Stacked structure having matrix-fibered composite layers and a metal layer

Claim 2

A stacked structure comprising: a first composite layer including a first metal matrix and first fibers embedded therein, which first fibers have a thermal expansion coefficient lower than that of said first metal matrix so that said first composite layer has as a whole a first thermal expansion coefficient lower than that of said first metal matrix; a second composite layer including a second metal matrix and second fibers embedded therein, which second fibers have a thermal expansion coefficient lower than that of said second metal matrix so that said second composite layer has as a whole a second thermal expansion coefficient lower than that of said second metal matrix; and a metal layer sandwiched between said first and second composite layers and joined directly and rigidly to said first and second composite layers, wherein said second thermal expansion coefficient of said second composite layer is lower than said first thermal expansion coefficient of said first composite layer; said first and second metal matrices are made of the same metal; said first and second fibers are made of the same material and are arranged non-directionally respectively; and said metal layer is thinner than said first and second composite layers.

Claim 3

A stacked structure of a layered shape for an electrically conducting member to be incorporated in a semiconductor device, in which said stacked structure is sandwiched between at least one semiconductor chip and a supporting member, said stacked structure comprising: a first composite layer including a first metal matrix and first fibers embedded therein, which first fibers have a thermal expansion coefficient equal to or lower than that of the semiconductor to the extent that said first composite layer has as a whole a first thermal expansion coefficient close to that of the semiconductor; a second composite layer including a second metal matrix and second fibers embedded therein, which second fibers have a thermal expansion coefficient equal to or lower than that of said second metal matrix to the extent that said second composite layer has as a whole a second thermal expansion coefficient close to that of the supporting member; and a metal layer sandwiched between said first and second composite layers and joined directly and rigidly to said first and second composite layers wherein said first and second metal matrices are made of the same metal; said first and second fibers are made of the same material and are arranged non-directionally respectively; and said metal layer is thinner than said first and second composite layers.

Claim 4

A stacked structure of a layered shape for an electrically conducting member to be incorporated in a semiconductor device, in which said stacked structure is sandwiched between at least one semiconductor chip and a supporting member, said stacked structure comprising: a first composite layer including a first metal matrix and first fibers embedded therein, which first fibers have a thermal expansion coefficient equal to or lower than that of the semiconductor to the extent that said first composite layer has as a whole a first thermal expansion coefficient close to that of the semiconductor; a second composite layer including a second metal matrix and second fibers embedded therein, which second fibers have a thermal expansion coefficient equal to or lower than that of said second metal matrix to the extent that said second composite layer has as a whole a second thermal expansion coefficient close to that of the supporting member; and a metal layer sandwiched between said first and second composite layers and joined directly and rigidly to said first and second composite layers wherein said first and second metal matrices are made of the same metal; said first and second fibers are made of the same material and are arranged non-directionally respectively; and said metal layer is thinner than said first and second composite layers.

Claim 5

A stacked structure as claimed in claim 1 or 2, wherein said first and second metal matrices and said metal layer are made of the same metal.

Claim 6

A stacked structure as claimed in claim 1 or 2, wherein said first and second fibers are embedded in said first and second metal matrices in a form of knitted cloth, respectively.

Claim 7

A stacked structure claimed in claim 1 or 2, wherein said metal layer is made of a metal having a larger rigidity than those of said first and second metal matrices.

Claim 8

A stacked structure claimed in claim 1 or 2, wherein the thickness of said metal layer is 1/25 to 1/4 times as large as those of said first and second composite layers.

Claim 9

A stacked structure as claimed in claim 1 or 2, wherein said first and second metal matrices are made of copper and said first and second fibers are made of carbon.

Claim 10

A stacked structure as claimed in claim 2, wherein said supporting member is made of an insulator.

Claim 11

A stacked structure as claimed in claims 1 or 2, wherein said first and second metal matrices and said metal layer are made of copper and said first and second fibers are made of carbon.

Claim 12

A stacked structure according to claim 1 or 2, wherein the metal layer is joined directly and rigidly to said first and second composite layers by applying heat and pressure to the first and second composite layers having the metal layer sandwiched therebetween.

Claim 13

A stacked structure as claimed in claim 10, wherein the heating temperature for joining the metal layer to the first and second composite layers is 600°-1050° C.

Claim 14

A stacked structure according to claim 11, wherein the pressure for joining the metal layer to the first and second composite layers is 200 to 400 kg/cm 2 .