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US4665374A Expired / Lapsed US ⏱️ 0.0 years remaining

Monolithic programmable signal processor using PI-FET taps

Assignee: Honeywell International Inc
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Filing: 1985-12-20
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Granted: 1987-05-12
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Expires: 2005-12-20
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Abstract

Abstract A monolithic programmable signal processor with piezoelectric insulator FETs and an InP substrate. The piezoelectric insulator FETs are capable of being constructed on the same substrate with circuits associated with the signal processor and optical components.

Inventors

  • 👤 Mohammed A. Fathimulla

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 23:03
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/46; H03H9/64; H03H9/6403; H03H9/02; H03H9/02535; H03H9/02543; H03H9/02566; H03H9/02574

Claims Analysis

Total Claims: 20
Claim 1
Independent Claim 198 words
A monolithic programmable signal processor comprising: a substrate, having a first conductivity type, selected from the group of semiconductors comprising silicon (Si) and indium phosphide (InP); a first piezoelectric layer formed on a first portion of said substrate; at least one transducer for generating surface acoustic waves propagating along the surface of said first piezoelectric layer along a predetermined path; a set of parallel source electrodes having a second conductivity type formed in said substrate along said predetermined path in the region underlying said first piezoelectric layer, said parallel source electrodes being disposed perpendicular to said predetermined path of said surface acoustic waves and said second cuductivity type being opposite said first conductivity type; a set of parallel drain electrodes having said second conductivity type interdigitally formed in said substrate between said first set of parallel source electrodes, each of said interdigitally formed parallel source and drain electrodes being separated from each other by a predetermined interelectrode space; and gate means formed on the surface of said piezoelectric layer for controlling the conductivity between said gate and source electrodes, said gate means covering at least the portion of said piezoelectric layer which overlays each of said interelectrode spaces.
Claim 2
Dependent Claim 198 words
A monolithic programmable signal processor comprising: a substrate, having a first conductivity type, selected from the group of semiconductors comprising silicon (Si) and indium phosphide (InP); a first piezoelectric layer formed on a first portion of said substrate; at least one transducer for generating surface acoustic waves propagating along the surface of said first piezoelectric layer along a predetermined path; a set of parallel source electrodes having a second conductivity type formed in said substrate along said predetermined path in the region underlying said first piezoelectric layer, said parallel source electrodes being disposed perpendicular to said predetermined path of said surface acoustic waves and said second cuductivity type being opposite said first conductivity type; a set of parallel drain electrodes having said second conductivity type interdigitally formed in said substrate between said first set of parallel source electrodes, each of said interdigitally formed parallel source and drain electrodes being separated from each other by a predetermined interelectrode space; and gate means formed on the surface of said piezoelectric layer for controlling the conductivity between said gate and source electrodes, said gate means covering at least the portion of said piezoelectric layer which overlays each of said interelectrode spaces.
Claim 3
Dependent Claim 51 words
A monolithic programmable signal processor according to claim 1 wherein: said gate means comprises a plurality of gate electrodes formed on the surface of said piezoelectric layer and aligned over said interelectrode spaces; and said piezoelectric layer comprises one of the piezoelectric materials selected from the group comprising ZnO and AlN.
Claim 4
Dependent Claim 41 words
A monolithic programmable signal processor according to claim 2, wherein said at least one transducer is formed on a second piezoelectric layer disposed on the surface of said substrate, said second piezoelectric layer being spaced apart from said first piezoelectric layer.
Claim 5
Dependent Claim 25 words
A monolithic programmable signal processor according to claim 3, further comprising an insulator layer positioned between said substrate and at least said first piezoelectric layer.
Claim 6
Dependent Claim 23 words
A monolithic programmable signal processor according to claim 4, wherein the first conductivity type is p-type and the second conductivity type is n-type.
Claim 7
Dependent Claim 28 words
A monolithic programmable signal processor according to claim 4, further comprising regions formed in said substrate between said parallel source and drain electrodes having said first conductivity type.
Claim 8
Dependent Claim 40 words
A monolithic programmable signal processor according to claim 3 wherein said at least one transducer comprises two transducers disposed at opposite ends of said first piezoelectric layer and generating surface acoustic waves propagating along said predetermined path towards each other.
Claim 9
Dependent Claim 39 words
A monolithic programmable signal processor according to claim 7, wherein said second transducer is formed on a third piezoelectric layer disposed on the surface of said substrate, said third piezoelectric layer being spaced apart from said first piezoelectric layer.
Claim 10
Dependent Claim 25 words
A monolithic programmable signal processor according to claim 8, further including an insulator layer positioned between said substrate and at least said first piezoelectric layer.
Claim 11
Dependent Claim 23 words
A monolithic programmable signal processor according to claim 9, wherein the first conductivity type is p-type and the second conductivity type is n-type.
Claim 12
Dependent Claim 23 words
A monolithic programmable signal processor according to claim 9, wherein the first conductivity type is n-type and the second conductivity type is p-type.
Claim 13
Dependent Claim 28 words
A monolithic programmable signal processor according to claim 9, further comprising regions formed in said substrate between said parallel source and drain electrodes having said first conductivity type.
