Patent US4472259A successfully refreshed from Google Patents.
US4472259A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Focusing magnetron sputtering apparatus
Assignee: Tokyo Electron Ltd
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Filing: 1981-10-29
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Granted: 1984-09-18
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Expires: 2001-10-29
Abstract
Abstract A cathode assembly for use in a magnetron sputtering system, the system having a cathode assembly with parallel elongated target segments which are formed substantially of a material which is desired to be sputter-deposited onto a substrate. The elongated target segments are each provided with a material removal surface which is inclined toward the other segment with respect to the plane of the substrate. Such inclination permits the material which is removed from the target bars to be focused onto a relatively narrow area, thereby improving the efficiency of the sputtering operation and reducing machine down-time for cleaning and vacuum pumping. In other embodiments, end target segments are provided for improving the efficiency of film deposition near the ends of the elongated bars. The end target segments are provided with material removal surfaces which are also inclined, and connect with the elongated target segments to form a rectangular frame arrangement.
Inventors
- 👤 Walter H. Class
- 👤 Arnold J. Aronson
- 👤 Steven D. Hurwitt
- 👤 Michael L. Hill
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 22:29
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3402; H01J37/3405
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
283 words
A magnetron sputtering apparatus including a cathode assembly mounted in an evacuable chamber opposite a substrate plane, the cathode assembly comprising an elongated annular sputtering target which has a sputtering surface composed of a material to be deposited on a substrate disposed at the substrate plane and a contact surface opposite the sputtering surface, a target support, means for clamping the sputtering target with said contact surface in thermal and electrical contact with the target support, and a magnet arrangement positioned near the sputtering target for providing a closed-loop tunnel-shaped magnetic field enclosing the sputtering surface of the sputtering target, wherein the sputtering target comprises first and second elongated substantially straight parallel side portions and first and second end portions, shorter than the side portions, each of said side and end portions having an inner peripheral edge and an outer peripheral edge and said portions being arranged as an oblong frame, the sputtering surfaces of the side portions and the end portions being generally flat and respectively inclined toward each other at an angle between 90° and 120°, and the contact surfaces of the side and end portions being approximately flat and parallel to the respective sputtering surfaces of said portions; and the means for clamping the sputtering target in contact with the target support comprises means forming an annular pole piece of magnetically permeable metal, said annular pole piece contacting the outer peripheral edges of said side and end portions, and means forming an elongated inner pole piece of magnetically permeable metal, said inner pole piece contacting the inner peripheral edges of said side and end portions, said annular pole piece and said inner pole piece forming part of said magnet arrangement.
Claim 2
Dependent Claim
283 words
A magnetron sputtering apparatus including a cathode assembly mounted in an evacuable chamber opposite a substrate plane, the cathode assembly comprising an elongated annular sputtering target which has a sputtering surface composed of a material to be deposited on a substrate disposed at the substrate plane and a contact surface opposite the sputtering surface, a target support, means for clamping the sputtering target with said contact surface in thermal and electrical contact with the target support, and a magnet arrangement positioned near the sputtering target for providing a closed-loop tunnel-shaped magnetic field enclosing the sputtering surface of the sputtering target, wherein the sputtering target comprises first and second elongated substantially straight parallel side portions and first and second end portions, shorter than the side portions, each of said side and end portions having an inner peripheral edge and an outer peripheral edge and said portions being arranged as an oblong frame, the sputtering surfaces of the side portions and the end portions being generally flat and respectively inclined toward each other at an angle between 90° and 120°, and the contact surfaces of the side and end portions being approximately flat and parallel to the respective sputtering surfaces of said portions; and the means for clamping the sputtering target in contact with the target support comprises means forming an annular pole piece of magnetically permeable metal, said annular pole piece contacting the outer peripheral edges of said side and end portions, and means forming an elongated inner pole piece of magnetically permeable metal, said inner pole piece contacting the inner peripheral edges of said side and end portions, said annular pole piece and said inner pole piece forming part of said magnet arrangement.
Claim 3
Dependent Claim
29 words
A magnetron sputtering apparatus according to claim wherein the sputtering surfaces of the side portions of the target are at an angle of 120° with respect to each other.
Claim 4
Dependent Claim
30 words
A magnetron sputtering apparatus according to claim 1 wherein the sputtering surfaces of the side portions of the target are at an angle of 90° with respect to each other.
Claim 5
Dependent Claim
30 words
A magnetron sputtering apparatus according to claim 1 wherein the sputtering surfaces of the end portions of the target are at an angle of 120° with respect to each other.
Claim 6
Dependent Claim
30 words
A magnetron sputtering apparatus according to claim 1 wherein the sputtering surfaces of the end portions of the target are at an angle of 90° with respect to each other.
Claim 7
Dependent Claim
92 words
A magnetron sputtering apparatus according to claim 1 wherein the substrate plane is disposed close to the sputtering target so as to maximize the amount of target material deposited on substrates located at the substrate plane, and the apparatus further comprises an annular electron capture shield positioned adjacent to the outer peripheral edges of the side and end portions of the sputtering target and electrically insulated from the cathode assembly for intercepting electrons that may escape from the tunnel-shaped magnetic field during sputtering of the target, to prevent overheating of the substrate.
Claim 8
Dependent Claim
42 words
A magnetron sputtering apparatus according to claim 6 wherein the distance between the substrate plane and a plane defined by the outer peripheral edges of the side and end portions of the sputtering target is no more than one and one-third inches.
Claim 9
Dependent Claim
43 words
A magnetron sputtering apparatus according to claim 6 wherein the distance between the substrate plane and a plane defined by the outer peripheral edges of the side and end portions of the sputtering target is between one-half inch and one and one-third inch.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-09-18 | 1988-03-19 | 1988-09-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-09-18 | 1992-03-19 | 1992-09-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-09-18 | 1996-03-19 | 1996-09-18 | $7700.00 | Window Closed / Lapsed |