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US4600683A
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Cross-linked polyalkenyl phenol based photoresist compositions
Assignee: International Business Machines Corp
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Filing: 1985-04-22
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Granted: 1986-07-15
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Expires: 2005-04-22
Abstract
Abstract A film forming, radiation sensitive resist composition having improved thermal stability and a reduced dissolution rate in developer solutions, comprised of a sensitizer and a polyalkenyl phenol such as a polyvinyl phenol cross-linked, prior to irradiation, with a poly-functional cross-linking agent such as dimethylol p-cresol or hexamethylene tetramine.
Inventors
- 👤 Stephen E. Greco
- 👤 Dennis C. Green
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 17:16
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; G03F7/022; G03F7/023; G03F7/0233; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/106
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
45 words
A process for the production of a resist image which comprises depositing a layer on a substrate, the layer comprised of a photosensitizer and a polyalkenyl phenol cross-linked with a polyfunctional cross-linking compound, exposing the layer patternwise to radiation and then developing the pattern-exposed layer.
Claim 2
Dependent Claim
45 words
A process for the production of a resist image which comprises depositing a layer on a substrate, the layer comprised of a photosensitizer and a polyalkenyl phenol cross-linked with a polyfunctional cross-linking compound, exposing the layer patternwise to radiation and then developing the pattern-exposed layer.
Claim 3
Dependent Claim
12 words
The process of claim 1 wherein the polyalkenyl phenol is polyvinyl phenol.
Claim 4
Dependent Claim
13 words
The process of claim 1 wherein the cross-linking agent is a polymethylol phenol.
Claim 5
Dependent Claim
13 words
The process of claim 1 wherein the cross-linking agent is a hydrolyzable polyamine.
Claim 6
Dependent Claim
12 words
The process of claim 3 wherein the polymethylol phenol is dimethylol p-cresol.
Claim 7
Dependent Claim
13 words
The process of claim 4 wherein the polyamine is a hydrolyzable aliphatic polyamine.
Claim 8
Dependent Claim
12 words
The process of claim 6 wherein the aliphatic polyamine is hexamethylene tetramine.
Claim 9
Dependent Claim
32 words
The process of claim 1 wherein the polyalkenyl phenol is cross-linked with about 1 to about 15 percent by weight of the polyfunctional compound based on the weight of the polyalkenyl phenol.
Claim 10
Dependent Claim
20 words
The process of claim 1 wherein the layer contains about 0.1 to about 25 percent by weight of the sensitizer.
Claim 11
Dependent Claim
17 words
The process of claim 1 wherein the cross-linked polyalkenyl phenol containing layer is exposed to ultraviolet radiation.
Claim 12
Dependent Claim
19 words
The process of claim 1 wherein the radiation exposed cross-linked polyalkenyl phenol layer is developed in an alkaline solution.
Claim 13
Dependent Claim
21 words
A film forming, radiation sensitive photoresist composition comprised of a photosensitizer and a polyalkenyl phenol cross-linked with a polyfunctional cross-linking agent.
Claim 14
Dependent Claim
21 words
A film forming, radiation sensitive photoresist composition comprised of a photosensitizer and a polyalkenyl phenol cross-linked with a polyfunctional cross-linking agent.
Claim 15
Dependent Claim
12 words
The composition of claim 12 wherein the polyalkenyl phenol is polyvinyl phenol.
Claim 16
Dependent Claim
13 words
The composition of claim 12 wherein the cross-linking agent is a polymethylol phenol.
Claim 17
Dependent Claim
12 words
The composition of claim 12 wherein the cross-linking agent is hydrolyzable polyamine.
Claim 18
Dependent Claim
12 words
The composition of claim 14 wherein the polymethylol phenol is dimethylol p-cresol.
Claim 19
Dependent Claim
13 words
The composition of claim 15 wherein the polyamine is a hydrolyzable aliphatic polyamine.
Claim 20
Dependent Claim
12 words
The composition of claim 17 wherein the aliphatic amine is hexamethylene tetramine.
Claim 21
Dependent Claim
32 words
The composition of claim 12 wherein the polyalkenyl phenol is cross-linked with about 1 to about 15 percent by weight of the polyfunctional compound based on the weight of the polyalkenyl phenol.
Claim 22
Dependent Claim
19 words
The composition of claim 12 wherein composition contains about 0.1 to about 25 percent by weight of the photosensitizer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-07-14 | 1990-01-13 | 1990-07-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-07-14 | 1994-01-13 | 1994-07-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-07-14 | 1998-01-13 | 1998-07-15 | $7700.00 | Window Closed / Lapsed |