US3082124A
Expired / Lapsed
US
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Method of making thin layer semiconductor devices
Assignee: Beckman Coulter Inc
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Filing: 1959-08-03
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Granted: 1963-03-19
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Expires: 1979-08-03
Abstract
No abstract record available.
Inventors
- 👤 Barry T French
- 👤 Edward M Nakaji
- 👤 Schneider Stanley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 22:19
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/54; C23C14/541; H; H01; H01B; H01B1/00
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
109 words
A METHOD OF MAKING DEVICES HAVING A THIN FILM OF HALL VOLTAGE MATERIAL ON A BASE PLATE, INCLUDING THE STEPS OF: HEATING A BASE PLATE IN A ZONE OF REDUCED PRESSURE TO A PREDETERMINED ELEVATED TEMPERATURE NOT LESS THAN 55*C. BELOW THE MELTING TEMPERATURE OF SAID HALL VOLTAGE MATERIAL; EVAPORATING A QUANTITY OF HALL VOLTAGE MATERIAL OVER A PERIOD TO TIME IN THE REDUCED PRESSURE ZONE; CONDENSING AT LEAST A PORTION OF THE VAPORIZED MATERIAL ON THE BASE PLATE; RAISING THE TEMPERATURE OF THE BASE PLATE DURING SAID PERIOD OF TIME; AND COOLING THE BASE PLATE DURING SAID DENSED FILM THEREON AT THE END OF SAID PERIOD OF TIME.
Claim 2
Independent Claim
109 words
A METHOD OF MAKING DEVICES HAVING A THIN FILM OF HALL VOLTAGE MATERIAL ON A BASE PLATE, INCLUDING THE STEPS OF: HEATING A BASE PLATE IN A ZONE OF REDUCED PRESSURE TO A PREDETERMINED ELEVATED TEMPERATURE NOT LESS THAN 55*C. BELOW THE MELTING TEMPERATURE OF SAID HALL VOLTAGE MATERIAL; EVAPORATING A QUANTITY OF HALL VOLTAGE MATERIAL OVER A PERIOD TO TIME IN THE REDUCED PRESSURE ZONE; CONDENSING AT LEAST A PORTION OF THE VAPORIZED MATERIAL ON THE BASE PLATE; RAISING THE TEMPERATURE OF THE BASE PLATE DURING SAID PERIOD OF TIME; AND COOLING THE BASE PLATE DURING SAID DENSED FILM THEREON AT THE END OF SAID PERIOD OF TIME.
References Cited (Backward Citations)
US2707223A
Cited
US2898234A
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DE1057845B
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US2886469A
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US2828396A
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US2938816A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1966-03-18 | 1966-09-17 | 1967-03-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1970-03-18 | 1970-09-17 | 1971-03-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1974-03-18 | 1974-09-17 | 1975-03-19 | $7700.00 | Window Closed / Lapsed |