Patent US4523372A successfully refreshed from Google Patents.
US4523372A
Expired / Lapsed
US
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Process for fabricating semiconductor device
Assignee: NXP USA Inc
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Filing: 1984-05-07
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Granted: 1985-06-18
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Expires: 2004-05-07
Abstract
Abstract A process is disclosed for fabricating semiconductor devices, and especially for fabricating semiconductor devices having multiple levels of metallization separated by polyimide or other organic materials. The process avoids the sputter etching and redeposition of the lower metal layer during reactive ion etching of openings through the organic layer. Sequential layers overlying the first layer of metallization include a layer of oxide, a layer of organic material, and a second layer of oxide. The second layer of oxide functions as a hard mask for patterning the organic material. The first layer of oxide acts as an etch stop and protective layer to prevent attack of the underlying metal during reactive ion etching of the organic layer. The first layer of oxide is of limited areal extent to avoid subsequent problems with the organic layer. The oxide located at the bottom of the opening through the organic material as well as the second layer of oxide and any oxide which is sputtered and redeposited on the walls of the opening through the organic material are easily removed in a single etch step without adversely affecting the underlying metallization. After removing the oxide, a second layer of metallization is applied and patterned as required.
Inventors
- 👤 Raymond J. Balda
- 👤 Yefim Bukhman
- 👤 Willis R. Goodner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 23:09
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/081; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/286; H10P50/287; Y; Y10; Y10S; Y10S148/00; Y10S148/131; Y10S438/00; Y10S438/942; Y10S438/945; Y10S438/963
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
167 words
A process for fabricating a semiconductor device which comprises the steps of: providing a semiconductor substrate having a first layer of organic material thereon; providing a second layer of first metallization overlying said substrate; forming a third layer of a first insulating material overlying said second layer of first metallization; patterning said third layer; patterning said second layer of first metallization, leaving said third layer overlying remaining portions of said second layer; forming a fourth layer of organic material overlying said third layer; forming a fifth layer of said first insulating material overlying said fourth layer of organic material; forming openings in said fifth layer to expose portions of said fourth layer of organic material; reactive ion etching said fourth layer of organic material through said openings in said fifth layer to expose portions of said third layer; and simultaneously etching said fifth layer and portions of said third layer exposed through said fourth layer of organic material to expose portions of said second layer first metallization.
Claim 2
Dependent Claim
167 words
A process for fabricating a semiconductor device which comprises the steps of: providing a semiconductor substrate having a first layer of organic material thereon; providing a second layer of first metallization overlying said substrate; forming a third layer of a first insulating material overlying said second layer of first metallization; patterning said third layer; patterning said second layer of first metallization, leaving said third layer overlying remaining portions of said second layer; forming a fourth layer of organic material overlying said third layer; forming a fifth layer of said first insulating material overlying said fourth layer of organic material; forming openings in said fifth layer to expose portions of said fourth layer of organic material; reactive ion etching said fourth layer of organic material through said openings in said fifth layer to expose portions of said third layer; and simultaneously etching said fifth layer and portions of said third layer exposed through said fourth layer of organic material to expose portions of said second layer first metallization.
Claim 3
Dependent Claim
14 words
The process of claim 1 wherein said first layer of organic material comprises polyimide.
Claim 4
Dependent Claim
14 words
The process of claim 1 wherein said fourth layer of organic material comprises polyimide.
Claim 5
Dependent Claim
17 words
The process of claim 3 wherein said step of reactive ion etching comprises etching with oxygen ions.
Claim 6
Dependent Claim
14 words
The process of claim 1 wherein said second layer of first metallization comprises aluminum.
Claim 7
Dependent Claim
21 words
The process of claim 5 wherein said third layer of a first insulating material comprises deposited silicon oxide or silicon nitride.
Claim 8
Dependent Claim
31 words
The process of claim 1 further comprising the step of depositing a sixth layer of a second metallization overlying said fourth layer and selectively contacting said second layer of first metallization.
