US4670033A
Expired / Lapsed
US
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Method of consolidating fine pores of porous glass
Assignee: Canon Inc
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Filing: 1985-12-12
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Granted: 1987-06-02
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Expires: 2005-12-12
Abstract
Abstract A method of consolidating fine pores of a porous glass by impregnating the fine pores with an energy decomposable compound exemplified by SiH 4 . Energy is applied to the decomposable compound thereby forming active species which bond with each other and the functional groups on the surface of the fine pores three-dimensionally to thus form a glass network structure in the pores.
Inventors
- 👤 Kyo Miura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 21:53
CPC Classifications
C; C03; C03C; C03C11/00; C03C17/00; C03C17/02
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
118 words
A method of consolidating fine pores of porous glass comprising impregnating fine pores of porous glass with an energy decomposable compound of the formula, MLn where M is Si, P, B, As, Sb, Ge, Sn, Ti, Zr, Be, Al, Tl, Pb, In, Ga, Bi, Te, Zn, or Cd, L is hydrogen, halogen, alkyl, aryl or alkoxy, and n is a natural number corresponding to the valency of M; and applying an energy to the decomposable compound to generate active species from the decomposable compound whereby the active species thus formed bond with each other and bond with the functional groups on the surface of the fine pores three-dimensionally to thereby form a glass network structure in the pores.
Claim 2
Independent Claim
118 words
A method of consolidating fine pores of porous glass comprising impregnating fine pores of porous glass with an energy decomposable compound of the formula, MLn where M is Si, P, B, As, Sb, Ge, Sn, Ti, Zr, Be, Al, Tl, Pb, In, Ga, Bi, Te, Zn, or Cd, L is hydrogen, halogen, alkyl, aryl or alkoxy, and n is a natural number corresponding to the valency of M; and applying an energy to the decomposable compound to generate active species from the decomposable compound whereby the active species thus formed bond with each other and bond with the functional groups on the surface of the fine pores three-dimensionally to thereby form a glass network structure in the pores.
Claim 3
Independent Claim
142 words
A method of consolidating fine pores of porous glass comprising impregnating fine pores of porous glass with an energy decomposable compound of the formula, LmM 1 -M 2 Ln where M 1 and M 2 are independently selected from Si, P, B, As, Sb, Ge, Sn, Ti, Zr, Be, Al, Tl, Pb, In, Ga, Bi, Te, Zn or Cd, L is hydrogen, halogen, alkyl, aryl, or alkoxy, m is a natural number represented by (valency of M 1 -1), and n is a natural number represented by (valency of M 2 -1); and applying an energy to the decomposable compound to generate active species from the decomposable compound whereby the active species thus formed bond with each other and bond with the functional groups on the surface of the fine pores three-dimensionally to thereby form a glass network structure in the pores.
Claim 4
Independent Claim
142 words
A method of consolidating fine pores of porous glass comprising impregnating fine pores of porous glass with an energy decomposable compound of the formula, LmM 1 -M 2 Ln where M 1 and M 2 are independently selected from Si, P, B, As, Sb, Ge, Sn, Ti, Zr, Be, Al, Tl, Pb, In, Ga, Bi, Te, Zn or Cd, L is hydrogen, halogen, alkyl, aryl, or alkoxy, m is a natural number represented by (valency of M 1 -1), and n is a natural number represented by (valency of M 2 -1); and applying an energy to the decomposable compound to generate active species from the decomposable compound whereby the active species thus formed bond with each other and bond with the functional groups on the surface of the fine pores three-dimensionally to thereby form a glass network structure in the pores.
Claim 5
Independent Claim
148 words
A method of consolidating fine pores of porous glass comprising impregnating fine pores of porous glass with an energy decomposable compound of the formula (Ll M.sub.1 -X).sub.m M.sub.2 L.sub.n where M 1 and M 2 are independently selected from Si, P, B, As, Sb, Ge, Sn, Ti, Zr, Be, Al, Tl, Pb, In, Ga, Bi, Te, Zn and Cd, L is hydrogen, halogen, alkyl, aryl, or alkoxy, l is a natural number of (valency of M 1 -1), m+n is a natural number corresponding to the valency of M 2 , and X is oxygen, nitrogen, or sulfur; and applying an energy to the decomposable compound to generate active species from the decomposable compound whereby the active species thus formed bond with each other and bond with the functional groups on the surface of the fine pores three-dimensionally to thereby form a glass network structure in the pores.
