US4416759A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sputter system incorporating an improved blocking shield for contouring the thickness of sputter coated layers
Assignee: Novellus Systems Inc
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Filing: 1981-11-27
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Granted: 1983-11-22
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Expires: 2001-11-27
Abstract
Abstract The arbitrary contouring of thickness of a sputter-deposited film is made possible by a blocking means having a primary blocking shield and an ancillary blocking shield. The primary blocking shield intercepts atoms sputtered directly from the cathode target by line-of-sight transport. The ancillary blocking shield extends downwardly from the side of the primary blocking shield which is placed closest to the substrate. The ancillary blocking shield intercepts atoms sputtered from the cathode which by intervening gas collisions have been redirected to travel underneath the primary blocking shield. Precise tailoring of the thickness profile of the coating on the substrate is thereby provided and the quality of the composite film is maintained. The method for contouring the thickness of sputter coated layers comprises sputter coating portions of the film at successive stations. By employing the improved blocking shield at selected stations, the film in the aggregate may have the desired thickness contour.
Inventors
- 👤 David J. Harra
- 👤 Frederick T. Turner
- 👤 Martin A. Hutchinson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 09:28
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; C; C23; C23C; C23C14/00; C23C14/04; C23C14/042; C23C14/044
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
180 words
A sputter system comprising an improved blocking shield for contouring the thickness of a sputter-deposited layer, said sputter system including a target cathode, a substrate mounting means and a means for producing a plasma in said system, said improved blocking shield comprising: a primary blocking shield structure positioned in said sputter system in between said target cathode and said substrate mounting means, said primary blocking shield being positioned in spaced adjacency to said substrate mounting means to shadow a portion of said substrate mounting means from line-of sight exposure to said target cathode, and an ancillary blocking shield, said ancillary blocking shield positioned in said sputter system to form an extension of said primary blocking shield in the direction of said substrate mounting means, said ancillary blocking shield being displaced inwardly from the periphery of said blocking shield by a predetermined distance and spaced a predetermined distance above said substrate mounting means and serving to shield against the lateral movement of sputtered atoms which are redirected inwardly of the bottom edge of said primary blocking shield by gas scattering collisions.
Claim 2
Dependent Claim
180 words
A sputter system comprising an improved blocking shield for contouring the thickness of a sputter-deposited layer, said sputter system including a target cathode, a substrate mounting means and a means for producing a plasma in said system, said improved blocking shield comprising: a primary blocking shield structure positioned in said sputter system in between said target cathode and said substrate mounting means, said primary blocking shield being positioned in spaced adjacency to said substrate mounting means to shadow a portion of said substrate mounting means from line-of sight exposure to said target cathode, and an ancillary blocking shield, said ancillary blocking shield positioned in said sputter system to form an extension of said primary blocking shield in the direction of said substrate mounting means, said ancillary blocking shield being displaced inwardly from the periphery of said blocking shield by a predetermined distance and spaced a predetermined distance above said substrate mounting means and serving to shield against the lateral movement of sputtered atoms which are redirected inwardly of the bottom edge of said primary blocking shield by gas scattering collisions.
Claim 3
Dependent Claim
59 words
A sputter system in accordance with claim 1 wherein said substrate mounting means comprises means for mounting a generally circular semiconductor wafer, said primary blocking shield comprises a circular shield having a diameter less than the diameter of said semiconductor wafer, and wherein said circular primary blocking shield is positioned above and concentrically with respect to said semiconductor wafer.
Claim 4
Dependent Claim
46 words
A sputter system in accordance with claim 2 wherein said ancillary blocking shield comprises a circular ring having a diameter less than the diameter of said primary blocking shield and wherein said ancillary blocking shield is positioned concentrically on the underside of said primary blocking shield.
Claim 5
Dependent Claim
35 words
A sputter system in accordance with claim 3 wherein said ancillary blocking shield is positioned inwardly of said bottom edge of said primary blocking shield a predetermined distance y, between 0.1 inch and 0.6 inches.
Claim 6
Dependent Claim
31 words
A sputter system in accordance with claim 3 wherein said ancillary blocking shield portion extends downwardly of said primary blocking shield a predetermined distance x-z, between 0.1 inch and 0.5 inches.
Claim 7
Dependent Claim
31 words
A sputter system in accordance with claim 3 wherein the predetermined distance, z, from the bottom of said ancillary blocking shield to said substrate is between 0.03 inch to 0.1 inch.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-11-21 | 1987-05-23 | 1987-11-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-11-21 | 1991-05-23 | 1991-11-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-11-21 | 1995-05-23 | 1995-11-22 | $7700.00 | Window Closed / Lapsed |