Patent US4642163A successfully refreshed from Google Patents.
US4642163A
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US
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Method of making adhesive metal layers on substrates of synthetic material and device produced thereby
Assignee: International Business Machines Corp
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Filing: 1983-10-31
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Granted: 1987-02-10
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Expires: 2003-10-31
Abstract
Abstract A method of improving the adhesion between a synthetic substrate and metallized layers deposited thereon. A glass resin layer is spin-coated onto an epoxide substrate. The glass layer is covered by a photoresist layer which is roughened by reactive ion etching. The roughened contour of the photoresist layer is transferred via reactive ion etching to form a perforation pattern in the glass layer. The substrate is then etched vertically and horizontally to produce recesses in the substrate having overhanging walls. A thin copper layer is sputtered onto the substrate and copper conductors are sputtered onto the thin copper layer, the copper layers filling the recesses. The recesses and overhangs form mortices in the substrate, and the copper layers within the recess form tenons which fittingly engage with the mortices to produce adhesion between the substrate and the metallized layers in the order of 1000 n/m.
Inventors
- 👤 Johann Greschner
- 👤 Friedrich W. Schwerdt
- 👤 Hans J. Trumpp
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 23:15
CPC Classifications
B; B29; B29C; B29C59/00; B29C59/14; G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/11; H; H05; H05K; H05K3/00; H05K3/0011; H05K3/0017; H05K3/0041; H05K3/38; H05K3/381; H05K2201/00; H05K2201/01; H05K2201/0137; H05K2201/0166; H05K2201/20; H05K2201/2072; H05K3/388; Y; Y10; Y10S; Y10S428/00; Y10S428/901; Y10T; Y10T428/00; Y10T428/24; Y10T428/24479; Y10T428/24521; Y10T428/24612; Y10T428/24802; Y10T428/24917; Y10T428/24942; Y10T428/31
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
130 words
A method for improving the metal adhesion characteristic of the surface of a non-conductor substrate, said method comprising the steps of: applying a glass resin onto said surface of said substrate; applying a photoresist on top of said glass resin layer; roughening said photoresist to create a roughened contour thereon; transferring said roughened contour from said photoresist to said glass resin by etching in a first gas atmosphere to form a perforation structure; creating shallow recesses in said substrate by etching in a second gas atmosphere, wherein said recesses are made by substantially anisotropic etching followed by substantially isotropic etching, said recesses having a first width at said surface of said substrate and a second width greater than said first width in a region of said substrate below said surface.
Claim 2
Independent Claim
130 words
A method for improving the metal adhesion characteristic of the surface of a non-conductor substrate, said method comprising the steps of: applying a glass resin onto said surface of said substrate; applying a photoresist on top of said glass resin layer; roughening said photoresist to create a roughened contour thereon; transferring said roughened contour from said photoresist to said glass resin by etching in a first gas atmosphere to form a perforation structure; creating shallow recesses in said substrate by etching in a second gas atmosphere, wherein said recesses are made by substantially anisotropic etching followed by substantially isotropic etching, said recesses having a first width at said surface of said substrate and a second width greater than said first width in a region of said substrate below said surface.
Claim 3
Dependent Claim
37 words
The method as recited in claim 1 wherein said steps of roughening of said second layer and transferring said roughened contour to said first layer are both completed by reactive ion etching in said first gas atmosphere.
Claim 4
Independent Claim
178 words
A method of forming adhesive metal layers on substrates, comprising the steps of: (a) applying a first layer of glass resin onto a surface of said substrate to be metallized; (b) applying a second layer of a photoresist onto said first layer; (c) roughening said second layer by reactive ion etching in a first gas atmosphere; (d) transferring the roughness of said second layer to form a perforation structure in said first layer by reactive ion etching in said first gas atmosphere; (e) making shallow recesses in said surface of said substrate to be metallized by substantially vertical reactive ion etching in a second gas atmosphere, using said perforation structure as a mask; (f) horizontally etching said recesses to form overhang structures in said surface of said substrate by reactive ion etching in said second gas atmosphere; (g) sputtering a first thin metal layer onto said surface of said substrate prepared in accordance with steps (a) through (f) above; and (h) applying a second metal layer onto said first thin metal layer by means of electroless metal deposition.
