US4041191A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Resins for use as electron resists
Assignee: Individual
•
Filing: 1975-11-06
•
Granted: 1977-08-09
•
Expires: 1995-11-06
Abstract
Abstract An electron sensitive resin comprising a random polymer of ethylene glycol methacrylate with triethylene glycol dimethacrylate, randomly crosslinked, and having a degree of polymerization of from 10 to 1000, is described.
Inventors
- 👤 Pierre Leclerc
- 👤 Jean Claude Dubois
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 15:21
CPC Classifications
C; C08; C08F; C08F265/00; C08F265/04; C08F265/06; G; G03; G03F; G03F7/00; G03F7/004; G03F7/039; Y; Y10; Y10S; Y10S430/00; Y10S430/143
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
34 words
A resin for use as an electron resist comprising a random polymer of ethylene glycol monomethacrylate with triethylene glycol dimethacrylate, and randomly crosslinked, and having a degree of polymerization of from 10 to 1000.
Claim 2
Dependent Claim
34 words
A resin for use as an electron resist comprising a random polymer of ethylene glycol monomethacrylate with triethylene glycol dimethacrylate, and randomly crosslinked, and having a degree of polymerization of from 10 to 1000.
Claim 3
Dependent Claim
21 words
A resin as claimed in claim 1 having the structure: ##STR2## in which n is an integer from 10 to 1000.
Claim 4
Dependent Claim
49 words
A method of forming a mask upon a substrate which comprises forming a layer of resin as claimed in claim 1 upon a substrate; exposing the layer of resin imagewise to the action of a beam of electrons; and removing exposed resin by the action of a hydroxylic solvent.
Claim 5
Dependent Claim
18 words
A method as claimed in claim 3 in which the masked substrate is subsequently subjected to further treatment.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-08-08 | 1981-02-07 | 1981-08-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-08-08 | 1985-02-07 | 1985-08-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-08-08 | 1989-02-07 | 1989-08-09 | $7700.00 | Window Closed / Lapsed |