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Method for forming evaporated pnictide and alkali metal polypnictide films

Assignee: Stauffer Chemical Co
•
Filing: 1984-02-17
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Granted: 1987-03-10
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Expires: 2004-02-17
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Abstract

Abstract A method and apparatus are provided for producing fine quality pnictide films by vacuum evaporation and molecular beam deposition. A pnictide source, preferably phosphorous, is heated to produce a continuous supply of vapor species, preferably P 4 . The vapor species is cracked by a heated tungsten wire positioned adjacent the pnictide source to produce P 2 molecules. A second tungsten wire cracker is located adjacent a substrate to prevent the recombination of P 2 molecules into P 4 molecules. The P 2 molecules are deposited on the substrate and condense into amorphous pure phosphorous shiny red films. A separate source of alkali metal intercalate, preferably KC 8 , may also be heated to provide an alkali metal vapor for producing films of alkali metal polypnictide films, preferably KP x where x is equal to or greater than 15, to be deposited on the substrate. Fine quality films may also be deposited on a substrate by a molecular beam apparatus providing a continuous source of pnictide vapor species and a cracker disposed between the exit of a pnictide collimator and the substrate.

Inventors

  • 👤 David G. Brock
  • 👤 John A. Baumann

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-07 14:32
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/22; C23C14/24; H; H10; H10K; H10K10/00; H10K10/40; H10K10/46; H10K10/462

Claims Analysis

Total Claims: 18
Claim 1
Independent Claim 51 words
The method of forming an evaporated film comprising a pnictide including the steps of supplying a continuous source of Pnictide 4 vapor species, cracking said vapor species into Pnictide 2 molecules, preventing the recombination of said Pnictide 2 molecules, and depositing said Pnictide 2 molecules as a film on said substrate.
Claim 2
Independent Claim 51 words
The method of forming an evaporated film comprising a pnictide including the steps of supplying a continuous source of Pnictide 4 vapor species, cracking said vapor species into Pnictide 2 molecules, preventing the recombination of said Pnictide 2 molecules, and depositing said Pnictide 2 molecules as a film on said substrate.
Claim 3
Dependent Claim 32 words
Vacuum evaporating a film of an alkali metal polypnictide onto a substrate from a first heated source containing an alkali metal intercalated in another material and a second source containing a pnictide.
Claim 4
Dependent Claim 32 words
Vacuum evaporating a film of an alkali metal polypnictide onto a substrate from a first heated source containing an alkali metal intercalated in another material and a second source containing a pnictide.
Claim 5
Dependent Claim 38 words
Vacuum evaporating a film of an alkali metal polynictide onto a substrate in the presence of a cracker from a first heated source containing an alkali metal intercalated in another material and a second source containing a pnictide.
Claim 6
Dependent Claim 38 words
Vacuum evaporating a film of an alkali metal polynictide onto a substrate in the presence of a cracker from a first heated source containing an alkali metal intercalated in another material and a second source containing a pnictide.
Claim 7
Independent Claim 20 words
The method in claims 2 or 3, wherein said pnictide is formed into a collimated molecular beam before being deposited.
Claim 8
Independent Claim 14 words
The method in claims 2 or 3, wherein said film consists essentially of phosphorus.
Claim 9
Independent Claim 77 words
The method of forming an evaporated film comprising a pnictide, said method including the steps of providing a source of pnictide vapor species and depositing such a film onto a substrate in the presence of at least two crackers, one of said crackers being positioned above said source of pnictide vapor species to crack said pnictide vapor species, the other of said crackers being positioned below said substrate to prevent recombination of said cracked pnictide vapor species.
Claim 10
Independent Claim 77 words
The method of forming an evaporated film comprising a pnictide, said method including the steps of providing a source of pnictide vapor species and depositing such a film onto a substrate in the presence of at least two crackers, one of said crackers being positioned above said source of pnictide vapor species to crack said pnictide vapor species, the other of said crackers being positioned below said substrate to prevent recombination of said cracked pnictide vapor species.
Claim 11
Dependent Claim 26 words
The method of claim 6 wherein said two crackers are positioned in a vapor stream of said pnictide vapor species between said source and said substrate.
Claim 12
Independent Claim 16 words
The method of claims 6 or 7 wherein said crackers include two high temperature tungsten filaments.
Claim 13
Dependent Claim 14 words
The method of claim 6 wherein said pnictide vapor species is P 4 .
Claim 14
Dependent Claim 22 words
The method of claim 9 wherein said crackers crack said P 4 into P 2 and prevent reformation of P 4 molecules.
Claim 15
Independent Claim 17 words
The method of claims 2 or 3 wherein said first source is an alkali metal graphite intercalate.
Claim 16
Dependent Claim 15 words
The method of claim 11 wherein said alkali metal graphite intercalate is KC 8 .
Claim 17
Dependent Claim 23 words
The method of claim 6 including the step of heating said one of said crackers to a temperature of 1000° C. or above.
Claim 18
Dependent Claim 23 words
The method of claim 6 further including the step of heating each of said crackers to a temperature of 1000° C. or above.

References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1990-03-09 1990-09-08 1991-03-10 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1994-03-09 1994-09-08 1995-03-10 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1998-03-09 1998-09-08 1999-03-10 $7700.00 Window Closed / Lapsed

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