Patent US4414312A successfully refreshed from Google Patents.
US4414312A
Expired / Lapsed
US
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Photopolymerizable polyamide ester resin compositions containing an oxygen scavenger
Assignee: EIDP Inc
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Filing: 1981-12-24
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Granted: 1983-11-08
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Expires: 2001-12-24
Abstract
Abstract A polymeric heat resistant photopolymerizable composition of a polyamide ester resin containing photopolymerizable groups useful for forming relief structures on electrical devices such as capacitors, integrated circuits, printed circuits and semiconductors; a solution of the composition is applied to a substrate such as a coated silicon wafer which is the base for an electrical device, dried to form a film, the film is exposed to radiation through a pattern and photopolymerized; the unexposed and unpolymerized part of the film is dissolved off and the resulting relief structure is converted to a polyimide structure with sharp definition and has good mechanical, chemical and electrical properties; to reduce radiation exposure time and increase the rate of photopolymerization the following constituents are used in the composition: radiation sensitive polymerizable polyfunctional acrylate compound and photopolymerization initiators containing hydrogen donor initiator and aromatic biimidazole, and an oxygen scavenger.
Inventors
- 👤 David L. Goff
- 👤 Edward L. Yuan
- 👤 Stephen Proskow
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 19:26
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/68; H10P14/683; C; C08; C08F; C08F290/00; C08F290/08; C08F290/14; C08F290/145; G; G03; G03F; G03F7/00; G03F7/004; G03F7/027; G03F7/032; G03F7/037; H10P14/63; H10P14/6326; H10P14/6342; H10P14/65; H10P14/6502; H10P14/6506
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
124 words
A radiation polymerizable comprising about (a) 10-50% by weight, based on the weight of the composition, of a polyamide ester resin containing photopolymerizable groups, (b) 50-90% by weight, based on the weight of the composition, of solvent for the resin, (c) 5-30% by weight, based on the weight of the resin, of radiation polymerizable polyfunctional acrylate compound and (d) 0.6-20% by weight, based on the weight of the resin, of a blend of polymerization initiators comprising hydrogen donor photointiator and aromatic biimidazole; (e) 0.1-10% by weigth, based on the weight of the resin, of an oxygen scavenger selected from the group consisting of mercaptobenzothiazole, mercaptobenzooxazole, n-phenyl glycine, triphenyl phosphine or mixtures thereof, wherein the polyamide ester resin upo heating converts to a polyimide resin.
Claim 2
Dependent Claim
124 words
A radiation polymerizable comprising about (a) 10-50% by weight, based on the weight of the composition, of a polyamide ester resin containing photopolymerizable groups, (b) 50-90% by weight, based on the weight of the composition, of solvent for the resin, (c) 5-30% by weight, based on the weight of the resin, of radiation polymerizable polyfunctional acrylate compound and (d) 0.6-20% by weight, based on the weight of the resin, of a blend of polymerization initiators comprising hydrogen donor photointiator and aromatic biimidazole; (e) 0.1-10% by weigth, based on the weight of the resin, of an oxygen scavenger selected from the group consisting of mercaptobenzothiazole, mercaptobenzooxazole, n-phenyl glycine, triphenyl phosphine or mixtures thereof, wherein the polyamide ester resin upo heating converts to a polyimide resin.
Claim 3
Dependent Claim
74 words
The composition of claim 1 in which the polyamide ester resin comprises the following structure: ##STR2## wherein → denotes isomerism, R is an aromatic radical, R 1 is an organic radical containing a photopolymerizable olefinic double bond, R 2 is an aromatic, aliphatic or cycloaliphatic radical and n is a positive integer sufficiently large to provide the resin with a number average molecular weight of about 1500 to 15,000 determined by vapor pressure osmometry.
Claim 4
Dependent Claim
33 words
The composition of claim 2 in which the polyamide ester resin comprises R from pyromellitic dianhydride, R 1 from hydroxy alkyl methacrylate or hydroxy alkyl acrylate and R 2 from an aromatic diamine.
Claim 5
Dependent Claim
67 words
The composition of claim 2 in which the polymerizable polyfunctional acrylate is selected from the group consisting of trimethylol propane trimethacrylate, trimethylol propane triacrylate, trimethylol propane ethoxylate trimethacrylate, trimethylol propane ethoxylate triacrylate, trimethylol propane polyethoxylate trimethacylate, trimethylol propane polyethoxylate triacrylate, pentaerythritol triacrylate, polyethylene glycol diacrylate, tetraethylene glycol diacrylate, triethylene glycol diacrylate, diethylene glycol diacrylate, polyethylene glycol dimethylacrylate, polymethylene diacrylate, polymethylene dimethyacrylate, trimethylene glycol dimethacrylate, and mixtures thereof.
Claim 6
Dependent Claim
23 words
The composition of claim 3 or 4 containing about 0.5-15% by weight, based on the weight of the resin, of an aromatic biimidazole.
Claim 7
Dependent Claim
16 words
The composition of claim 5 in which the aromatic biimidazole is bis(2-o-chlorophenyl-4,5-diphenyl imidazolyl) or bis[2-o-chloro-phenyl-4,5-di(m-methoxyphenyl) imidazolyl].
Claim 8
Dependent Claim
26 words
The composition of claim 5 containing about 0.1-10% by weight, based on the weight of the resin, of a hydrogen donor initiator of an aromatic ketone.
Claim 9
Dependent Claim
12 words
The composition of claim 7 in which the aromatic ketone is tetramethyldiaminobenzophenone.
Claim 10
Dependent Claim
30 words
The composition of claim 1, 5 or 7 containing in addition to the photopolymerization initiators about 0.1-10% by weight based on the weight of the resin, of a leuco dye.
Claim 11
Dependent Claim
15 words
The composition of claim 9 in which the leuco dye is an alkyl amino-aromatic alkane.
Claim 12
Dependent Claim
55 words
The composition of claim 2 in which the polyamide ester is of pyromellitic dianhydride esterified with hydroxyethylmethacrylate and reacted with oxydianiline, the polyfunctional acrylateis tetraethylene glycol diacrylate, the aromatic biimidazole is bis(2-o-chlorophenyl-4,5-diphenylimidazolyl), the hydrogen donor photoinitiator is tetramethyldiaminobenzophenone and the composition contains about 0.1-10% by weight, based on the weight of the resin, of mercaptobenzylthiazole.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-11-07 | 1987-05-09 | 1987-11-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-11-07 | 1991-05-09 | 1991-11-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-11-07 | 1995-05-09 | 1995-11-08 | $7700.00 | Window Closed / Lapsed |