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US4482907A Expired / Lapsed US ⏱️ 0.0 years remaining

Planar-type field-effect transistor having metallized-well electrodes and a method of fabrication of said transistor

Assignee: Thales SA
•
Filing: 1982-03-08
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Granted: 1984-11-13
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Expires: 2002-03-08
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Abstract

Abstract A field-effect transistor having a gate consisting of a metallic plane projecting metallized wells of less than one micron in diameter through the channel layer downwards to the semiconductor substrate. They are formed by ion-beam etching. Metallization is performed by cathodic sputtering of a substance which forms a Schottky contact with the semiconductor. The wells are spaced at intervals of less than one micron so as to form a row and are joined together by means of a gate electrode.

Inventors

  • 👤 Paul R. Jay

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 21:25
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/061; H10D30/0618; H10D30/80; H10D30/87; H10D30/873; H10D64/00; H10D64/20; H10D64/23; H10D64/251; H10D64/256; H10D64/27; H10D64/311; H10D64/411; H10W; H10W20/00; H10W20/01; H10W20/021; H10W20/20

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 90 words
A planar field-effect transistor comprising: a semiconductor substrate; an active semiconductor layer arranged on said substrate; a source electrode located on said active layer; a drain electrode located on said active layer; at least one gate electrode having a first portion arranged on said active layer and a second portion formed as a plurality of metallized wells arranged in a row in a plane normal to the direction of the drainsource current, each of said wells extending downwardly from said first portion through said active layer and into said substrate.
Claim 2
Dependent Claim 90 words
A planar field-effect transistor comprising: a semiconductor substrate; an active semiconductor layer arranged on said substrate; a source electrode located on said active layer; a drain electrode located on said active layer; at least one gate electrode having a first portion arranged on said active layer and a second portion formed as a plurality of metallized wells arranged in a row in a plane normal to the direction of the drainsource current, each of said wells extending downwardly from said first portion through said active layer and into said substrate.
Claim 3
Dependent Claim 21 words
A transistor according to claim 1, wherein said source electrode and said drain electrode each extend downwardly into said active layer.
Claim 4
Dependent Claim 17 words
A transistor according to claims 1 or 2 wherein said transistor comprises at least two gate electrodes.
Claim 5
Dependent Claim 22 words
A transistor according to claim 3 wherein the interval between wells is different for each of said at least two gate electrodes.
Claim 6
Dependent Claim 23 words
A transistor according to claim 3 wherein each of said gate electrodes is offset from the others in the direction of said row.
Claim 7
Dependent Claim 73 words
A transistor according to claim 1 wherein a free region is formed in said active layer and said substrate around each of said gate electrodes when a potential is applied thereto, the regions in the substate touching each other to form a single continuous region while the regions in the active layer do not touch, so that the charge-carrier conduction region is limited to the space between the wells in the active layer.

References Cited (Backward Citations)

US2790037A Cited
US2869054A Cited
US3767984A Cited
US3836993A Cited
US4297718A Cited
JPS5273681A Cited
US4300151A Cited
JPS55141760A Cited
JPS566471A Cited
GB2065967A Cited
US4327475A Cited
US4338616A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1987-11-13 1988-05-14 1988-11-13 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1991-11-13 1992-05-14 1992-11-13 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1995-11-13 1996-05-14 1996-11-13 $7700.00 Window Closed / Lapsed

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