Patent US4564435A successfully refreshed from Google Patents.
US4564435A
Expired / Lapsed
US
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Target assembly for sputtering magnetic material
Assignee: Tosoh SMD Inc
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Filing: 1985-05-23
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Granted: 1986-01-14
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Expires: 2005-05-23
Abstract
Abstract An optimized annular sputter target assembly for use in sputtering magnetic material, comprising a thin target piece of magnetic material mounted on a backing structure of nonmagnetic material. Said backing structure provides means for easy mounting and removal of the target assembly and for providing good thermal and electrical contact with the cooling wall of the sputter source. The target piece has a portion extending radially outwardly from said cooling wall thereby providing greater target surface area.
Inventors
- 👤 Charles E. Wickersham
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 23:06
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3411; H01J37/3414; H01J37/3426; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407; C23C14/3414; H01J37/3402; H01J37/3405; H01J37/3408; H01J37/3435; H01J37/3488; H01J37/3497
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
116 words
An annular sputter coating target assembly for use in sputter coating apparatus, said annular target assembly comprising: a sputter target piece having: a first portion of substantially right cylindrical shape, a second portion of substantially right cylindrical shape of smaller diameter than said first portion, a third portion interconnecting said first and second portions and having a truncated conical shape, and a fourth portion extending radially inward from said second portion and having a substantially planar shape, all of said four portions being made of magnetic material; and a backing structure on the side of said sputter target piece opposite the surface from which sputtering is to occur, said backing structure being made of nonmagnetic material.
Claim 2
Dependent Claim
116 words
An annular sputter coating target assembly for use in sputter coating apparatus, said annular target assembly comprising: a sputter target piece having: a first portion of substantially right cylindrical shape, a second portion of substantially right cylindrical shape of smaller diameter than said first portion, a third portion interconnecting said first and second portions and having a truncated conical shape, and a fourth portion extending radially inward from said second portion and having a substantially planar shape, all of said four portions being made of magnetic material; and a backing structure on the side of said sputter target piece opposite the surface from which sputtering is to occur, said backing structure being made of nonmagnetic material.
Claim 3
Dependent Claim
14 words
The sputter coating target of claim 1 in which said magnetic material is nickel.
Claim 4
Dependent Claim
14 words
The sputter coating target of claim 1 in which said nonmagnetic material is aluminum.
Claim 5
Dependent Claim
14 words
The sputter coating target of claim 1 in which said magnetic material is cobalt.
Claim 6
Dependent Claim
76 words
The sputter coating target of claim 1 in which said backing structure comprises a first backing piece portion being of substantially right cylindrical shape, and a second backing piece portion being of substantially planar shape and abutting said first backing piece portion radially inward from said first backing piece portion; the inner diameter of said first backing piece portion being substantially the same as the outer diameter of said second portion of said sputter target piece.
Claim 7
Dependent Claim
19 words
The target assembly of claim 5 wherein said second backing piece portion is substantially thicker than said target piece.
Claim 8
Dependent Claim
49 words
The target assembly of claim 5 wherein said first and second backing piece portions abut each other along an intersection having the shape of a truncated cone sloped such that said first backing piece portion holds said second backing piece portion against said fourth portion of said target piece.
Claim 9
Dependent Claim
22 words
The sputter coating target assembly of claim 1 in which said backing structure has the same shape as the sputter target piece.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-01-13 | 1989-07-15 | 1990-01-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-01-13 | 1993-07-15 | 1994-01-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-01-13 | 1997-07-15 | 1998-01-14 | $7700.00 | Window Closed / Lapsed |