US4436602A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Blocking shield and method for contouring the thickness of sputter coated layers
Assignee: Novellus Systems Inc
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Filing: 1983-08-19
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Granted: 1984-03-13
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Expires: 2003-08-19
Abstract
Abstract A method of sputter depositing a desired film thickness profile on a substrate is accomplished by depositing material onto a substrate at spaced apart coating stations whereby a substrate at any of said stations is not coated by the sputter coating action at any of the other sputter stations. The substrate is held stationary during complete sputtering at each station. A blocking shield is placed in fixed position between the substrate and the sputter coating source at one or more of the stations. The duration of sputter coating time at one station may be different than at another station.
Inventors
- 👤 David J. Harra
- 👤 Frederick T. Turner
- 👤 Martin A. Hutchinson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 04:58
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; C; C23; C23C; C23C14/00; C23C14/04; C23C14/042; C23C14/044
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
152 words
A method of sputter depositing an arbitrarily contoured film of a single material onto a substrate in a multi-station sputter system, comprising the steps of sputter depositing said material onto said substrate from a cathode source in a first sputter station; indexing said substrate to another sputter station, said substrate being shielded from deposition from completion of sputtering at said first sputter station to commencement of sputtering at said other sputter station; sputter depositing said material onto said substrate from a cathode source in said other sputter station; the contour of said material sputtered on said substrate at said first sputter station being different from the contour of said material sputtered on said substrate at said other sputter station; and said difference in contour of said sputtered material being obtained by a blocking shield placed in fixed position in one of said sputter stations in between said cathode source and said substrate.
Claim 2
Independent Claim
152 words
A method of sputter depositing an arbitrarily contoured film of a single material onto a substrate in a multi-station sputter system, comprising the steps of sputter depositing said material onto said substrate from a cathode source in a first sputter station; indexing said substrate to another sputter station, said substrate being shielded from deposition from completion of sputtering at said first sputter station to commencement of sputtering at said other sputter station; sputter depositing said material onto said substrate from a cathode source in said other sputter station; the contour of said material sputtered on said substrate at said first sputter station being different from the contour of said material sputtered on said substrate at said other sputter station; and said difference in contour of said sputtered material being obtained by a blocking shield placed in fixed position in one of said sputter stations in between said cathode source and said substrate.
Claim 3
Dependent Claim
28 words
A method of sputter depositing an arbitrarily contoured film onto a substrate in accordance with claim 1 wherein said blocking shield is located at said first sputter station.
Claim 4
Dependent Claim
28 words
A method of sputter depositing an arbitrarily contoured film onto a substrate in accordance with claim 1 wherein said blocking shield is located at said other sputter station.
Claim 5
Dependent Claim
66 words
A method of sputter depositing an arbitrarily contoured film in accordance with claim 1 wherein said substrate is a generally circular semiconductor wafer and wherein said step of sputter depositing employing a blocking shield is accomplished by means of a circular blocking shield having a diameter less than the diameter of said circular semiconductor wafer, said circular blocking shield being positioned concentrically over said semiconductor wafer.
Claim 6
Dependent Claim
45 words
A method of sputter depositing an arbitrarily contoured film in accordance with claim 4 wherein said step of sputter depositing comprises using a blocking shield having a primary circular blocking shield portion and an ancillary blocking shield portion extending in the direction of said substrate.
Claim 7
Independent Claim
127 words
A method of sputter depositing a desired film thickness profile of a single material on a substrate, said method comprising the steps of: sputter depositing said material onto said substrate from a first sputter cathode at a first sputter station while maintaining said substrate and said first sputter cathode stationary relative to each other throughout said sputtering; moving said substrate to a second sputter cathode at a second sputter station substantially spaced from said first sputter station; sputter depositing said material onto said substrate at said second station while maintaining said substrate and said first sputter cathode stationary relative to each other throughout said sputtering; and positioning a blocking shield in fixed position between said substrate and said sputter cathode throughout sputtering at one of said stations.
Claim 8
Independent Claim
127 words
A method of sputter depositing a desired film thickness profile of a single material on a substrate, said method comprising the steps of: sputter depositing said material onto said substrate from a first sputter cathode at a first sputter station while maintaining said substrate and said first sputter cathode stationary relative to each other throughout said sputtering; moving said substrate to a second sputter cathode at a second sputter station substantially spaced from said first sputter station; sputter depositing said material onto said substrate at said second station while maintaining said substrate and said first sputter cathode stationary relative to each other throughout said sputtering; and positioning a blocking shield in fixed position between said substrate and said sputter cathode throughout sputtering at one of said stations.
Claim 9
Dependent Claim
30 words
A method as claimed in claim 6 wherein said substrate is coated for a longer period of time at one of said stations than at the other of said stations.
Claim 10
Dependent Claim
29 words
A method as claimed in claim 6 wherein said substrate is maintained within a vacuum environment during movement from one of said stations to the other of said stations.
Claim 11
Dependent Claim
30 words
A method as claimed in claim 6 wherein a blocking shield is positioned between said substrate and said sputter cathode at one of said stations and not at the other.
Claim 12
Dependent Claim
52 words
A method as claimed in claim 6 wherein a blocking shield is positioned between said substrate and the sputter cathode at both of said stations, and the configuration of the blocking shield at one of said stations is different from the configuration of the blocking shield at the other of said stations.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-03-13 | 1987-09-12 | 1988-03-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-03-13 | 1991-09-12 | 1992-03-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-03-13 | 1995-09-12 | 1996-03-13 | $7700.00 | Window Closed / Lapsed |