US4571374A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Multilayer dry-film positive-acting laminable photoresist with two photoresist layers wherein one layer includes thermal adhesive
Assignee: 3M Co
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Filing: 1984-12-27
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Granted: 1986-02-18
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Expires: 2004-12-27
Abstract
Abstract Dry-film, positive-acting photoresist layers are used in the formation of many articles such as circuit boards, printing plates and the like. Laminable monolayers of photoresist suffer from slow speeds, brittleness, and narrow latitude during development and exposure. The use of a laminable positive-acting photoresist integral adhesive layer on the dry-film, positive-acting photoresist layer improves the properties and performance of the photoresist.
Inventors
- 👤 John P. Vikesland
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 02:03
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/039; G03F7/09; G03F7/095; G03F7/022; G03F7/023; G03F7/038
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
176 words
A dry-film, positive acting, laminable photoresist of at least two layers comprising: (a) a first layer of a positive-acting photoresist layer, comprising an organic polymeric binder having at least one positive-acting photosensitizer therein, said first layer becoming more soluble in an aqueous alkaline solution or organic solvent after exposure to actinic radiation, and (b) a second photoresist layer laminable to a receptor layer, adjacent and adhered to a surface of said first layer, of a thermally laminable adhesive organic polymer which second layer becomes more soluble in an aqueous alkaline solution or organic solvent after exposure to actinic radiation and which second photoresist layer contains a lower effective amount of positive-acting photosensitizer than said first layer said organic photoresist layer consisting essentially of organic polymeric binder and positive-acting photosensitizer, and said second photoresist layer being capable of generating between 30 and 90% of the number amount per volume of soluble species from said photosensitizer as compared to said first layer, said photoresist having reduced undercutting as compared to a photoresist without photosensitizer in said second layer.
Claim 2
Dependent Claim
176 words
A dry-film, positive acting, laminable photoresist of at least two layers comprising: (a) a first layer of a positive-acting photoresist layer, comprising an organic polymeric binder having at least one positive-acting photosensitizer therein, said first layer becoming more soluble in an aqueous alkaline solution or organic solvent after exposure to actinic radiation, and (b) a second photoresist layer laminable to a receptor layer, adjacent and adhered to a surface of said first layer, of a thermally laminable adhesive organic polymer which second layer becomes more soluble in an aqueous alkaline solution or organic solvent after exposure to actinic radiation and which second photoresist layer contains a lower effective amount of positive-acting photosensitizer than said first layer said organic photoresist layer consisting essentially of organic polymeric binder and positive-acting photosensitizer, and said second photoresist layer being capable of generating between 30 and 90% of the number amount per volume of soluble species from said photosensitizer as compared to said first layer, said photoresist having reduced undercutting as compared to a photoresist without photosensitizer in said second layer.
Claim 3
Dependent Claim
16 words
The photoresist of claim 1 wherein a strippable carrier layer is adhered to said first layer.
Claim 4
Dependent Claim
21 words
The photoresist of claim 2 wherein the organic polymer of said second layer is crosslinkable by the application of heat thereto.
Claim 5
Dependent Claim
22 words
The photoresist of claim 3 wherein said organic polymer of said second layer comprises a phenol formaldehyde resin and an acrylic polymer.
Claim 6
Dependent Claim
44 words
The photoresist of claim 4 wherein the positive-acting photosensitizer of said first and second layer comprises the same compounds and the concentration of said compound in said second layer is between 40 and 85% of the concentration of said compounds in said first layer.
Claim 7
Dependent Claim
29 words
The photoresist of claim 2 wherein said first photoresist layer comprises an o-quinone diazide in an organic polymeric binder and the organic polymer of said second layer is crosslinked.
Claim 8
Dependent Claim
35 words
The photoresist of claim 6 wherein said organic polymer of said second layer comprises a phenol formaldehyde resin and an acrylic polymer and said first and second layers are at least 2 micrometers in thickness.
Claim 9
Dependent Claim
44 words
The photoresist of claim 6 wherein the positive-acting photosensitizer of said first and second layer comprises the same compounds and the concentration of said compound in said second layer is between 40 and 85% of the concentration of said compounds in said first layer.
Claim 10
Dependent Claim
15 words
The photoresist of claim 6 wherein said organic polymeric binder comprises a phenol formaldehyde resin.
Claim 11
Dependent Claim
44 words
The photoresist of claim 9 wherein the positive-acting photosensitizer of said first and second layer comprises the same compounds and the concentration of said compound in said second layer is between 40 and 85% of the concentration of said compounds in said first layer.
Claim 12
Dependent Claim
17 words
The photoresist of claim 9 wherein the orgaic polymer of said second layer comprises an acrylic polymer.
Claim 13
Dependent Claim
44 words
The photoresist of claim 11 wherein the positive-acting photosensitizer of said first and second layer comprises the same compounds and the concentration of said compound in said second layer is between 40 and 85% of the concentration of said compounds in said first layer.
Claim 14
Dependent Claim
26 words
The photoresist of claim 11 wherein said second layer comprises (1) an acrylic copolymer or terpolymer and (2) a phenol formaldehyde resin crosslinked with a polyisocyanate.
Claim 15
Dependent Claim
44 words
The photoresist of claim 1 wherein the positive-acting photosensitizer of said first and second layer comprises the same compounds and the concentration of said compound in said second layer is between 40 and 85% of the concentration of said compounds in said first layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-02-17 | 1989-08-19 | 1990-02-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-02-17 | 1993-08-19 | 1994-02-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-02-17 | 1997-08-19 | 1998-02-18 | $7700.00 | Window Closed / Lapsed |