Patent US4630568A successfully refreshed from Google Patents.
US4630568A
Expired / Lapsed
US
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Apparatus for coating substrates by plasma polymerization
Assignee: Balzers und Leybold Deutschland Holding AG
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Filing: 1985-05-21
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Granted: 1986-12-23
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Expires: 2005-05-21
Abstract
Abstract Apparatus for coating substrates by means of a reaction for depositing atoms or molecules which is initiated by a plasma. A reaction chamber (1) is equipped with at least one window (22, 23), penetrable by microwaves, with at least one wave-guide structure (16, 17), arranged outside the chamber (1) and in front of the window (22, 23), and with a distributing means (25) discharging into the chamber. According to the invention and for the purpose of achieving the object of facilitating inspection and repairs, the window (22, 23) penetrable by microwaves, the one or more wave-guide structures (16, 17) and the distributing means (25) are all secured in or on a support frame (10), which can be removed, or swung away, from the reaction chamber (1) as a single unit.
Inventors
- 👤 Jorg Kieser
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 09:29
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/62; B01; B01J; B01J19/00; B01J19/08; B01J19/12; B01J19/122; B01J19/126; C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/511; H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32192; H01J37/32211; H01J37/32229; H01J37/32238; H01J37/32266; H01J37/32275; B01J2219/00; B01J2219/08; B01J2219/0894; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/338; H01J2237/3382
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
196 words
Apparatus for coating substrates by means of a reaction for depositing atoms or molecules which is initiated by a plasma, which apparatus comprises: a reaction chamber, including means for transporting the substrates, for containing an atmosphere comprising ionized gas and comprising, in one of its walls, two windows penetrable by microwaves; one or more wave-gude structures disposed outside said chamber and in front of said windows; means for distributing gas in said chamber; and a support frame at said reaction chamber, said support frame being of rectangular shape and comprising said two windows which extend parallel to the longer sides of the rectangle and a frame strut between said two windows, the apparatus also comprising cooling ducts, beside said windows, in said support frame, said distributing means being at least partially disposed in said frame strut; said windows, penetrable by microwaves, said one or more wave-guide structures and said distributing means being secured jointly to said support frame and said support frame being secured to said reaction chamber in such manner that said windows, said one or more wave-guide structures, said distributin means and said support frame are displaceable from said reaction chamber as a unit.
Claim 2
Dependent Claim
196 words
Apparatus for coating substrates by means of a reaction for depositing atoms or molecules which is initiated by a plasma, which apparatus comprises: a reaction chamber, including means for transporting the substrates, for containing an atmosphere comprising ionized gas and comprising, in one of its walls, two windows penetrable by microwaves; one or more wave-gude structures disposed outside said chamber and in front of said windows; means for distributing gas in said chamber; and a support frame at said reaction chamber, said support frame being of rectangular shape and comprising said two windows which extend parallel to the longer sides of the rectangle and a frame strut between said two windows, the apparatus also comprising cooling ducts, beside said windows, in said support frame, said distributing means being at least partially disposed in said frame strut; said windows, penetrable by microwaves, said one or more wave-guide structures and said distributing means being secured jointly to said support frame and said support frame being secured to said reaction chamber in such manner that said windows, said one or more wave-guide structures, said distributin means and said support frame are displaceable from said reaction chamber as a unit.
Claim 3
Dependent Claim
27 words
Apparatus according to claim 1 which comprises a wave-guide structure disposed in front of each window, and in which said wave-guide structures extend in an anti-parallel manner.
Claim 4
Dependent Claim
22 words
apparatus according to claim 2 which comprises a microwave screen surrounding said wave-guide structures at that side facing away from said windows.
Claim 5
Dependent Claim
24 words
Apparatus according to claim 3 in which said screen has a rear face and which apparatus comprises curved reflectors disposed at said rear face.
Claim 6
Dependent Claim
57 words
Apparatus according to claim 1 in which said strut has a longitudinal bore and a plurality of equidistantly spaced openings, extending at right angles to said longitudinal bore, and in which said longitudinal bore communicates with the interior of said reaction chamber through said plurality of spaced openings, said distributing means comprising said plurality of spaced openings.
Claim 7
Dependent Claim
18 words
Apparatus according to claim 5 in which said distributing means comprises a distributor plate disposed opposite said openings.
Claim 8
Dependent Claim
24 words
Apparatus according to claim 1 in which said support frame and said one or more windows have a main plane which is disposed vertically.
Claim 9
Dependent Claim
30 words
Apparatus according to claim 1 which includes adjustable shields disposed between said wave-guide structures and said windows and displaceable from said reaction chamber with said support frame as a unit.
Claim 10
Dependent Claim
39 words
Apparatus according to claim 8 in which said adjustable shields are formed by narrow strips of sheet metal, are substantially parallel to said windows, and are displaceable transversely of said windows at both ends and independently of each other.
Claim 11
Dependent Claim
22 words
Apparatus according to claim 8 in which said shields have edges shaped in such manner as to minimize non-uniformities in the plasma.
Claim 12
Dependent Claim
93 words
Apparatus according to claim 1 in which said support frame comprises an outwardly directed flange for sealed connection to the reaction chamber and an inwardly directed flange, having an inner edge, for sealed connection to one of said windows, penetrable by microwaves and having an outer edge, and which includes a heat-conductive flexible intermediate layer disposed between said inner edge of said inwardly directed flange and said outer edge of said one of said windows, and a seal disposed between said outer edge of said one of the windows and said intermediate layer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-12-22 | 1990-06-23 | 1990-12-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-12-22 | 1994-06-23 | 1994-12-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-12-22 | 1998-06-23 | 1998-12-23 | $7700.00 | Window Closed / Lapsed |