US4443318A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cathodic sputtering apparatus
Assignee: Von Ardenne Anlagentechnik GmbH
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Filing: 1983-08-17
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Granted: 1984-04-17
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Expires: 2003-08-17
Abstract
Abstract A rotatable magnetron cathode comprising an elongated cylindrical tubular member, magnetic means disposed in said tubular member, a plurality of individual target strips provided with the same or different coating materials to be sputtered removably secured to the tubular member, said target strips extending the axial direction of the tubular member and disposed in spaced parallel relation around the periphery thereof, and means for rotating or indexing the tubular member to bring selected target strips in position for sputtering opposite the magnetic means.
Inventors
- 👤 Harold E. McKelvey
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 03:36
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407; H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3402; H01J37/3405
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
32 words
A rotatable sputtering cathode, comprising an elongated cylindrical tubular member, means for rotating said tubular member, and target means provided with coating material to be sputtered removably secured to said tubular member.
Claim 2
Dependent Claim
32 words
A rotatable sputtering cathode, comprising an elongated cylindrical tubular member, means for rotating said tubular member, and target means provided with coating material to be sputtered removably secured to said tubular member.
Claim 3
Dependent Claim
21 words
A rotatable sputtering cathode as claimed in claim 1, in which said target means comprises a plurality of individual target strips.
Claim 4
Dependent Claim
31 words
A rotatable sputtering cathode as claimed in claim 2, in which said target strips extend lengthwise of the tubular member and are arranged in spaced parallel relation around the periphery thereof.
Claim 5
Dependent Claim
49 words
A rotatable sputtering cathode as claimed in claim 1, in which said target means comprises a plurality of individual target strips extending lengthwise of said tubular member and arranged in spaced parallel relation around the periphery thereof, and means for removably securing said target strips to said tubular member.
Claim 6
Dependent Claim
26 words
A rotatable sputtering cathode as claimed in claim 4, in which said securing means comprises clamping means interposed between adjacent target strips and engaging the same.
Claim 7
Dependent Claim
43 words
A rotatable sputtering cathode as claimed in claim 5, in which said clamping means comprises clamping bars arranged between adjacent target strips and having portions overlapping and engaging said target strips, and including means for securing said clamping bars to said tubular member.
Claim 8
Dependent Claim
17 words
A rotatable sputtering cathode as claimed in claim 3, including means for internally cooling said tubular member.
Claim 9
Dependent Claim
20 words
A rotatable sputtering cathode as claimed in claim 4, including means for circulating a cooling medium through said tubular member.
Claim 10
Dependent Claim
17 words
A rotatable sputtering cathode as claimed in claim 1, including magnetic means mounted in said tubular member.
Claim 11
Dependent Claim
17 words
A rotatable sputtering cathode as claimed in claim 3, including magnetic means mounted in said tubular member.
Claim 12
Dependent Claim
21 words
A rotatable sputtering cathode as claimed in claim 3, including magnetc means mounted in said tubular member and extending lengthwise thereof.
Claim 13
Dependent Claim
24 words
A rotatable sputtering cathode as claimed in claim 6, including an array of permanent magnets mounted in said tubular member and extending lengthwise thereof.
Claim 14
Dependent Claim
111 words
Magnetron cathode sputtering apparatus, comprising an evacuable coating chamber, a cathode including an elongated cylindrical tubular member mounted horizontally in said chamber, magnetic means mounted in the tubular member, a plurality of individual target strips provided with coating material to be sputtered extending lengthwise of the tubular member and arranged in spaced parallel relation around the periphery thereof, means for removably securing said target strips to the tubular member, means for rotating said tubular member about its longitudinal axis to bring selected target strips into sputtering position opposite the magnetic means, and means for supporting and transporting substrates to be coated horizontally through said coating chamber and beneath said magnetic means.
Claim 15
Dependent Claim
111 words
Magnetron cathode sputtering apparatus, comprising an evacuable coating chamber, a cathode including an elongated cylindrical tubular member mounted horizontally in said chamber, magnetic means mounted in the tubular member, a plurality of individual target strips provided with coating material to be sputtered extending lengthwise of the tubular member and arranged in spaced parallel relation around the periphery thereof, means for removably securing said target strips to the tubular member, means for rotating said tubular member about its longitudinal axis to bring selected target strips into sputtering position opposite the magnetic means, and means for supporting and transporting substrates to be coated horizontally through said coating chamber and beneath said magnetic means.
Claim 16
Dependent Claim
26 words
Magnetron cathode sputtering apparatus as claimed in claim 13, in which said magnetic means comprises an array of permanent magnets extending lengthwise of said tubular member.
Claim 17
Dependent Claim
20 words
Magnetron cathode sputtering apparatus as claimed in claim 13, including means for circulating a cooling medium through said tubular member.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-04-17 | 1987-10-17 | 1988-04-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-04-17 | 1991-10-17 | 1992-04-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-04-17 | 1995-10-17 | 1996-04-17 | $7700.00 | Window Closed / Lapsed |