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US4449107A
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Surface elastic wave element
Assignee: Faurecia Clarion Electronics Co Ltd
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Filing: 1982-03-03
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Granted: 1984-05-15
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Expires: 2002-03-03
Abstract
Abstract A surface elastic wave element comprising a (110)-oriented silicon substrate, a zinc oxide layer formed on the silicon substrate and electrodes formed on the zinc oxide layer so as to propagate surface elastic wave to the [001]-axis direction of the zinc oxide layer.
Inventors
- 👤 Ryuichi Asai
- 👤 Takeshi Okamoto
- 👤 Shoichi Minagawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 11:32
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/02; H03H9/02535; H03H9/02818; H03H9/02834; H03H9/02543; H03H9/02574
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
27 words
A surface elastic wave element which comprises: a (110)-oriented silicon substrate; a zinc oxide layer grown on said substrate; and electrodes formed on said zinc oxide layer.
Claim 2
Dependent Claim
27 words
A surface elastic wave element which comprises: a (110)-oriented silicon substrate; a zinc oxide layer grown on said substrate; and electrodes formed on said zinc oxide layer.
Claim 3
Dependent Claim
28 words
A surface elastic wave element which comprises: a (110)-oriented silicon substrate; electrodes formed on said substrate; and a zinc oxide layer grown on said electrodes and silicon substrate.
Claim 4
Dependent Claim
28 words
A surface elastic wave element which comprises: a (110)-oriented silicon substrate; electrodes formed on said substrate; and a zinc oxide layer grown on said electrodes and silicon substrate.
Claim 5
Dependent Claim
28 words
A surface elastic wave element which comprises: a (100)-oriented silicon substrate; a zinc oxide layer grown on said silicon substrate; and electrodes formed on said zinc oxide layer.
Claim 6
Dependent Claim
28 words
A surface elastic wave element which comprises: a (100)-oriented silicon substrate; a zinc oxide layer grown on said silicon substrate; and electrodes formed on said zinc oxide layer.
Claim 7
Dependent Claim
28 words
A surface elastic wave element which comprises: a (100)-oriented silicon substrate; electrodes formed on said substrate; and a zinc oxide layer grown on said electrodes and silicon substrate.
Claim 8
Dependent Claim
28 words
A surface elastic wave element which comprises: a (100)-oriented silicon substrate; electrodes formed on said substrate; and a zinc oxide layer grown on said electrodes and silicon substrate.
Claim 9
Dependent Claim
40 words
A surface elastic wave element which comprises: a (110)-oriented silicon substrate; a metallic layer formed at least on a part of said substrate; a zinc oxide layer grown on said metallic layer; and electrodes formed on said zinc oxide layer.
Claim 10
Dependent Claim
40 words
A surface elastic wave element which comprises: a (110)-oriented silicon substrate; a metallic layer formed at least on a part of said substrate; a zinc oxide layer grown on said metallic layer; and electrodes formed on said zinc oxide layer.
Claim 11
Dependent Claim
21 words
A surface elastic wave element as claimed in claim 2 further comprising a metallic layer formed on said zinc oxide layer.
Claim 12
Dependent Claim
35 words
A surface elastic wave element which comprises: a (110)-oriented silicon substrate; a dielectric layer formed on said substrate; a zinc oxide layer formed on said dielectric layer; and electrodes formed on said zinc oxide layer.
Claim 13
Dependent Claim
35 words
A surface elastic wave element which comprises: a (110)-oriented silicon substrate; a dielectric layer formed on said substrate; a zinc oxide layer formed on said dielectric layer; and electrodes formed on said zinc oxide layer.
Claim 14
Dependent Claim
31 words
A surface elastic wave element as claimed in claim 6 or claim 7 wherein the piezoelectric axis of said zinc oxide layer is perpendicular to the surface of said silicon substrate.
Claim 15
Dependent Claim
45 words
A surface elastic wave element as claimed in claim 6 or claim 7 wherein the piezoelectric axis of said zinc oxide layer is inclined at an angle of up to 10 degrees with respect to a line perpendicular to the surface of the silicon substrate.
Claim 16
Dependent Claim
46 words
A surface elastic wave element as claimed in claim 1, claim 2, claim 6 or claim 7 wherein said zinc oxide layer has a thickness h with respect to the wavelength λ of the surface elastic wave propagating within said element to satisfy the relation 0.9<2πh/λ<3.0.
Claim 17
Dependent Claim
46 words
A surface elastic wave element as claimed in claim 3, claim 4, claim 5 or claim 6, wherein said zinc oxide layer has a thickness h with respect to the wavelength λ of the surface elastic wave propagating within said element to satisfy the relation 0.9<2πh/λ<3.5.
Claim 18
Dependent Claim
41 words
A surface elastic wave element as claimed in claim 1 or claim 7 further comprising a means for providing one of said electrodes with a signal for propagating the surface elastic wave to the [001]-axis direction of said zinc oxide layer.
Claim 19
Dependent Claim
41 words
A surface elastic wave element as claimed in claim 2 or claim 6 further comprising a means for providing one of said electrodes with a signal for generating surface elastic wave to propagate to the [001]-axis direction of said silicon substrate.
Claim 20
Dependent Claim
41 words
A surface elastic wave element as claimed in claim 3 or claim 4 further comprising a means for providing one of said electrodes with a signal for generating surface elastic wave to propagate to the [011]-axis direction of said silicon substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-05-15 | 1987-11-14 | 1988-05-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-05-15 | 1991-11-14 | 1992-05-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-05-15 | 1995-11-14 | 1996-05-15 | $7700.00 | Window Closed / Lapsed |