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US4040831A Expired / Lapsed US ⏱️ 0.0 years remaining

Method for the preparation of relief structures

Assignee: Siemens AG
•
Filing: 1975-07-24
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Granted: 1977-08-09
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Expires: 1995-07-24
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Abstract

Abstract The invention provides a method for the preparation of relief structures of highly heat-resistant polymers, using radiation-sensitive, soluble preliminary polymers in the form of polyaddition or polycondensation products of polyfunctional carbocyclic or heterocyclic compounds containing radiation-sensitive radicals in ester groups bound to said compounds with diamines, diisocyanates, bis-acid chlorides or dicarboxylic acids of cyclic structure. According to the invention, the polyfunctional compounds containing the radiation-sensitive radicals contain, besides carboxyl, carboxylic acid chloride, amino, isocyanate or hydroxyl groups suitable for addition or condensation reactions, partly in ortho or peri-position thereto, radiation-reactive radicals in the ester groups bound to the compounds having an oxyalkylene methacrylate or acrylate structure.

Inventors

  • 👤 Roland Rubner
  • 👤 Wolfgang Kleeberg
  • 👤 Eberhard Kuhn

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 04:38
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; G03F7/0388

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 219 words
In a method for the preparation of relief structures consisting of highly heat resistant polymers comprising the steps of applying a soluble, photo or radiation-sensitive prepolymer in the form of a film or foil to a substrate, said prepolymer being a poly-addition or polycondensation prepolymer having repeating units of the formula: ##STR9## wherein, X and D each comprise a carbocyclic and/or heterocyclic nucleus; G is selected from the group consisting of amide, urea or urethane linkages; R* is an organic radical containing a photo- or radiation induced di- or polymerizable olefinic double bond; and is a component of ester group CO 2 R*, said group bound to said nucleus in ortho or peri-position to G; F is a group capable of reacting with the carbonyl group of CO 2 R* to form a cyclic structure upon heating of the prepolymer to liberate R*OH; and wherein F is arranged in ortho- or peri-position to G; x is 1 or 2; and y is 0 or 2; exposing or irradiating the photo or radiation active layer through a negative pattern, dissolving or stripping the unexposed or unirradiated portions and annealing the relief structure obtained; the improvement which comprises using as said R*, a radical represented by the formula: ##STR10## wherein R is hydrogen or methyl and R is an alkylene group.
Claim 2
Dependent Claim 219 words
In a method for the preparation of relief structures consisting of highly heat resistant polymers comprising the steps of applying a soluble, photo or radiation-sensitive prepolymer in the form of a film or foil to a substrate, said prepolymer being a poly-addition or polycondensation prepolymer having repeating units of the formula: ##STR9## wherein, X and D each comprise a carbocyclic and/or heterocyclic nucleus; G is selected from the group consisting of amide, urea or urethane linkages; R* is an organic radical containing a photo- or radiation induced di- or polymerizable olefinic double bond; and is a component of ester group CO 2 R*, said group bound to said nucleus in ortho or peri-position to G; F is a group capable of reacting with the carbonyl group of CO 2 R* to form a cyclic structure upon heating of the prepolymer to liberate R*OH; and wherein F is arranged in ortho- or peri-position to G; x is 1 or 2; and y is 0 or 2; exposing or irradiating the photo or radiation active layer through a negative pattern, dissolving or stripping the unexposed or unirradiated portions and annealing the relief structure obtained; the improvement which comprises using as said R*, a radical represented by the formula: ##STR10## wherein R is hydrogen or methyl and R is an alkylene group.
Claim 3
Dependent Claim 14 words
The method of claim 8, wherein the radiation-reactive radical R* is a β-oxyethylenemethacrylate radical.
Claim 4
Dependent Claim 22 words
The method of claim 1 wherein the soluble prepolymer is irradiated together with compounds which contain one or several N-substituted maleimide groups.
Claim 5
Dependent Claim 14 words
The method claim 3 wherein the soluble prepolymer is irradiated together with N-phenyl maleimide.
Claim 6
Dependent Claim 19 words
Method of claim 4, wherein the N-phenyl maleimide content is less than 20 percent by weight of the prepolymer.
Claim 7
Dependent Claim 22 words
The method of claim 5 wherein the N-phenyl maleimide content is between about 2 and 10 percent by weight of said prepolymer.
Claim 8
Dependent Claim 15 words
The method of claim 1 wherein the prepolymer is prepared in hexamethyl phosphoric acid triamide.

References Cited (Backward Citations)

US3475176A Cited
US3650746A Cited
US3858510A Cited
US3801638A Cited
US3753720A Cited
US3957512A Cited
US3847767A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1980-08-08 1981-02-07 1981-08-09 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1984-08-08 1985-02-07 1985-08-09 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1988-08-08 1989-02-07 1989-08-09 $7700.00 Window Closed / Lapsed

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