Claim 5
Independent Claim
178 words
A method of forming adhesive metal layers on substrates, comprising the steps of: (a) applying a first layer of glass resin onto a surface of said substrate to be metallized; (b) applying a second layer of a photoresist onto said first layer; (c) roughening said second layer by reactive ion etching in a first gas atmosphere; (d) transferring the roughness of said second layer to form a perforation structure in said first layer by reactive ion etching in said first gas atmosphere; (e) making shallow recesses in said surface of said substrate to be metallized by substantially vertical reactive ion etching in a second gas atmosphere, using said perforation structure as a mask; (f) horizontally etching said recesses to form overhang structures in said surface of said substrate by reactive ion etching in said second gas atmosphere; (g) sputtering a first thin metal layer onto said surface of said substrate prepared in accordance with steps (a) through (f) above; and (h) applying a second metal layer onto said first thin metal layer by means of electroless metal deposition.
Claim 6
Dependent Claim
17 words
The method as recited in claim 3, wherein said substrate comprises a glass fiber reinforced epoxide resin.
Claim 7
Dependent Claim
47 words
The method as recited in claim 3, wherein said recesses are made by vertical etching in said second gas atmosphere at a first pressure and said overhang structures are made by horizontal etching in said second gas atmosphere at a second pressure greater than said first pressure.
Claim 8
Independent Claim
183 words
A method of forming adhesive metal layers on substrates, comprising the steps of: (a) manufacturing a substrate; (b) spin-coating a glass resin layer onto said substrate; (c) spin-coating a photoresist layer onto said glass resin layer; (d) roughening said photoresist layer by reactive ion etching at a first energy density, producing a roughness profile thereon; (e) transferring said roughness profile of said photoresist layer as a perforation pattern into said glass resin layer by reactive ion etching at a second energy density less than said first energy density; (f) forming recesses in said substrate through said perforation structure by substantially vertical reactive ion etching at a first plasma pressure; (g) forming overhangs in said substrate through said perforation structure by horizontal reactive ion etching at a second plasma pressure greater than said first plasma pressure; (h) removing said glass resin layer; (i) depositing a first copper layer onto said substrate by magnetic field-supported high rate cathode sputtering; (j) depositing a plurality of patterned copper conductors onto said first copper layer by electroless deposition in a bath; and (k) removing said first copper layer.
Claim 9
Independent Claim
183 words
A method of forming adhesive metal layers on substrates, comprising the steps of: (a) manufacturing a substrate; (b) spin-coating a glass resin layer onto said substrate; (c) spin-coating a photoresist layer onto said glass resin layer; (d) roughening said photoresist layer by reactive ion etching at a first energy density, producing a roughness profile thereon; (e) transferring said roughness profile of said photoresist layer as a perforation pattern into said glass resin layer by reactive ion etching at a second energy density less than said first energy density; (f) forming recesses in said substrate through said perforation structure by substantially vertical reactive ion etching at a first plasma pressure; (g) forming overhangs in said substrate through said perforation structure by horizontal reactive ion etching at a second plasma pressure greater than said first plasma pressure; (h) removing said glass resin layer; (i) depositing a first copper layer onto said substrate by magnetic field-supported high rate cathode sputtering; (j) depositing a plurality of patterned copper conductors onto said first copper layer by electroless deposition in a bath; and (k) removing said first copper layer.
Claim 10
Dependent Claim
22 words
The method according to claim 1 wherein said non-conductor substrate is a layer of resin-impregnated glass fabric in a printed circuit board.
Claim 11
Dependent Claim
21 words
The method according to claim 3 wherein said substrate is a layer of resin-impregnated glass fabric in a printed circuit board.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1990-02-09 | 1990-08-11 | 1991-02-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-02-09 | 1994-08-11 | 1995-02-10 | $3760.00 | Window Closed / Lapsed |
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