Claim 9
Dependent Claim
251 words
A process for fabricating a semiconductor device which comprises the steps of: providing a semiconductor substrate; patterning a first layer of metallization overlying said substrate; forming a second layer of inorganic insulator and then a third layer of organic insulator overlying said first layer of metallization; reactive ion etching openings in said third layer of organic insulator to expose portions of said second layer of inorganic insulator; etching said exposed portions of said second layer of inorganic insulator to expose portions of said first layer of metallization; depositing a fourth layer of metallization and a fifth layer of inorganic insulator overlying said third layer of organic insulator, said fourth layer of metallization selectively contacting said first layer of metallization through said openings; removing portions of said fifth layer of inorganic insulator to expose portions of said fourth layer of metallization; removing said exposed portions of said fourth layer of metallization to leave a pattern of metallization overlaid by a remaining portion of said fifth layer of inorganic insulator; providing a sixth layer of organic insulator and a seventh layer inorganic material overlying said pattern of metallization forming an opening in said seventh layer to expose portions of said sixth layer; reactive ion etching said sixth layer of organic insulator through said opening in said seventh layer to selectively expose portions of said fifth layer of inorganic insulator; and simultaneously etching said exposed portions of said seventh layer and fifth layer of inorganic insulator to expose portions of said pattern of metallization.
Claim 10
Dependent Claim
251 words
A process for fabricating a semiconductor device which comprises the steps of: providing a semiconductor substrate; patterning a first layer of metallization overlying said substrate; forming a second layer of inorganic insulator and then a third layer of organic insulator overlying said first layer of metallization; reactive ion etching openings in said third layer of organic insulator to expose portions of said second layer of inorganic insulator; etching said exposed portions of said second layer of inorganic insulator to expose portions of said first layer of metallization; depositing a fourth layer of metallization and a fifth layer of inorganic insulator overlying said third layer of organic insulator, said fourth layer of metallization selectively contacting said first layer of metallization through said openings; removing portions of said fifth layer of inorganic insulator to expose portions of said fourth layer of metallization; removing said exposed portions of said fourth layer of metallization to leave a pattern of metallization overlaid by a remaining portion of said fifth layer of inorganic insulator; providing a sixth layer of organic insulator and a seventh layer inorganic material overlying said pattern of metallization forming an opening in said seventh layer to expose portions of said sixth layer; reactive ion etching said sixth layer of organic insulator through said opening in said seventh layer to selectively expose portions of said fifth layer of inorganic insulator; and simultaneously etching said exposed portions of said seventh layer and fifth layer of inorganic insulator to expose portions of said pattern of metallization.
Claim 11
Dependent Claim
19 words
The process of claim 8 wherein said first layer of metallization and said fourth layer of metallization comprise aluminum.
Claim 12
Dependent Claim
21 words
The process of claim 9 wherein said third layer of organic insulator and said sixth layer of organic insulator comprise polyimide.
Claim 13
Dependent Claim
17 words
The process of claim 10 wherein said steps of reactive ion etching comprise etching in oxygen ions.
Claim 14
Dependent Claim
26 words
The process of claim 11 wherein said second layer of inorganic insulator and said fifth layer of inorganic insulator comprise deposited silicon oxide or silicon nitride.
Claim 15
Dependent Claim
164 words
A process for fabricating a semiconductor device which comprises the steps of: providing a semiconductor substrate; forming in sequence overlying said substrate a first metallization pattern, a second protective layer, a third layer of polyimide, a fourth layer of metallization, a fifth protective layer, a sixth layer of polyimide and a seventh masking layer; reactive ion etching said third layer of polyimide to expose portions of said second protective layer; etching said exposed portions of said second protective layer; patterning said fifth protective layer and said fourth layer of metallization to leave remaining portions of said fifth protective layer overlying remaining portions of said fourth layer of metallization; forming a pattern in said seventh masking layer reactive ion etching openings in said sixth layer of polyimide through said pattern in said seventh masking layer to expose part of said remaining portion of said fifth protective layer; and simultaneously etching said seventh masking layer and portions of said fifth protective layer exposed through said openings.
Claim 16
Dependent Claim
164 words
A process for fabricating a semiconductor device which comprises the steps of: providing a semiconductor substrate; forming in sequence overlying said substrate a first metallization pattern, a second protective layer, a third layer of polyimide, a fourth layer of metallization, a fifth protective layer, a sixth layer of polyimide and a seventh masking layer; reactive ion etching said third layer of polyimide to expose portions of said second protective layer; etching said exposed portions of said second protective layer; patterning said fifth protective layer and said fourth layer of metallization to leave remaining portions of said fifth protective layer overlying remaining portions of said fourth layer of metallization; forming a pattern in said seventh masking layer reactive ion etching openings in said sixth layer of polyimide through said pattern in said seventh masking layer to expose part of said remaining portion of said fifth protective layer; and simultaneously etching said seventh masking layer and portions of said fifth protective layer exposed through said openings.
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