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US4588671A
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Photo and electron resist with donor-acceptor complex and light sensitive compound
Assignee: INSTITUT KHIMII AKADEMII NAUK SSR USSR GORKY
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Filing: 1981-12-21
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Granted: 1986-05-13
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Expires: 2001-12-21
Abstract
Abstract A photo- and electron resist distributed in an organic solvent, and including an additive which forms a donor-acceptor complex to eliminate luminescence effects and increase the stability of the resist. The photo- and electron resist can be used in microelectronics, optics, printing and precision machine building industry when resists are employed to manufacture structures of semiconductor devices and solid-state circuits.
Inventors
- 👤 Sergei P. Molodnyakov
- 👤 Jury I. Fedorov
- 👤 Vitaly A. Kuznetsov
- 👤 Alexei N. Egorochkin
- 👤 Tamara G. Birjukova
- 👤 Grigory A. Razuvaev
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 21:12
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/091
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
99 words
A film-forming photo-and electron-resist composition, comprising a resist formed from a light-sensitive compound selected from the group consisting of o-benzoquinone diazide, p-benzoquinone diazide, and o-naphthoquinone diazide, and a film-forming compound, said resist being present in an amount sufficient to react with actinic light, iodine as an additive which with said resist forms a donor-acceptor complex, said additive being present in an amount sufficient to react with said resist to form said complex and to thereby eliminate luminescence effect and to increase the resist stability, and an organic solvent in an amount sufficient to dissolve said resist and said additive.
Claim 2
Dependent Claim
99 words
A film-forming photo-and electron-resist composition, comprising a resist formed from a light-sensitive compound selected from the group consisting of o-benzoquinone diazide, p-benzoquinone diazide, and o-naphthoquinone diazide, and a film-forming compound, said resist being present in an amount sufficient to react with actinic light, iodine as an additive which with said resist forms a donor-acceptor complex, said additive being present in an amount sufficient to react with said resist to form said complex and to thereby eliminate luminescence effect and to increase the resist stability, and an organic solvent in an amount sufficient to dissolve said resist and said additive.
Claim 3
Dependent Claim
49 words
The composition of claim 1, comprising from 5-10 weight percent of said light-sensitive compound, from 10-15 weight percent of said film-forming compound selected from the group consisting of phenol-aldehyde resin, and α-naphthol-aldehyde resin, from 78-84.9 weight percent of said organic solvent, and from 0:1-30.0 weight percent of said additive.
Claim 4
Dependent Claim
27 words
The composition of claim 1, comprising said additive in an amount of 15 weight percent or less of the combined weight of dry constituents within said composition.
Claim 5
Dependent Claim
17 words
The composition of claim 1, comprising said light-sensitive and film-forming compounds in weight ratios of about 4:1-1:4.
Claim 6
Dependent Claim
89 words
A film-forming photo- and electron-resist composition, comprising a resist formed from the light-sensitive compound o-naphthoquinone diazide and a film-forming compound, said resist being present in an amount sufficient to react with actinic light, iodine as an additive which with said resist forms a donor-acceptor complex, said additive being present in an amount sufficient to react with said resist to form said complex and to thereby eliminate luminescence effect and to increase the resist stability, and an organic solvent in an amount sufficient to dissolve said resist and said additive.
Claim 7
Dependent Claim
89 words
A film-forming photo- and electron-resist composition, comprising a resist formed from the light-sensitive compound o-naphthoquinone diazide and a film-forming compound, said resist being present in an amount sufficient to react with actinic light, iodine as an additive which with said resist forms a donor-acceptor complex, said additive being present in an amount sufficient to react with said resist to form said complex and to thereby eliminate luminescence effect and to increase the resist stability, and an organic solvent in an amount sufficient to dissolve said resist and said additive.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-05-12 | 1989-11-11 | 1990-05-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-05-12 | 1993-11-11 | 1994-05-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-05-12 | 1997-11-11 | 1998-05-13 | $7700.00 | Window Closed / Lapsed |