Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
199 words
A composition for use as a protective coating material in a protective coating layer for a semiconductor device having a high degree of integration, said device comprising a semiconductor memory element, a layer containing an inorganic material encapsulating said element and said protective coating layer arranged between said element and encapsulating layer, said composition comprising a polyamide acid having from 0.1 to 20 mole % of the recurring unit represented by formula (1) and 80 to 99.9 mole % of the recurring unit represented by formula (2), said composition being obtained by the reaction of a diaminosiloxane, an organic diamine containing no silicon and an organic tetrabasic acid dianhydride in the presence of an inert solvent wherein said compounds are pretreated prior to said reaction to remove uranium and thorium contained in said compounds; ##STR5## wherein R is a divalent hydrocarbyl group; R' is a monovalent hydrocarbyl group; R" is a tetravalent organic group; R'" is a divalent organic group which is a residue of an organic diamine containing no silicon; and n is an integer of 1 or more; and wherein said composition contains a combined amount of uranium and thorium of less than 0.2 part per billion.
Claim 2
Dependent Claim
199 words
A composition for use as a protective coating material in a protective coating layer for a semiconductor device having a high degree of integration, said device comprising a semiconductor memory element, a layer containing an inorganic material encapsulating said element and said protective coating layer arranged between said element and encapsulating layer, said composition comprising a polyamide acid having from 0.1 to 20 mole % of the recurring unit represented by formula (1) and 80 to 99.9 mole % of the recurring unit represented by formula (2), said composition being obtained by the reaction of a diaminosiloxane, an organic diamine containing no silicon and an organic tetrabasic acid dianhydride in the presence of an inert solvent wherein said compounds are pretreated prior to said reaction to remove uranium and thorium contained in said compounds; ##STR5## wherein R is a divalent hydrocarbyl group; R' is a monovalent hydrocarbyl group; R" is a tetravalent organic group; R'" is a divalent organic group which is a residue of an organic diamine containing no silicon; and n is an integer of 1 or more; and wherein said composition contains a combined amount of uranium and thorium of less than 0.2 part per billion.
Claim 3
Dependent Claim
27 words
The composition according to claim 1, wherein said semiconductor memory element is a bipolar type semiconductor element having a degree of integration of at least 1K bit.
Claim 4
Dependent Claim
27 words
The composition according to claim 1, wherein said semiconductor memory element is a MIS type semiconductor element having a degree of integration of at least 16K bit.
Claim 5
Dependent Claim
14 words
The composition according to claim 1, wherein said encapsulating layer is a thermosetting resin.
Claim 6
Dependent Claim
13 words
The composition according to claim 1, wherein said encapsulating layer is a ceramic.
Claim 7
Dependent Claim
56 words
The composition according to claim 1, wherein R is selected from the group consisting of an alkylene group having 1 to 5 carbon atoms, a phenylene group and a phenylene group substituted with methyl and R' is selected from the group consisting of an alkyl group having 1 to 5 carbon atoms and a phenylene group.
Claim 8
Dependent Claim
40 words
The composition according to claim 6, wherein R'" is a divalent organic group which is a residue of at least one organic diamine compound selected from the group consisting of 4,4'-diaminodiphenylether, 4,4'-diaminodiphenylmethane, 4,4'-diaminodiphenylsulfone, 4,4'-diaminodiphenylsufide, benzidine, m-phenylenediamine, p-phenylenediamine, 1,5-naphthalenediamine, and 2,6-naphthalenediamine.
Claim 9
Dependent Claim
28 words
The composition according to claim 1, wherein said organic tetrabasic acid dianhydride is present in an equimolar amount to the combined amount of said organic diamine and diaminosiloxane.
Claim 10
Dependent Claim
44 words
The composition according to claim 1, wherein the recurring units of formula (1) are present in an amount of from 0.2 to 10 mole % and the recurring units of formula (2) are present in an amount of from 90 to 99.8 mole %.
Claim 11
Dependent Claim
27 words
The composition according to claim 1, wherein said semiconductor memory element is a bipolar type semiconductor element having a degree of integration of at least 1K bit.
Claim 12
Dependent Claim
27 words
The composition according to claim 1, wherein said semiconductor memory element is a MIS type semiconductor element having a degree of integration of at least 16K bit.
Claim 13
Dependent Claim
14 words
The composition according to claim 1, wherein said encapsulating layer is a thermosetting resin.
Claim 14
Dependent Claim
13 words
The composition according to claim 1, wherein said encapsulating layer is a ceramic.