independent Claim
51 words
A method of manufacture of laminated electronic substrates comprising, applying an electrical circuit pattern of patterning paste to a sheet of material and electrically inspecting said sheet prior to assembly into the laminated form, and then laminating said sheet with other sheets, wherein said paste comprises a poor conductor of electricity.
Claim 40
Independent Claim
51 words
A method of manufacture of laminated electronic substrates comprising, applying an electrical circuit pattern of patterning paste to a sheet of material and electrically inspecting said sheet prior to assembly into the laminated form, and then laminating said sheet with other sheets, wherein said paste comprises a poor conductor of electricity.
Claim 41
Dependent Claim
16 words
A method in accordance with claim 31 wherein said paste comprises an insulator containing conductive particles.
References Cited (Backward Citations)
US4242157A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-04-17 | 1987-10-17 | 1988-04-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-04-17 | 1991-10-17 | 1992-04-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-04-17 | 1995-10-17 | 1996-04-17 | $7700.00 | Window Closed / Lapsed |