Patent US3537637A successfully refreshed from Google Patents.
Patent US4547836A successfully refreshed from Google Patents.
US4547836A
Expired / Lapsed
US
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Insulating glass body with electrical feedthroughs and method of preparation
Assignee: General Electric Co
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Filing: 1984-02-01
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Granted: 1985-10-15
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Expires: 2004-02-01
Abstract
Abstract A glass wafer having high aspect ratio holes passing therethrough is provided with metal conductors in the holes as feedthroughs. First, the wafer is processed to line the holes with a thin electron-conducting layer of metal. Next, a layer of the same or different metal is applied over the first metal layer providing the requisite feedthrough electrical conductivity for each hole. Preferably, the glass contains lead oxide, the first metal layer is lead and the next layer is copper.
Inventors
- 👤 Thomas R. Anthony
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 04:47
CPC Classifications
H; H10; H10N; H10N10/00; H10N10/10; H10N10/17; Y; Y10; Y10S; Y10S428/00; Y10S428/901; Y10T; Y10T428/00; Y10T428/12; Y10T428/12361; Y10T428/12493; Y10T428/12535; Y10T428/12597; Y10T428/24; Y10T428/24273; Y10T428/24802; Y10T428/24917; Y10T428/24926
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
99 words
A body of electrically insulating glass having opposed, spaced major surfaces and at least one bore extending completely therethrough interconnecting said major surface, said bore having a diameter of less than about 10 mils and an average length-to-diameter ratio of from about 6:1 to about 50:1 and having a metal lining, said metal lining being directly bonded to an underlying layer of metal directly bonded to said insulating glass, the metal of said metal lining being selected from the group consisting of copper, silver, gold, nickel, platinum and tin and providing a continuous electrical path between said major surfaces.
Claim 2
Dependent Claim
99 words
A body of electrically insulating glass having opposed, spaced major surfaces and at least one bore extending completely therethrough interconnecting said major surface, said bore having a diameter of less than about 10 mils and an average length-to-diameter ratio of from about 6:1 to about 50:1 and having a metal lining, said metal lining being directly bonded to an underlying layer of metal directly bonded to said insulating glass, the metal of said metal lining being selected from the group consisting of copper, silver, gold, nickel, platinum and tin and providing a continuous electrical path between said major surfaces.
Claim 3
Dependent Claim
24 words
The body of electrically insulating glass of claim 1 wherein the glass contains lead oxide and the metal of the underlying layer is lead.
Claim 4
Dependent Claim
22 words
The body of electrically insulating glass of claim 2 wherein the glass is a lead-alkali-silicate glass having about 18-65 wt% lead oxide.
Claim 5
Dependent Claim
18 words
The body of electrically insulating glass of claim 3 wherein the metal of the metal lining is copper.
Claim 6
Dependent Claim
47 words
The body of electrically insulating glass of claim 1 wherein at least one semiconductor chip is bonded to a major surface of said body, said chip being electrically connected to solder pins, each such solder pin filling a copper-lined bore and providing electrical conductivity through said body.
Claim 7
Dependent Claim
28 words
The body of electrically insulating glass of claim 5 wherein the bore in which the copper lining is located has a diameter of less than about 1.5 mils.
Claim 8
Dependent Claim
16 words
The body of electrically insulating glass of claim 5 wherein the chip is a silicon chip.
Claim 9
Dependent Claim
18 words
The body of electrically insulating glass of claim 1 wherein the metal of the metal lining is copper.
Claim 10
Dependent Claim
24 words
The body of electrically insulating glass of claim 1 wherein the thickness of said body is in the range of 12 to 500 mils.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-10-14 | 1989-04-15 | 1989-10-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-10-14 | 1993-04-15 | 1993-10-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-10-14 | 1997-04-15 | 1997-10-15 | $7700.00 | Window Closed / Lapsed |