Claim 6
Independent Claim
148 words
A method of consolidating fine pores of porous glass comprising impregnating fine pores of porous glass with an energy decomposable compound of the formula (Ll M.sub.1 -X).sub.m M.sub.2 L.sub.n where M 1 and M 2 are independently selected from Si, P, B, As, Sb, Ge, Sn, Ti, Zr, Be, Al, Tl, Pb, In, Ga, Bi, Te, Zn and Cd, L is hydrogen, halogen, alkyl, aryl, or alkoxy, l is a natural number of (valency of M 1 -1), m+n is a natural number corresponding to the valency of M 2 , and X is oxygen, nitrogen, or sulfur; and applying an energy to the decomposable compound to generate active species from the decomposable compound whereby the active species thus formed bond with each other and bond with the functional groups on the surface of the fine pores three-dimensionally to thereby form a glass network structure in the pores.
Claim 7
Independent Claim
128 words
A method of consolidating fine pores of porous glass comprising impregnating fine pores of porous glass with SiH 4 , SiCl 4 , SiF 4 , Si 2 H 2 , BCl 3 , BBR 3 , BF 3 , BH 3 (B 2 H 6 ), Me 3 B, PH 3 , PCl 3 , PBr 3 , AsH 3 , Me 3 Al, Et 3 Al, Me 3 Ga, Me 3 In or GeH 4 ; and applying an energy to the decomposable compound to generate active species from the decomposable compound whereby the active species thus formed bond with each other and bond with the functional groups on the surface of the fine pores three-dimensionally to thereby form a glass network structure in the pores.
Claim 8
Independent Claim
128 words
A method of consolidating fine pores of porous glass comprising impregnating fine pores of porous glass with SiH 4 , SiCl 4 , SiF 4 , Si 2 H 2 , BCl 3 , BBR 3 , BF 3 , BH 3 (B 2 H 6 ), Me 3 B, PH 3 , PCl 3 , PBr 3 , AsH 3 , Me 3 Al, Et 3 Al, Me 3 Ga, Me 3 In or GeH 4 ; and applying an energy to the decomposable compound to generate active species from the decomposable compound whereby the active species thus formed bond with each other and bond with the functional groups on the surface of the fine pores three-dimensionally to thereby form a glass network structure in the pores.
Claim 9
Dependent Claim
16 words
The method according to claim 1, 2 or 3 in which the energy is a light.
Claim 10
Dependent Claim
20 words
The method according to claim 1, 2 or 3 in which the energy is a light beam capable of scanning.
Claim 11
Dependent Claim
18 words
The method according to claim 1, 2 or 3 in which the energy is X-ray or electron beam.
Claim 12
Dependent Claim
28 words
The method according to claim 1, 2, 3 or 4 in which the fine pores are impregnated with a reaction-aid compound as well as the energy decomposable compound.
Claim 13
Dependent Claim
16 words
The method according to claim 8 in which the reaction-aid compound contains oxygen, nitrogen or sulfur.
Claim 14
Dependent Claim
23 words
The method according to claim 9 in which the reaction-aid compound is a combination of at least two of oxygen, nitrogen and sulfur.
Claim 15
Dependent Claim
40 words
The method according to claim 8 in which the reaction-aid compound is O 2 , H 2 O, CO 2 , NH 3 , N 2 O, NO, H 2 S, SO 2 , SO 3 or CS 2 .
Claim 16
Dependent Claim
14 words
The method according to claim 8 in which the reaction-aid compound is an alcohol.
Claim 17
Dependent Claim
21 words
The method according to claim 12 in which the reaction-aid compound is MeOH, EtOH, n-PrOH, i-PrOH, n-BuOH, i-BuOH, Sec-BuOH, or t-BuOH.
Claim 18
Dependent Claim
56 words
A method of consolidating fine pores of porous glass which comprises applying a photosensitive material to the surface of porous glass, employing a photolithographic process to make a mask of a desired pattern composed of the photosensitive material, and consolidating fine pores of the porous glass by the method of claim 1, 2, 3 or 4.
Claim 19
Dependent Claim
56 words
A method of consolidating fine pores of porous glass which comprises covering the surface of the porous glass with a metal thin film, making a mask of a desired pattern composed of the metal thin film by photoetching, and consolidating fine pores of the porous glass by the method of claim 1, 2, 3 or 4.
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| 7.5 Years (Year 8) | 1994-06-01 | 1994-12-01 | 1995-06-02 | $3760.00 | Window Closed / Lapsed |
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