US4217856A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vacuum evaporation apparatus
Assignee: OC Oerlikon Balzers AG
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Filing: 1978-06-27
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Granted: 1980-08-19
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Expires: 1998-06-27
Abstract
Abstract The vacuum evaporation apparatus comprises a housing having walls definingn evacuable evaporation chamber with an evaporator in the chamber disposed below a supporting structure for the substance to be coated and including an annular screen disposed around the evaporator between the evaporator and the walls of the housing so that only an opening or angle between the evaporator and the supporting structure is left which is sufficient for the vapor deposition of the substrates. The screen is of a material which may be heated, such as a metal material, which may be electrically heated.
Inventors
- 👤 Thaddaus Kraus
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 18:01
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/56; C23C14/564
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
108 words
A vacuum evaporation apparatus, comprising, a housing having walls defining an evacuable evaporation chamber, an evaporator disposed in said housing which is heatable to evaporate a substance thereon, a supporting structure disposed in said housing in said chamber overlying said evaporator for supporting substrates to be coated, and a screen heatable independently of said evaporator and capable of heating the walls of said housing and disposed around said evaporator between said evaporator and the walls of said housing, said screen defining a limiting aperture between said evaporator and said supportive structure limiting radiation to an angle of a size sufficient only for the vapor deposition on the substrate.
Claim 2
Dependent Claim
108 words
A vacuum evaporation apparatus, comprising, a housing having walls defining an evacuable evaporation chamber, an evaporator disposed in said housing which is heatable to evaporate a substance thereon, a supporting structure disposed in said housing in said chamber overlying said evaporator for supporting substrates to be coated, and a screen heatable independently of said evaporator and capable of heating the walls of said housing and disposed around said evaporator between said evaporator and the walls of said housing, said screen defining a limiting aperture between said evaporator and said supportive structure limiting radiation to an angle of a size sufficient only for the vapor deposition on the substrate.
Claim 3
Dependent Claim
23 words
A vacuum evaporation apparatus, as claimed in claim 1, wherein said screen is closer to said evaporator than the walls of said housing.
Claim 4
Dependent Claim
37 words
A vacuum evaporation apparatus, as claimed in claim 1, including a protective foil wall disposed in said housing in spaced relationship to the interior walls of said housing forming a covering masking the walls of said housing.
Claim 5
Dependent Claim
30 words
A vacuum evaporation apparatus, as claimed in claim 1, wherein said screen comprises an electrical heater and means connected to said screen for supplying current thereto for heating said screen.
Claim 6
Dependent Claim
24 words
A vacuum evaporation apparatus, as claimed in claim 1, wherein said screen comprises a plurality of plate elements forming a polygon around said evaporator.
Claim 7
Dependent Claim
57 words
A vacuum evaporation apparatus, as claimed in claim 5, wherein said evaporator includes a plurality of evaporators arranged within said screen, said screen comprising a hexagonal structure formed of a plurality of plates, said evaporator housing including a mounting base having wedge-shaped receiving grooves, said plates being of wedge-shaped construction and being engaged in respective heating grooves.
Claim 8
Dependent Claim
29 words
A vacuum evaporation apparatus, as claimed in claim 1, including a cooling body disposed adjacent said screen and connected to said screen for dissipating the heat of said screen.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-08-19 | 1984-02-18 | 1984-08-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-08-19 | 1988-02-18 | 1988-08-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-08-19 | 1992-02-18 | 1992-08-19 | $7700.00 | Window Closed / Lapsed |