Claim 14
Dependent Claim 24 words
A monolithic programmable signal processor according to claim 8 wherein said second and third piezoelectric layers are contiguous portions of said first piezoelectric layers.
Claim 15
Dependent Claim 34 words
A monolithic programmable signal processor according to claim 1, wherein said gate means comprises an electrode covering the portion of said piezoelectric layer overlaying said source and drain electrode and said predetermined interelectrode space.
Claim 16
Dependent Claim 188 words
A monolithic programmable signal processor comprising: an InP substrate having a p-type conductivity; an insulating layer disposed on the surface of said substrate; a ZnO piezoelectric layer selectively formed on a first portion of said insulating layer; at least one transducer disposed on said substrate for generating surface acoustic waves which propagate along the surface of said piezoelectric layer along a predetermined path; a set of parallel source electrodes having an n-type conductivity formed in said InP substrate along said predetermined path in the region underlying said ZnO piezoelectric layer, said parallel source electrodes being disposed perpendicular to said predetermined path of said surface acoustic waves; a set of parallel drain electrodes, having an n-type conductivity, interdigitally formed in said InP substrate between said set of parallel source electrodes, said interdigitally formed parallel source and drain electrodes being separated from each other by a predetermined interelectrode space; and gate means formed on the surface of said ZnO piezoelectric layer for controlling the conductivity between said gate and source electrodes, said gate means covering at least the portion of said piezoelectric layer which overlays each of said interelectrode spaces.
Claim 17
Dependent Claim 188 words
A monolithic programmable signal processor comprising: an InP substrate having a p-type conductivity; an insulating layer disposed on the surface of said substrate; a ZnO piezoelectric layer selectively formed on a first portion of said insulating layer; at least one transducer disposed on said substrate for generating surface acoustic waves which propagate along the surface of said piezoelectric layer along a predetermined path; a set of parallel source electrodes having an n-type conductivity formed in said InP substrate along said predetermined path in the region underlying said ZnO piezoelectric layer, said parallel source electrodes being disposed perpendicular to said predetermined path of said surface acoustic waves; a set of parallel drain electrodes, having an n-type conductivity, interdigitally formed in said InP substrate between said set of parallel source electrodes, said interdigitally formed parallel source and drain electrodes being separated from each other by a predetermined interelectrode space; and gate means formed on the surface of said ZnO piezoelectric layer for controlling the conductivity between said gate and source electrodes, said gate means covering at least the portion of said piezoelectric layer which overlays each of said interelectrode spaces.
Claim 18
Dependent Claim 29 words
A monolithic programmable signal processor according to claim 15, further comprising p-type conductivity regions formed in said substrate and respectively positioned between said said parallel source and drain electrodes.
Claim 19
Dependent Claim 192 words
A monolithic programmable signal processor comprising: an InP substrate having a p-type conductivity; an insulating layer disposed on the surface of said substrate; a ZnO piezoelectric layer selectively formed on a first portion of said insulating layer; at least one transducer disposed on said substrate for generating surface acoustic waves which progagate along the surface of said piezoelectric layer along a predetermined path; a set of parallel source electrodes having an n-type conductivity formed in said InP substrate along said predetermined path in the region underlying said ZnO piezoelectric layer, said parallel source electrodes being disposed perpendicular to said predetermined path of said surface acoustic waves; a set of parallel drain electrodes, having an n-type conductivity, interdigitally formed in said InP substrate between said set of parallel source electrodes, said interdigitally formed parallel source and drain electrodes being separated from each other by a predetermined interelectrode space; and gate means formed on the surface of said ZnO piezoelectric layer for controlling the conductivity between the gate and source electrodes, said gate means covering the portion of said ZnO piezoelectric layer which overlays said gate electrodes, said source electrodes, and said interelectrode spaces.
Claim 20
Dependent Claim 192 words
A monolithic programmable signal processor comprising: an InP substrate having a p-type conductivity; an insulating layer disposed on the surface of said substrate; a ZnO piezoelectric layer selectively formed on a first portion of said insulating layer; at least one transducer disposed on said substrate for generating surface acoustic waves which progagate along the surface of said piezoelectric layer along a predetermined path; a set of parallel source electrodes having an n-type conductivity formed in said InP substrate along said predetermined path in the region underlying said ZnO piezoelectric layer, said parallel source electrodes being disposed perpendicular to said predetermined path of said surface acoustic waves; a set of parallel drain electrodes, having an n-type conductivity, interdigitally formed in said InP substrate between said set of parallel source electrodes, said interdigitally formed parallel source and drain electrodes being separated from each other by a predetermined interelectrode space; and gate means formed on the surface of said ZnO piezoelectric layer for controlling the conductivity between the gate and source electrodes, said gate means covering the portion of said ZnO piezoelectric layer which overlays said gate electrodes, said source electrodes, and said interelectrode spaces.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1990-05-11 1990-11-10 1991-05-12 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1994-05-11 1994-11-10 1995-05-12 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1998-05-11 1998-11-10 1999-05-12 $7700.00 Window Closed / Lapsed

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