Patent US4568437A successfully refreshed from Google Patents.
US4568437A
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Method and apparatus for forming disilane
Assignee: RCA Corp
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Filing: 1984-12-28
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Granted: 1986-02-04
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Expires: 2004-12-28
Abstract
Abstract A method for forming disilane comprises flowing monosilane gas into a reaction vessel while maintaining a glow discharge in the monosilane and flowing the reaction product comprising the disilane out of the reaction vessel at a rate such that the monosilane gas resonance time in the reaction vessel is less than about one second. An apparatus for forming disilane comprises a source of flowing monosilane, a reaction vessel and electrical means for maintaining a glow discharge in the flowing monosilane in the reaction vessel.
Inventors
- 👤 Charles R. Dickson, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 15:43
CPC Classifications
C; C01; C01B; C01B33/00; C01B33/04; B; B01; B01J; B01J19/00; B01J19/08; B01J19/087; B01J19/088
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
75 words
A method of forming a reaction product including disilane from monosilane comprising the steps of: flowing the monosilane gas into a reaction vessel at a rate such that the monosilane residence time in the reaction vessel is less than about one second; maintaining a glow discharge in the monosilane in the reaction vessel thereby converting a portion of the monosilane to disilane; and flowing the reaction product comprising the disilane out of the reaction vessel.
Claim 2
Independent Claim
75 words
A method of forming a reaction product including disilane from monosilane comprising the steps of: flowing the monosilane gas into a reaction vessel at a rate such that the monosilane residence time in the reaction vessel is less than about one second; maintaining a glow discharge in the monosilane in the reaction vessel thereby converting a portion of the monosilane to disilane; and flowing the reaction product comprising the disilane out of the reaction vessel.
Claim 3
Dependent Claim
16 words
The method of claim 1 wherein the residence time is between about 0.05 and 0.50 second.
Claim 4
Dependent Claim
16 words
The method of claim 2 wherein the residence time is between about 0.1 and 0.3 second.
Claim 5
Dependent Claim
23 words
The method of claim 1 wherein the reaction vessel includes a first electrode and a second electrode axially disposed about the first electrode.
Claim 6
Dependent Claim
36 words
The method of claim 4 wherein the total gas pressure in the reaction vessel is between about 1 and 2 torr and the reaction vessel is held at temperature between about 120° C. and 300° C.
Claim 7
Dependent Claim
21 words
The method of claim 4 wherein the gas residence time in the reaction vessel is between about 0.05 and 0.50 second.
Claim 8
Dependent Claim
16 words
The method of claim 6 wherein the gas residence time is between 0.10 and 0.30 second.
Claim 9
Dependent Claim
24 words
The method of claim 1 wherein the reaction vessel comprises a chamber having a dielectric wall with a coil axially disposed about the wall.
Claim 10
Dependent Claim
48 words
The method of claim 1 further comprising the steps of: flowing the reaction product into a deposition chamber having a substrate therein; and maintaining a glow discharge in the reaction product in the deposition chamber sufficient to deposit a layer containing silicon onto a surface of the substrate.
Claim 11
Independent Claim
76 words
An apparatus for producing a reaction product including disilane from monosilane comprising: a source of flowing monosilane gas; a reaction vessel; means for controlling the monosilane gas flow rate from the source into the vessel such that the gas residence time in the vessel is less than about one second; electrical means for maintaining a glow discharge in the monosilane gas in the reaction vessel; and output means for flowing the reaction product from said vessel.
Claim 12
Independent Claim
76 words
An apparatus for producing a reaction product including disilane from monosilane comprising: a source of flowing monosilane gas; a reaction vessel; means for controlling the monosilane gas flow rate from the source into the vessel such that the gas residence time in the vessel is less than about one second; electrical means for maintaining a glow discharge in the monosilane gas in the reaction vessel; and output means for flowing the reaction product from said vessel.
Claim 13
Dependent Claim
27 words
The apparatus of claim 10 wherein the electrical means include a first electrode and a second electrode axially disposed about the first electrode in the reaction vessel.
Claim 14
Dependent Claim
17 words
The apparatus of claim 10 wherein the gas residence time is between about 0.05 and 0.5 seconds.
Claim 15
Dependent Claim
17 words
The apparatus of claim 12 wherein the gas residence time is between about 0.1 and 0.3 seconds.
Claim 16
Dependent Claim
44 words
The apparatus of claim 10 further comprising connecting means for connecting said output means to a deposition chamber to flow said reaction product into said deposition chamber; and deposition electrical means for maintaining a glow discharge in said reaction product in said deposition chamber.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-02-03 | 1989-08-05 | 1990-02-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-02-03 | 1993-08-05 | 1994-02-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-02-03 | 1997-08-05 | 1998-02-04 | $7700.00 | Window Closed / Lapsed |